The invention belongs to the fields of
new materials and micro-
electronics, and particularly relates to a low-temperature solution preparation method of a high-
dielectric zirconium oxide thin film. The method comprises the following steps: weighing soluble
zirconium salt and measuring a
solvent to prepare a
zirconium oxide precursor solution with the concentration of 0.01 to 0.5 mole /
liter, and performing magnetic stirring and
ultrasonic dispersion for 0.1 to 3 hours to form a clarified
zirconium oxide precursor solution; preparing a
zirconium oxide thin film:
coating a cleaned substrate with the
zirconium oxide precursor solution to form a zirconium
oxide precursor thin film, performing preheating treatment at 50 to 150 DEG C, then performing
light wave annealing at certain power and temperature for certain time,
coating the zirconium oxide precursor solution for multiple times according to the requirement on the thickness of the zirconium oxide thin film, and annealing to obtain the zirconium oxide
dielectric thin film. The zirconium oxide thin film obtained by the method disclosed by the invention is high in
dielectric property, and has important application prospect in the micro-
electronics field of transistors, capacitors and the like. By means of the process, the conventional high-temperature solution process, the long process cycle or expensive equipment and the like can be avoided; the method is low in cost and suitable for industrial large-scale production.