The invention discloses equipment and a process for preparing a back passivation solar cell. The equipment and the process for preparing the back passivation solar cell comprise a feeding cavity, a first process cavity, an isolation cavity, a second process cavity and a discharging cavity, valves are arranged among cavity bodies of the feeding cavity, the first process cavity, the isolation cavity, the second process cavity and the discharging cavity; heating plates are laid in the first process cavity and the second process cavity, a transmission roller is arranged in each cavity which is connected in sequence, a tray loaded with a silicon wafer is transmitted on the rollers, and the tray loaded with the silicon wafer passes through the feeding cavity, the first process cavity, the isolation cavity, the second process cavity and the discharging cavity in sequence. Through the mode, a tunneling silicon dioxide film layer and a doped amorphous/microcrystalline silicon film layer of the Topcon solar cell are prepared at the same time, the Topcon solar cell with higher efficiency can be prepared, ion damage is avoided, dynamic transmission is achieved, the uniformity of the film layers is improved, and the productivity is improved.