The invention discloses a hydrogen peroxide sterilization method which comprises the following steps: S1, detecting the humidity Phi inside an isolator, and the concentration C of hydrogen peroxide; S2, filling a hydrogen peroxide solution into a heated evaporation disc, and introducing a gas evaporated from the hydrogen peroxide solution into the isolator; S3, setting a humidity value as Phi 1, if Phi is greater than Phi 1, turning to step S4; if Phi is less than or equal to Phi 1, turning back to step S2; S4, stopping filling the hydrogen peroxide solution into the evaporation disc; S5, setting the sterilization concentration of hydrogen peroxide in a sterilization state as C1, if C is greater than C1, turning to step S6, if C is less than C1, turning back to step S2; S6, keeping the sterilization state till a set sterilization time T; S7, stopping detecting the humidity Phi inside the isolator and the concentration C of hydrogen peroxide, stopping heating the evaporation disc, stopping filling the hydrogen peroxide solution into the evaporation disc, and the like. The hydrogen peroxide sterilization method has the advantages that no coagulation can be caused and instruments and meters of sterilization equipment can work stably for a long time.