A method and apparatus are disclosed for use in improving the
gate oxide reliability of
semiconductor-on-insulator (SOI)
metal-
oxide-
silicon field effect transistor (
MOSFET) devices using accumulated
charge control (ACC) techniques. The method and apparatus are adapted to remove, reduce, or otherwise control accumulated charge in SOI MOSFETs, thereby yielding improvements in FET performance characteristics. In one embodiment, a circuit comprises a
MOSFET, operating in an accumulated charge regime, and means for controlling the accumulated charge, operatively coupled to the SOI
MOSFET. A first determination is made of the effects of an uncontrolled accumulated charge on time dependent
dielectric breakdown (TDDB) of the
gate oxide of the SOI MOSFET. A second determination is made of the effects of a controlled accumulated charge on TDDB of the
gate oxide of the SOI MOSFET. The SOI MOSFET is adapted to have a selected average time-to-breakdown, responsive to the first and second determinations, and the circuit is operated using techniques for accumulated
charge control operatively coupled to the SOI MOSFET. In one embodiment, the accumulated
charge control techniques include using an accumulated charge sink operatively coupled to the SOI MOSFET body.