The utility model relates to
vacuum coating technology field discloses a kind of sealing detection equipment of
evaporation coating cavity, including mesa, storage room is installed in mesa lower end rear part,
positive pressure method seal tester is installed in mesa lower end middle part, mesa middle part is provided with detection port;In the utility model, start
drive motor,
drive motor is rotated by
coupling and drives
ball screw, sliding block is moved, start electric
hydraulic cylinder, tighten locking bolt, adjust telescopic rod length, realize the adjustment of position, again tighten locking bolt, start electric
hydraulic cylinder, electric
hydraulic cylinder is all driven and press plate moves downward,
extrusion fixation is carried out to
evaporation coating cavity around, avoid the position of
evaporation coating cavity from deviating when operating, to cause air leakage, to the influence of sealing detection operation, rubber layer improves the sealing of evaporation coating cavity and mesa contact surface, improve the compactness, high efficiency, save the time of detection.