A preparation method of a coaxial twin boundary atomic-scale HAADF-STEM sample based on a
pole figure relates to the technical field of TEM
sample preparation methods, and comprises the following steps: S1, pretreating a
magnesium alloy material to prepare a sample for EBSD; s2, calibrating a
single crystal grain in the sample prepared in the step S1 by using EBSD, carrying out
pole figure analysis on a calibrated coaxial twin
crystal interface, comparing with a standard {110}
pole figure for judgment to obtain a {102} coaxial twin
crystal boundary, recording the position of the {102} coaxial twin
crystal boundary, and marking the {102} coaxial twin crystal boundary; s3,
cutting the marked region in the step S2 by adopting an FIB technology, so as to obtain an atomic-scale HAADF-STEM sample; according to the method, the problems existing in existing EBSD characterization can be effectively avoided, the interface positioning efficiency is remarkably improved, the preprocessing time is shortened, and the reliability and
repeatability of coaxial twin boundary identification are improved.