The invention discloses a displacement measurement
system and method for generating virtual moire fringes based on a digital
grating, and belongs to the technical field of optical measurement, and the
system comprises a
laser light source, a real object scale
grating, a
light field collection module, a
signal processing device, a digital indication
grating, a virtual interference generation module and a displacement calculation module. In a
physical space, a gray scale image generated by a
light field reflected by the real object scale grating is captured by the
light field acquisition module and is converted into a
digital signal, and filtering and high-precision light field
information extraction are realized by using the
signal preprocessing module and the phase resolving module. In a digital space, a
complex amplitude distribution function is used as a
simulation carrier of optical behaviors of the digital indication grating, and generation parameters of the digital indication grating are configured to be consistent with a real scale grating. And calling a virtual interference generation module to superpose the preprocessed physical light field and the virtual light field, comparing an ideal moire fringe period with a reference moire fringe period acquired in real time, and carrying out real-time compensation on the parameters of the digital indication grating based on a digital closed-loop measurement method of error quantization-parameter adjustment-
active compensation. According to the method, by dynamically updating grating parameters of a digital light field model, cooperative compensation of multi-source errors and real-time closed-loop compensation of whole-
process measurement errors are achieved, and the stable requirement of ultra-precision manufacturing for nanoscale measurement is met.