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An FMM type mask clamping device

ActiveCN224410042UCounteract weight saggingavoid damageMechanical engineeringPhysics
The utility model relates to FMM type mask processing and detection technical field, specifically disclose a kind of FMM type mask clamping device. The FMM type mask clamping device includes locating frame and locking structure, and the locating frame is equipped with the open slot compatible with the master copy of FMM type mask;The locking structure is equipped as multiple, and is along the profile direction of the locating frame interval arrangement;Wherein, the locking structure includes clamp block and locking piece, the clamp block is set on the locating frame, the locking piece is adjustably connected on the clamp block, and the clamp block is equipped with the avoidance slot, so that the locking piece and the locating frame between formation have adjustment gap. Therefore, provide a kind of safer, reliable and can effectively prevent the structure of substrate damage and deformation, solve the technical problem that master copy is deformed and damaged in the manufacturing, inspection and repair process in the handling and operation link of prior art.
Owner:CHENGDU NEWWAY PHOTOMASK MAKING TECH CO LTD