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33results about How to "Effective mass reduction" patented technology

Double-gate p-channel MOSFET with compression strain thin film strain source and preparation method thereof

The invention provides a double-gate p-channel MOSFET with a compression strain thin film strain source and a preparation method of the double-gate p-channel MOSFET with the compression strain thin film strain source. The MOSFET comprises a source region, a drain region, a conducting channel region, a gate dielectric layer, a grid electrode, an insulating dielectric layer and a compression strain thin film strain layer. The gate dielectric layer is formed on a first surface of a semiconductor material and located on the side face of a first conducting surface and the side face of a second conducting surface of the conducting channel region. The grid electrode is formed on the first surface of the semiconductor material and located on the side face of the gate dielectric layer. The insulating dielectric layer is formed on the side wall of the grid electrode, the side wall of a source electrode and the side wall of a drain electrode. The compression strain thin film strain layer is formed on the side wall of the insulating dielectric layer and used for leading compression strain in the channel direction into the conducting channel region. The surface of the MOSFET is covered with the compression strain thin film strain layer, and the large compression strain in the channel direction is led into the conducting channel region; as a result, effective mass of holes can be reduced, the migration rate of the holes is increased, the working current of the MOSFET is increased, and on-resistance is lowered.
Owner:CHONGQING UNIV

Toothed disk turbine-type stirring device

The invention relates to a stirring device, and especially relates to a toothed disk turbine-type stirring device. The toothed disk turbine-type stirring device comprises a shaft sleeve and a dispersing disk. The shaft sleeve is connected with the dispersing disk through butterfly pressure plates. There are two butterfly pressure plates, which are a first butterfly pressure plate and a second butterfly pressure plate from top to bottom. The first butterfly pressure plate is positioned on the upper part of the dispersing plate, and the second butterfly pressure plate is positioned on the blower part of the dispersing plate. A round nut used for fixing the shaft sleeve is arranged on the lower part of the second butterfly pressure plate. According to the invention, the clamping-type butterfly pressure plates are used for fixing the dispersing plate and the shaft sleeve, and welding is not needed. With the pre-tightening force between the two butterfly pressure plates, the dispersing plate can be firmly clamped, and two planes can be completely flattened. The two butterfly pressure plates has butterfly shapes and light weights, such that the effective mass of the stirring device at the end of a stirring shaft is reduced, critical rotation speed is improved, shaft diameter is reduced, and cost is reduced.
Owner:江苏华东明茂机械有限公司

Gate finger gradually-widened GaN FinFET structure and preparation method thereof

The invention provides a gate finger gradually-widened GaN FinFET structure and a preparation method thereof. The structure comprises a second semiconductor substrate, a bonding material layer locatedon the second semiconductor substrate, and a FinFET structure located on the bonding material layer, wherein the FinFET structure comprises a grid electrode, a source electrode, a drain electrode anda gate finger, the source electrode, the drain electrode and the gate finger are formed by an InyAl<1-y>N barrier layer, a GaN channel layer and an InzGa<1-z>N channel layer which are stacked in sequence, y is greater than 0.165 and less than 0.175, z is greater than 0.1 and less than 0.2, the two ends of the gate finger are connected with the source electrode and the drain electrode respectively, and the width of the gate finger is gradually increased from the source electrode to the drain electrode. GaN/InGaN double channels are adopted; on the one hand, the effective mass of carriers in the InGaN channel is lower than that of carriers in the GaN channel, so that the drift speed of upper limit carriers in the FinFET structure is effectively improved; meanwhile, two-dimensional electrongas (2DEG) can be better limited in the channel through a relatively narrow band gap of the InGaN material, and scattering and current collapse of the carriers are effectively relieved; in addition, the gate finger in the FinFET structure is designed to be in a gradually widened shape, so that the voltage withstanding performance of the FinFET structure is effectively improved.
Owner:浙江集迈科微电子有限公司

SONOS (Silicon Oxide Nitride Oxide Silicon) unit transistor with high erasing speed and manufacturing method thereof

The invention discloses a method for increasing erasing speed of an SONOS (Silicon Oxide Nitride Oxide Silicon) unit transistor by using a strained silicon technology. The method is characterized by comprising the step of making a side wall of a gate on a P type substrate with a plurality of shallow trench isolation regions and also comprises the following steps of: (step 1) depositing a barrier layer to cover the transistor; (step 2) etching the barrier layer so as to remove the barrier layer covering above a NMOS (N-channel Mental-Oxide-Semiconductor) region so that the NMOS region is exposed; (step 3) carrying out carbon ion implantation on the P type substrate between the two sides of the gate and the shallow trench isolation regions; and (step 4) carrying out high temperature annealing so that tensile stresses are generated on the trenches through the silicon carbide. By using the method for increasing erasing speed of the SONOS unit transistor by using the strained silicon technology, disclosed by the invention, the energy band of the silicon is cracked and the electron effective mass is reduced along the trench direction due to the cracking result; meanwhile, the energy valley scattering probability of the electron is also reduced and the electron mobility of the SONOS unit transistor is obviously increased so that SONOS programming efficiency and speed of a hot electron injection mechanism are increased.
Owner:SHANGHAI HUALI MICROELECTRONICS CORP

Periodic cross waveguide structure, electro-optical modulation structure and MZI (Mach-Zehnder Interference) structure

ActiveCN108490650AHigh refractive indexIncreased refractive index changeNon-linear opticsRefractive indexModulation efficiency
The invention provides a periodic cross waveguide structure, and an electro-optical modulation structure and an MZI (Mach-Zehnder Interference) structure both utilizing the same. The periodic cross waveguide structure is in the shape of ridge; strip-like interdigital n-type Si doped zones are formed at position, along a waveguide extension direction, at the ridge-shaped waveguide center; p-type SiGe doped zones are formed among the interdigital spaces; the n-type Si doped zones and the p-type SiGe doped zones are arranged in a periodic cross manner; the n-type Si doped zones are connected at one side of the interdigital spaces thereof and are connected with the bottom of the ridge-shaped waveguide center; gaps are formed between the interdigital bottoms of the n-type Si doped zones and theupper surface of the n-type Si doped zones connected at the bottom of ridge-shaped waveguide center, the p-type SiGe doped zones are arranged in the gaps, and thus, the p-type SiGe zones formed amongthe interdigital spaces are connected mutually. SiGe material carrier effective mass is reduced, free carrier plasma dispersion effect is improved, change of reflective index of the SiGe material isincreased, and accordingly, modulation efficiency, modulation speed, and modulation power consumption are optimized, and the effect of reducing size while improving modulation performance is achieved.
Owner:INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI

Compressively strained si PMOS device based on channel orientation selection and its fabrication method

The invention relates to a compressive strain Si PMOS device based on channel crystal direction selection and a preparation method thereof. The preparation method comprises: selecting a single crystal Si substrate whose crystal plane is (001); growing a relaxed SiC epitaxial layer on the surface of the single crystal Si substrate; growing a strained Si layer on the surface of the relaxed SiC epitaxial layer; and growing a strained Si layer on the surface of the strained Si layer. Continuously grow the gate dielectric layer and the gate layer, and use the etching process to etch the gate layer and the gate dielectric layer to form the gate; use the self-alignment process to perform P-type ion implantation on the device surface different from the gate region to form the source and the drain; after passivation treatment on the surface of the device, a compressively strained SiPMOS device based on channel crystal orientation selection is formed. The present invention solves the traditional relaxation Si 1‑x Ge x The problem of poor hole mobility enhancement effect of substrate-induced biaxial strain Si material. At the same time, the [110] crystal orientation with low conductivity and effective mass is used as the biaxial Si / (001)Si 1‑x C x PMOS channel crystal orientation significantly improves biaxial strain Si / (001)Si 1‑x C x Material mobility and device performance.
Owner:XIDIAN UNIV

Compressive-strain Si PMOS device based on channel crystal orientation selection and preparation method thereof

The invention relates to a compressive-strain Si PMOS device based on channel crystal orientation selection and a preparation method thereof. The preparation method comprises the following steps: selecting a single-crystal Si substrate with a (001) type crystal plane; growing a relaxed SiC epitaxial layer on the surface of the single-crystal Si substrate; growing a strained Si layer on the surface of the relaxed SiC epitaxial layer; growing a gate dielectric layer and a gate layer on the surface of the strained Si layer continuously and etching the gate layer and the gate dielectric layer by using the etching process to form a gate; carrying gout P type ion implantation on the device surface different from a gate region by using a self-aligned process so as to form a source and a drain; and carrying out passivation processing on the device surface to form a compressive-strain Si CMOS device based on channel crystal orientation selection. Therefore, a problem of poor hole mobility enhancement effect of the biaxial strained Si material due to the traditional relaxed Si(1-x)Gex substrate is solved. The low-conductivity effective-quality [110] crystal orientation is used as biaxial strained Si / (001) Si(1- x)Cx PMOS channel orientation, so that the mobility ratio of the biaxial strained Si / (001) Si(1-x)Cx material and the performance of the device are improved.
Owner:XIDIAN UNIV

Lateral double-diffusion field effect transistor, manufacturing method, chip and circuit

The invention provides a lateral double-diffusion field effect transistor, a manufacturing method, a chip and a circuit, and the transistor comprises a substrate which is provided with a high-voltage N-type well; the first N-type drift region, the P-type body region and the second N-type drift region are adjacently arranged and are formed in the high-voltage N-type well; the first tensile strain region is formed in the first N-type drift region; the second tensile strain region is formed in the second N-type drift region; the first drain electrode is formed in the first tensile strain area; the second drain electrode is formed in the second tensile strain area; the first source electrode and the second source electrode are formed in the P-type body region; the substrate electrode is formed between the first source electrode and the second source electrode; the first grid electrode is formed on the upper surfaces of the first N-type drift region and the P-type body region; and the second grid electrode is formed on the upper surfaces of the P-type body region and the second N-type drift region, and a gap is formed between the second grid electrode and the first grid electrode. According to the transistor provided by the invention, the mobility of carriers in a channel can be improved, and the driving capability and speed of the transistor are improved.
Owner:BEIJING CHIP IDENTIFICATION TECH CO LTD +1

Compressively strained si CMOS device based on channel orientation selection and its fabrication method

The invention relates to a compressive-strain Si CMOS device based on channel crystal orientation selection and a preparation method thereof. The preparation method comprises: selecting a Si substrate; growing a relaxed Si epitaxial layer; growing a strained Si layer; forming a shallow trench isolation; forming an N type well region and a P type well region by using an ion implantation process; growing a gate dielectric layer and a gate electrode continuously on the surface of the strained Si layer and etching the gate layer and the gate dielectric layer by using an etching process to form gates respectively; forming a PMOS source-drain region and an NMOS source-drain region based on a self-aligned process; and forming source-drain contact in the source-drain regions and then forming a CMOS device finally. Therefore, a problem of poor hole mobility enhancement effect of the biaxial strained Si material due to the traditional relaxed Si(1-x)Gex substrate is solved. The low-conductivity effective-quality [110] crystal orientation is used as biaxial strained Si / (001) Si(1- x)Cx PMOS channel orientation and the high-electron-mobility [100] crystal orientation as biaxial strained Si / (001) Si(1-x)CxNMOS channel orientation, so that the mobility ratio of the biaxial strained Si / (001) Si(1-x)Cx material and the performance of the device are improved.
Owner:XIDIAN UNIV

Double-gate p-channel mosfet with compressive strain film strain source and its preparation method

The invention provides a double-gate p-channel MOSFET with a compression strain thin film strain source and a preparation method of the double-gate p-channel MOSFET with the compression strain thin film strain source. The MOSFET comprises a source region, a drain region, a conducting channel region, a gate dielectric layer, a grid electrode, an insulating dielectric layer and a compression strain thin film strain layer. The gate dielectric layer is formed on a first surface of a semiconductor material and located on the side face of a first conducting surface and the side face of a second conducting surface of the conducting channel region. The grid electrode is formed on the first surface of the semiconductor material and located on the side face of the gate dielectric layer. The insulating dielectric layer is formed on the side wall of the grid electrode, the side wall of a source electrode and the side wall of a drain electrode. The compression strain thin film strain layer is formed on the side wall of the insulating dielectric layer and used for leading compression strain in the channel direction into the conducting channel region. The surface of the MOSFET is covered with the compression strain thin film strain layer, and the large compression strain in the channel direction is led into the conducting channel region; as a result, effective mass of holes can be reduced, the migration rate of the holes is increased, the working current of the MOSFET is increased, and on-resistance is lowered.
Owner:CHONGQING UNIV

Method for improving erasing speed of SONOS (Silicon Oxide Nitride Oxide Silicon) by utilizing strained silicon technology

The invention discloses a method for improving an erasing speed of an SONOS (Silicon Oxide Nitride Oxide Silicon) by utilizing a strained silicon technology. The method is characterized by comprising the following steps of: after manufacturing a sidewall of a grid electrode on a P-type substrate forming a plurality of shallow channel isolation regions, (1) depositing a baffle layer to cover a transistor; (2) etching to remove the baffle layer covering above an NMOS (N-channel Metal Oxide Semiconductor) region to expose the NMOS region; (3) etching silicon of active regions on two sides of the grid electrode of the NMOS region; (4) depositing silicon carbide at the active regions through a selectivity epitaxy process; and (5) carrying out high-temperature annealing to enable the silicon carbide to generate tensile stress on a channel. According to the method for increasing the erasing speed of the SONOS by utilizing the strained silicon technology, disclosed by the invention, an energy band of silicon is broken up so that effective mass of electron in the direction of the channel is reduced; simultaneously, energy valley scattering probability of the electron is also reduced, and mobility of the electron of the SONOS unit transistor is remarkably improved, thus the SONOS programming efficiency and speed of a hot electron injection mechanism are improved.
Owner:SHANGHAI HUALI MICROELECTRONICS CORP
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