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123results about How to "Reduce polydispersity" patented technology

Fluorinated photoresist materials with improved etch resistant properties

InactiveUS20060105269A1Amenable to free-radical copolymerizationReduce polydispersityRadiation applicationsPhotomechanical apparatusPhotoresistCarbonate
A photoresist composition including a polymer is disclosed, wherein the polymer includes at least one monomer having the formula:
where R1 represents hydrogen (H), a linear, branched or cyclo alkyl group of 1 to 20 carbons, a semi- or perfluorinated linear, branched or cyclo alkyl group of 1 to 20 carbons or CN; R2 represents an alicyclic group of 5 or more carbon atoms; X represents a methylene, ether, ester, amide or carbonate linkage; R3 represents a linear or branched alkylene group or semi- or perfluorinated linear or branched alkylene group with 1 or more carbon atoms; R4 represents hydrogen (H), methyl (CH3), trifluoromethyl (CF3), difluoromethyl (CHF2), fluoromethyl (CH2F), or a semi- or perflourinated aliphatic group; R5 represents trifluoromethyl (CF3), difluoromethyl (CHF2), fluoromethyl (CH2F), or a semi- or perfluorinated substituted or unsubstituted aliphatic group; n represents an integer of 1 or more; and OR12 represents OH or at least one acid labile group selected from a tertiary alkyl carbonate, a tertiary alkyl ester, a tertiary alkyl ether, an acetal and a ketal. A method of patterning a substrate is also disclosed, wherein the method includes: applying the photoresist composition mentioned above to the substrate to form a film; patternwise exposing the film to an imaging radiation source; and developing areas of the film to form a patterned substrate.
Owner:GLOBALFOUNDRIES INC

Continuous micro-reaction device and method for preparing meta-aramid resin and product

A continuous micro-reaction device for preparing meta-aramid resin comprises a prepolymerization system, a polycondensation system, an after-treatment system and a heat exchange system, wherein the prepolymerization system, the polycondensation system and the after-treatment system are connected in sequence, and the heat exchange system is connected with the prepolymerization system and the polycondensation system to control temperatures of the prepolymerization system and the polycondensation system. The continuous micro-reaction device is characterized in that the prepolymerisation system comprises a raw material storage device, a micro-mixer and a micro-reactor which are connected in sequence; the polycondensation system comprises a multistage micro-screw device, and the micro-reactor is connected with multistage micro-screw device. The continuous micro-reaction device for preparing the meta-aramid resin improves the heat transfer effect at the polycondensation stage and the mass transfer effect at the polycondensation stage during preparation of the meta-aramid resin, and achieves the purpose of improving the performance of a meta-aramid resin product. The invention further provides a continuous micro-reaction method for preparing the meta-aramid resin and the product.
Owner:ZHUZHOU TIMES NEW MATERIALS TECH

Fluorinated photoresist materials with improved etch resistant properties

InactiveUS7217496B2Amenable to free-radical copolymerizationReduce polydispersityPhotosensitive materialsRadiation applicationsPhotoresistCarbonate
A photoresist composition including a polymer is disclosed, wherein the polymer includes at least one monomer having the formula:where R1 represents hydrogen (H), a linear, branched or cyclo alkyl group of 1 to 20 carbons, a semi- or perfluorinated linear, branched or cyclo alkyl group of 1 to 20 carbons or CN; R2 represents an alicyclic group of 5 or more carbon atoms; X represents a methylene, ether, ester, amide or carbonate linkage; R3 represents a linear or branched alkylene group or semi- or perfluorinated linear or branched alkylene group with 1 or more carbon atoms; R4 represents hydrogen (H), methyl (CH3), trifluoromethyl (CF3), difluoromethyl (CHF2), fluoromethyl (CH2F), or a semi- or perflourinated aliphatic group; R5 represents trifluoromethyl (CF3), difluoromethyl (CHF2), fluoromethyl (CH2F), or a semi- or perfluorinated substituted or unsubstituted aliphatic group; n represents an integer of 1 or more; and OR12 represents OH or at least one acid labile group selected from a tertiary alkyl carbonate, a tertiary alkyl ester, a tertiary alkyl ether, an acetal and a ketal. A method of patterning a substrate is also disclosed, wherein the method includes: applying the photoresist composition mentioned above to the substrate to form a film; patternwise exposing the film to an imaging radiation source; and developing areas of the film to form a patterned substrate.
Owner:GLOBALFOUNDRIES INC

Derivatized polyhydroxystyrenes (DPHS) with a novolak type structure and blocked DPHS (BDPHS) and processes for preparing the same

A process for preparing a blocked derivatized poly(4-hydroxystryrene)-DPHS having a novolak type structure which comprises the steps of (i) supplying a solution of methanol containing 4-hydroxyphenylmethylcarbinol, (ii) subjecting said solution to an acid catalyzed displacement reaction for a sufficient period of time and under suitable conditions of temperature and pressure to convert substantially all of said carbinol to 4-hydroxyphenylmethylcarbinol methyl ether in solution, (iii) polymerizing said ether containing solution in the presence of a suitable acid catalyst for a sufficient period of time and under suitable conditions of temperature and pressure to form a novolak type polymer; and (iv) reacting said polymer with a vinyl ether, a dialkyl dicarbonate, or a mixture of vinyl ether and a dialkyl dicarbonate to form the blocked DPHS. New compositions of matter which comprise the blocked derivatized poly(4-hydroxystyrene) prepared in the above manner and which have application in the electronic chemicals market such as in a photoresist composition and MEMS, and in other areas such as in varnishes, printing inks, epoxy resins, copying paper, tackifiers for rubber, crude oil separators, toner resins for photocopying, antireflective coatings, and the like.
Owner:DUPONT ELECTRONICS POLYMERS
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