The invention belongs to the field of
integrated circuit fault analysis, and particularly relates to a large-scale
integrated circuit multi-means combined soft defect fault positioning method, which comprises the following steps of: narrowing a multi-input vector range by adopting a dichotomy, and quickly determining a part of logic vectors associated with a fault phenomenon; the method comprises the following steps: dividing an internal
transistor of a large-scale
integrated circuit into a plurality of functional modules according to functions, and testing each
functional module in a grading manner in combination with a
nanoprobe and a dichotomy under the excitation of a part of logic vectors associated with a fault phenomenon; for the screened abnormal function modules, whether
transistor faults or / and connecting line faults exist or not is judged; if a
transistor fault or / and a connecting line fault exist, scanning the fault transistor and an accessory line by adopting an SEM,
slicing a fault part by adopting an FIB, and observing the fault morphology by adopting a TEM; according to the method, the positioning range is effectively narrowed, fault excitation conditions are refined, soft errors in a
large range are converted into hard errors in a
small range, and then fault points are quickly positioned.