The invention belongs to the technical field of
radio frequency micro electro mechanical systems, and particularly provides a piezoelectric film bulk acoustic
resonator with
high frequency and high
coupling coefficient, which is used for overcoming the defect of small
coupling coefficient of the existing
resonator unit. The sensor specifically comprises a
silicon-based substrate, a bottom
mass loading film, a piezoelectric film and an
interdigital transducer, the bottom
mass loading film, the piezoelectric film and the
interdigital transducer are sequentially stacked on the
silicon-based substrate, top grid-shaped
mass blocks are arranged between adjacent
electrode finger strips of the
interdigital transducer, the long edges of the top grid-shaped mass blocks are parallel to the electrodefinger strips, and the short edges of the top grid-shaped mass blocks are flush with suspended ends of the
electrode finger strips. According to the invention, the
coupling coefficient and Q value ofthe
resonator are effectively improved through the
mass loading structure,
stray loss is reduced, and the resonator is suitable for being made into a
broadband filter; meanwhile, due to the adoption of a loading mass
block structure, the heat dissipation performance of the
resonance body is improved; in addition, the length of the top-layer mass block can be matched with that of the
electrode finger strip, and the electrode finger strip adopts a length-gradient and pseudo-electrode-like structure, so that the
transverse mode of the resonator is effectively suppressed.