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Reflective type ultra-violet lithography objective lens

The invention provides a reflective type ultra-violet lithography objective lens. The transmitting direction of an objective plane input beam is used as a system optical axis, and a first transmission set, a reflection set and a second transmission set are placed on the system optical axis in sequence. The first transmission set has positive focal power, the reflection set has negative focal power, and the second transmission set has positive focal power. The first transmission set comprises a first positive lens, a first negative lens, a second positive lens, a third positive lens, a fourth positive lens, a second negative lens, a fifth positive lens, a sixth positive lens, a third negative lens, a seventh positive lens and an eighth positive lens, the reflection set comprises a first reflector and a second reflector, and the second transmission set comprises a ninth positive lens, a forth negative lens, a tenth positive lens, a fifth negative lens, an eleventh positive lens, a twelfth positive lens, a thirteenth positive lens, a fourteenth positive lens, a fifteenth positive lens, a sixteenth positive lens, a seventeenth positive lens, an eighteenth positive lens and a nineteenth positive lens. The reflective type ultra-violet lithography objective lens has the advantages that the numerical aperture is large, and the imagining quality is good.
Owner:INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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