A sonic
actuator including a multi-layer membrane having a non-metallic elastomeric
dielectric polymer layer with a first surface and a second surface, a first compliant
electrode layer contacting the first surface of the
polymer layer, and a second compliant
electrode layer contacting the second surface of the
polymer layer. The
actuator further includes a support structure in contact with the sonic
actuator film. Preferably, the non-metallic
dielectric polymer is selected from the group consisting essentially of
silicone, fluorosilicone,
fluoroelastomer,
natural rubber,
polybutadiene,
nitrile rubber,
isoprene, and
ethylene propylene
diene. Also preferably, the compliant
electrode layer is made from the group consisting essentially of
graphite, carbon, and conductive polymers. The support structure can take the form of grid having a number of circular apertures. When a
voltage is applied to the electrodes, portions of the film held at the aperture of the support structure can bulge due to the
electrostriction phenomenon. The
resultant “bubbles” can be modulated to generate sonic vibrations, or can be used to create a variable surface for
airflow control.