The utility model provides a kind of vacuum
sputtering machine convenient to overhaul, including vacuum
sputtering machine, overhaul cover body, turnover push rod
assembly, by being provided with the overhaul cover body of multiple-angle overturning and lifting above vacuum
sputtering machine, and by turnover push rod
assembly realizes the automatic overturning and positioning lock of cover body, can effectively solve the problem that cover body is difficult to disassemble in traditional overhaul mode, inconvenient operation and big security risk;
Nitrogen spring is used as driving device, hinged in the specific stress position of lifting arm, significantly reduce the output torque required by driving device, improve the stability and smoothness of overturning process;The overall stiffness is enhanced by reinforcing rib plate, further improve the
structural reliability when cover body is opened and supported.And be provided with elastic self-locking type fixed bolt, bearing structure and wear-resistant
bushing, both improve the convenience and safety when cover body is fixed, effectively reduce the wear between
moving parts, prolong the overall service life of device.