The present application relates to the technical field of carbon ring compounds, and particularly relates to a
photoresist based on alkynyl bridging and
biphenyl structure, a preparation method and application. The
photoresist provided by the present application is based on a
biphenyl structure and is constructed by introducing alkynyl as a bridging body, and has a triphenyl skeleton and a conjugated alkynyl group for regulating the
glass transition temperature of the molecule, thereby being beneficial to improving the
thermal stability and film characteristics of the
photoresist based on alkynyl bridging and
biphenyl structure; a typical hydrophobic group is introduced on the basis of a
polyphenol structure unit, which can not only provide an acid-labile
protecting group, but also can reduce the
crystallization ability of the photoresist, thereby meeting the performance requirements of a positive molecular glass for a photoetching process. The photoresist is used as a main component to prepare a photoresist layer material, and the obtained
etching pattern has a good overall effect. The molecular structure provided by the present application is simple, the synthesis
route is simple, the
reaction conditions are mild and controllable, and the scale production can be realized.