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179 results about "Planar array antenna" patented technology

Semiconductor manufacturing method and semiconductor manufacturing apparatus

In an atmosphere of processing gas, on a wafer W consisting mainly of silicon, through a planar-array antenna RLSA 60 having a plurality of slits, microwaves are irradiated to generate plasma containing oxygen, or nitrogen, or oxygen and nitrogen and to implement therewith on the surface of the wafer W direct oxidizing, nitriding, or oxy-nitriding to deposit an insulator film 2 of a thickness of 1 nm or less in terms of oxide film. A manufacturing method and apparatus of semiconductors that can successfully regulate film quality of the interface between a silicon substrate and a SiN film and can form SiN film of high quality in a short time can be obtained.
Owner:TOKYO ELECTRON LTD

Method for constructing thinned MIMO (Multiple Input Multiple Output) planar array radar antenna

ActiveCN102521472AReduce the number of needsSpecial data processing applicationsMimo antennaArray element
The invention provides a method for constructing a thinned MIMO (Multiple Input Multiple Output) planar array radar antenna, which is on the basis of a phase center approximation principle and combines an MIMO antenna thought. The antenna arrangement optimal design is carried out by adopting the MIMO antenna thought. When all transmitting array elements simultaneously (or in turns) transmit orthogonal signals and receiving array elements simultaneously receive echo signals, a virtual planar array with uniform intervals is subjected to equivalence processing by utilizing the phase center approximation principle. According to the thinned MIMO planar array radar antenna constructed according to the invention, few transmitting antenna array elements and few receiving antenna array elements can be adopted and the equivalent full-array-element arrangement planar antenna array is virtually realized. Compared with the planar array antenna which is the same size as the equivalent virtual planar array and is directly arranged, the thinned MIMO planar array radar antenna constructed according to the method disclosed by the invention has the advantage of greatly reducing the requirement on the number of the array elements.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Semiconductor manufacturing apparatus

In an atmosphere of processing gas, on a wafer W consisting mainly of silicon, through a planar-array antenna RLSA 60 having a plurality of slits, microwaves are irradiated to generate plasma containing oxygen, or nitrogen, or oxygen and nitrogen and to implement therewith on the surface of the wafer W direct oxidizing, nitriding, or oxy-nitriding to deposit an insulator film 2 of a thickness of 1 nm or less in terms of oxide film. A manufacturing method and apparatus of semiconductors that can successfully regulate film quality of the interface between a silicon substrate and a SiN film and can form SiN film of high quality in a short time can be obtained.
Owner:TOKYO ELECTRON LTD

Dual polarization planar array antenna and cell elements therefor

An RF antenna structure (e.g., a planar array) includes at least one radiation cell (and typically many, e.g., 16 or 32 or 64, etc.) having a conductive enclosure and an upper probe and a lower probe located at different heights within the enclosure. The enclosure between the upper probe and a bottom of the cell has at least two different cross-sectional areas. The upper and lower probes are preferably oriented at substantially 90° relative to each other. An upper portion of the enclosure beneath the upper probe may have a larger dimension than a lower portion such that the upper portion allows propagation of waves generated by the upper probe in a predetermined frequency band while the lower portion (e.g., above the lower probe) does not substantially allow propagation of waves generated by the upper probe, in the predetermined frequency band.
Owner:PANASONIC AVIONICS CORP

Feedback apparatus and method in multi-antenna system

Disclosed are feedback and transmission devices and methods in full-dimension multi-antenna systems using two-dimensional (2D) planar array antennas, wherein a UE estimates channel states each corresponding to a respective one of multiple domain channels by a reference signal received from a base station, and obtains precoding matrix indicators (PMIs) each corresponding to a respective one of the multiple domain channels and rank indicators (RIs) each corresponding to a respective one of the multiple domain channels based on the estimated channel states. The UE may determine a joint rank indicator (JRI) using the obtained PMIs and the RIs and transmit feedback information containing the determined JRI to the base station.
Owner:SAMSUNG ELECTRONICS CO LTD +1

Rapid and accurate computation method for large-scale MIMO array antenna far-field radiation field

The present invention belongs to the field of electromagnetic value computing, and particularly relates to a rapid and accurate analysis method for large-scale MIMO array antenna far-field radiation. The method comprises: determining a structural parameter of an M*N-element plane array antenna; computing a relationship between an incident field and a scattered field of an element antenna; according to mutual coupling characteristics among element antennas, selecting a sub-array form and size of an extraction unit on an array environment condition; for an antenna sub-array of the extraction unit, computing a unit far-field radiation pattern of the sub-array; and according to the unit far-field radiation patterns of the array and a superposition principle, computing an array antenna far-field radiation pattern. According to the invention, by utilizing the accuracy of mutual coupling computation, the problems that the use of such methods as the moment method, the finite element method and the finite difference time domain (FDTD) method are limited by computing capacity of a single computer, and when the scale of the array antenna is too large, rapid and accurate computation of the antenna radiation field cannot be implemented with a full wave simulation method because of large consumption of memory and computing time, are effectively solved. The method provided by the invention is capable of analyzing the radiation pattern of a large and conformal array antenna, and has higher synthesizing accuracy and higher analysis speed.
Owner:THE PLA INFORMATION ENG UNIV

Ridge waveguide planar array antenna employing mechanical center feeding

The invention discloses a ridge waveguide planar array antenna employing mechanical center feeding. The ridge waveguide planar array antenna comprises a grid layer, a radiation layer, a coupling layer, a feed network layer and a center feed layer, which are sequentially stacked, wherein the mechanical center of the center feed layer is provided with a feeding opening which is vertical to an antenna array and is used for inputting and outputting a signal; the feed network layer is composed of a single ridge waveguide; and ridges are arranged at the centers of narrow sides of various branches of a ridge waveguide power divider on the feed network layer. Through introducing the grid layer and the center feed layer, adopting the design of a ridge waveguide power dividing network, and successfully combining with other structure layers, the targets of improving the out-of-roundness of an antenna radiation pattern, improving the antenna standing wave bandwidth and realizing mechanical center feeding of the antenna are achieved.
Owner:西安三维通信有限责任公司

Planar array antenna

A planar array antenna using a multi-layer substrate having an intermediate layer conductor in a laminated face comprises: four pieces of planar antenna elements disposed at each of geometrically square shaped apexes; first and second slot lines formed in the intermediate layer conductor, and intersecting each other; first to fourth microstrip lines formed along each side of geometrical squares so as to be coupled to each antenna element, and at the same time, electromagnetically coupled to first and second slot lines at both ends of these slot lines; and fifth and sixth microstrip lines, the top end sides thereof traversing the first and second slot lines, respectively, so as to be electromagnetically coupled to the first and second slot lines.
Owner:NIHON DEMPA KOGYO CO LTD +1

Dynamically reconfigurable feed network for multi-element planar array antenna

A dynamically-reconfigurable feed network antenna having a microstrip patchwork radiating surface wherein individual radiating patches and elements of a stripline feed structure can be connected to and disconnected from each other via photoconductive interconnections. Commands from software alternately turn light from light emitting sources on or off, the light or lack thereof being channeled from an underside layer of the antenna so as to enable or disable the photoconductive interconnections. The resultant connection or disconnection of the radiating patches to each other and to the stripline feed structure will vary the antenna's frequency, bandwidth, and beam pointing.
Owner:THE UNITED STATES OF AMERICA AS REPRESETNED BY THE SEC OF THE AIR FORCE

Synthesis method of planar array antenna and difference beam pattern based on hybrid algorithm

ActiveCN106898884AReduce unknown variablesShorten calculation solution timeComplex mathematical operationsAntennasSynthesis methodsBeam pattern
Disclosed is a planar array antenna and difference beam forming method, that is, under the premise of reducing the complexity of a feeder network, only the current excitation and phase excitation of some array elements are changed to realize the conversion between the sum and difference beams. The method includes the steps of using an improved iterative Fourier algorithm to derive unit current excitation values corresponding to sum and difference beam patterns satisfying performance requirements of the sidelobe level, 3dB beam width and the like, retaining the amplitude of the same excitation unit portion corresponding to the two beams, and then, using an improved quadratic programming algorithm to find an array element excitation value outside a common excitation unit set to satisfy respective performance requirements of the sum and difference beams, including the maximum value of the sidelobe level, the slope of a zero position of the difference beam, the directionality coefficient, and so forth. The method of the invention realizes the conversion between the sum and difference beams only by changing the current excitation and the phase excitation of some array elements under the premise that the complexity of the feeder network is reduced.
Owner:JINLING INST OF TECH

Dual-beam three-antenna radar and method for detecting traffic information of microwave

The invention relates to a dual-beam three-antenna radar and a method for detecting traffic information of a microwave. In the radar based on a frequency modulation continuous wave (FMCW) system, a same voltage control oscillator (VCO) is adopted to implement a relevant dual-path microwave signal through a radio frequency switch and realize accurate traffic information detection in combination with a special algorithm; in the hardware aspect, a millimeter wave of which the central frequency is 24.1GHz or so is adopted; and the radar mainly consists of three planar array antennas and five units, namely two paths of microwave emission units, a path of microwave receiving unit, two paths of middle frequency signal processing units, a digital signal unit and a human-machine interface. By adoption of a dual-beam three-antenna technology and an ingenious design of a transceiver component, the use of a microwave singlechip integrated circuit chip is reduced to the maximum extent, so the cost is saved; furthermore, in the scheme, the advantages of a laterally installed microwave radar is kept, and a real-time speed, a running direction and the type of a vehicle can be detected accurately; and the interference resistance capability of adjacent vehicles is improved.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI

All-digital array radar beam former design method based on optical fiber interface

The invention discloses an all-digital array radar beam former design method based on an optical fiber interface, and the method comprises the steps: enabling each row of a two-dimensional planar array antenna array element to correspond to one first-stage DBF daughter board, wherein each first-stage DBF daughter board includes N ADC sampling channels, and M DBF daughter boards are connected withone second-stage DBF mother board; enabling each DBF daughter board to realize software radio processing of corresponding array element intermediate frequency receiving signals to obtain baseband data; calculating an amplitude-phase compensation coefficient of the baseband data of each channel according to the baseband data, then returning the amplitude-phase compensation coefficient to the corresponding DBF daughter board by the DBF mother board to complete amplitude-phase compensation of a receiving channel, and meanwhile completing first-stage digital multi-beam forming according to the self-adaptive weight; and finally, completing second-stage digital multi-beam forming by the DBF mother board according to the first-stage beam forming data. The all-digital array radar digital multi-beam forming function is achieved through the two-stage beam forming framework, data are transmitted through the high-speed optical fiber interface to meet the real-time performance and the stability ofdata transmission, and therefore rapid searching and detecting of airspace targets are met.
Owner:NANJING UNIV OF SCI & TECH

Comprehensive design method of array antenna radiation and scattering performance based on installation height

ActiveCN104036078AExcellent radiationExcellent scattering performanceSpecial data processing applicationsEngineeringIntegrated design
The invention discloses an integrated design method of array antenna radiation and scattering performances based on an installation height. The method comprises the following steps: determining structural parameters and electromagnetic working parameters of a planar array antenna; determining a rectangular grid circular aperture array configuration; calculating a cell radiation pattern function and a cell scattering pattern function; giving an initial installation height value; calculating the installation height in the direction z; calculating a radiation pattern function and a gain pattern function under the installation height in the direction z, as well as a gain loss amount relative to the ideal situation; calculating a scattering pattern function and an RCS (Radar Cross-Section) pattern function under the installation height in the direction z, as well as an RCS reduction amount relative to the ideal situation; judging whether the radiation and the scattering performances meet that the RCS reduction amount is the maximum when the gain loss amount is the minimum or not under the installation height in the direction z, if not, updating the installation height in the direction z and repeatedly calculating until the demand is met.
Owner:XIDIAN UNIV

High gain dual-frequency dual circularly polarized common-caliber planar array antenna

The invention discloses a high gain dual-frequency dual circularly polarized common-caliber planar array antenna which comprises a radiation array (1), a first frequency power divider (2) and a second frequency power divider (3), wherein the first frequency power divider (2) and the second frequency power divider (3) are respectively connected with the left end and right end of the radiation array (1). The high gain dual-frequency dual circularly polarized common-caliber planar array antenna has good polarization isolation and high frequency isolation.
Owner:中天引控科技股份有限公司

Microstrip stack patch antenna using multilayered metallic disk array and planar array antenna using the same

InactiveUS20050275590A1Improving side lobeGood gain characteristicsSimultaneous aerial operationsAntenna supports/mountingsElectrical conductorSide lobe
Provided are a microstrip stack patch antenna using multilayered metallic disk array and a planar array antenna using the same. The microstrip stack patch antenna of the present research concentrates beam patterns and acquires a high gain characteristic by finitely depositing metallic disks in a bore-sight on a conventional microstrip stack patch radiator. The microstrip stack patch antenna includes: a microstrip stack patch directly connected to the feed line; and a mask conductor layer for improving side lobe and gain characteristics, the mask conductor being formed on the microstrip stack patch.
Owner:ELECTRONICS & TELECOMM RES INST

Dual polarization planar array antenna and cell elements therefor

An RF antenna structure (e.g., a planar array) includes at least one radiation cell (and typically many, e.g., 16 or 32 or 64, etc.) having a conductive enclosure and an upper probe and a lower probe located at different heights within the enclosure. The enclosure between the upper probe and a bottom of the cell has at least two different cross-sectional areas. The upper and lower probes are preferably oriented at substantially 90° relative to each other. An upper portion of the enclosure beneath the upper probe may have a larger dimension than a lower portion such that the upper portion allows propagation of waves generated by the upper probe in a predetermined frequency band while the lower portion (e.g., above the lower probe) does not substantially allow propagation of waves generated by the upper probe, in the predetermined frequency band.
Owner:PANASONIC AVIONICS CORP

Band-selective aperture shading for sidelobe reduction in tx/rx phased array satellite communications transceivers

For phased array aperture shading for sidelobe reduction in satellite communication transceivers, apparatus and systems are disclosed. One apparatus includes a planar array antenna tile having a plurality of patch antenna elements. The apparatus also includes a transmit feed point that drives the planar array antenna tile. The apparatus further includes a feed network element that distributes power unequally among two or more of the patch antenna elements, wherein the feed network element connects the two or more patch antenna elements to the transmit feed point.
Owner:BRIGHAM YOUNG UNIV

Installation precision detection method for planar array antenna surface

The invention discloses an installation precision detection method for a planar array antenna surface. A level-1'' level gauge is arranged just in front of an antenna skeleton; the side surface of an antenna is provided with a universal swivel table; a level-1'' theodolite is erected on the universal swivel table; and an antenna is detected by the theodolite, a depthometer and the level gauge. The installation precision detection method for the planar array antenna surface, which is disclosed by the invention, has the advantages of high detection precision, convenience and rapidness in detection, simple detection system structure, easiness in disassembling and assembling and the like.
Owner:ANHUI BOWEI CHANGAN ELECTRONICS

Generalized coprime planar array antenna structure and angle estimation method

ActiveCN106785486AIncrease freedomFlexible Antenna LayoutGeometric CADAntenna arraysEstimation methodsCorrespondence theory
The invention discloses a generalized coprime planar array (GCPA) antenna structure. The structure is composed of two rectangular uniform planar arrays of which the antenna numbers are N1*M1 and N2*M2 respectively, wherein N1 and N2 are the antenna number in the x-axis direction, M1 and M2 are the antenna number in the y-axis direction, and N1 and N2 and M1 and M2 are two groups of coprime numbers; the two subarrays only have one coincident array element at the original point. A method for conducting angle estimation by means of the antenna structure comprises the steps that angle estimation values with fuzziness are obtained according to a MUSIC or ESPRIT algorithm; angle estimation values of which fuzzy values coincide are found through the coprime characteristic, and then a true value of a corresponding theoretical value is obtained. The antenna structure has the advantages that the antenna aperture is increased, antenna array layout is more flexible, and the relatively higher degree of freedom can be achieved; the two subarrays keep the uniform characteristic, a classical signal arrival angle estimation algorithm can be directly applied, and the angle fuzziness problem can be eliminated through the coprime characteristic.
Owner:NANJING UNIV OF AERONAUTICS & ASTRONAUTICS

Integrated cascading optimization method for large-scale planar array antenna pattern

The invention discloses an integrated cascading optimization method for a large-scale planar array antenna pattern, and the method employs a mixed optimization algorithm, which integrates an IFT (iterative Fourier transform) method with a plurality of intelligent optimization algorithms, for the comprehensive design of the planar array antenna pattern. Moreover, the method gives the consideration to impact from mutual coupling factors among antenna units. Aiming at the comprehensive design of a planar array, especially a large-scale planar array antenna (the number of units is greater than 100), the method is high in calculation speed, is high in calculation precision, and is good in universality.
Owner:THE 724TH RES INST OF CHINA SHIPBUILDING IND

Planar antenna array sparse method based on quantum spider population evolution mechanism

ActiveCN107302140ASolving sparse problems with discrete variablesImprove the theory of evolution mechanismAntenna arraysArtificial lifeSparse methodsPlanar antenna array
The invention provides a planar antenna array sparse method based on a quantum spider population evolution mechanism. The planar antenna array sparse method comprises the steps of 1, establishing a planar antenna array sparse model; 2, setting system parameters; 3, performing evaluation on advantages and disadvantages of each spider coding position in a population by a fitness function, and taking the optimal position of the fitness function as the global optimal position of the whole population; 4, dividing genders of spiders in the population; 5, calculating weight of each spider; 6, updating quantum positions of female spiders by adopting an analog quantum vector rotation door rotation based on the updated quantum vector rotary angle; 7, updating quantum positions of male spiders by adopting an analog quantum vector rotation door rotation based on the updated quantum vector rotary angle; 8, updating the respective historical optimal positions; and 9, judging whether the maximum number of iterations is reached or not. By adoption of the planar antenna array sparse method, the difficulty existing in multi-constraint planar array antenna sparsity is solved, and various requirements on the planar sparse array are satisfied.
Owner:HARBIN ENG UNIV

C-band polarization-reconfigurable microstrip planar array antenna

The invention provides a C-band polarization-reconfigurable microstrip planar array antenna in the technical field of communication. The C-band microstrip planar array antenna comprises three dielectric substrates. A polarization-reconfigurable network comprises a 3dB directional coupler and two one-from-two RF switches. Through switching on or switching off the one-from-two RF switches, a working polarization manner in operation of the antenna can be freely selected. Through using the polarization-reconfigurable network, characteristics of horizontal polarization, vertical polarization, left-handed circular polarization and right-handed circular polarization in the antenna can be realized. The C-band polarization-reconfigurable microstrip planar array antenna has advantages of high gain, low profile, small size, high directional diagram consistency, etc. The C-band polarization-reconfigurable microstrip planar array antenna can be used in satellite and radar communication and some application occasions where multipolarization and miniaturization are required.
Owner:SHANGHAI JIAO TONG UNIV

Near-field focusing planar array antenna

The invention discloses a near-field focusing planar array antenna which is high in efficiency, small in size and low in cost. The near-field focusing planar array antenna comprises a first copper-coated metal layer, a first medium layer, a second copper-coated metal layer, a second medium layer, a third copper-coated metal layer, a third medium layer, a fourth copper-coated metal layer, a fourth medium layer and a fifth copper-coated metal layer, wherein the first copper-coated metal layer, the first medium layer, the second copper-coated metal layer, the second medium layer, the third copper-coated metal layer, the third medium layer, the fourth copper-coated metal layer, the fourth medium layer and the fifth copper-coated metal layer are sequentially laminated from top to bottom. Metallized radiation holes are formed in the first medium layer. Metallized phase shift holes are formed in the second medium layer. Metallized transition holes are formed in the third medium layer. A substrate-integrated waveguide parallel feed network is arranged on the fourth medium layer. According to the near-field focusing planar array antenna, phase compensation is achieved through the metallized phase shift holes, the compensation range is wide, the structure is simple, performance is excellent, efficiency of the antenna is high, the size of the antenna can be greatly reduced, and cost can be reduced; in addition, different focusing positions can be adjusted. The near-field focusing planar array antenna is suitable for being popularized and applied in the technical field of microwave antennas and millimeter wave antennas.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Multilayer planar array antenna

Disclosed herein is a multilayer planar array antenna. The antenna includes a waveguide, a first dielectric layer, a radiating unit, a second dielectric layer, parasitic elements, and a feeding cover unit. The waveguide is configured to transmit signals. The first dielectric layer stacked on the waveguide. The radiating unit is formed in such a way that a plurality of radiating elements and a plurality of radiating element feeding portions, which are arranged on the first dielectric layer, are formed thereon, so that a dually polarized wave is transmitted and received in a single plane. The second dielectric layer is stacked on the radiating unit. The parasitic elements are formed on the second dielectric layer to correspond to the respective radiating elements. The feeding cover unit is formed on the parasitic elements to correspond to the plurality of radiating element feeding portions.
Owner:MOTONIX

Microstrip line type planar array antenna

A planar array antenna comprises a powered antenna element and an adjacent passive element which are microstrip-line type ones and disposed on one principal surface of a dielectric substrate; and a feeding system for feeding high frequency power to the powered antenna element. The powered antenna element and a passive element disposed ahead of the powered antenna element constitute a powered element pair, and the adjacent passive element and a passive antenna element disposed ahead of the adjacent passive element constitute a passive element pair. The passive element pair is disposed so that it adjoins said powered element pair in an electric field direction or a magnetic field direction of radio wave emitted from the powered antenna element.
Owner:NIHON DEMPA KOGYO CO LTD +1

Planar array antenna active scattering directional diagram predication method

The invention discloses a planar array antenna active scattering directional diagram predication method. The method comprises the following steps: (1) dividing a large-size planar array scattering field into a plurality of small-size planar sub-array scattering fields according to an active directional diagram method; (2) establishing a BP neural network correction model, wherein the structure of the BP neural network correction model is divided into three layers: an input layer, a hidden layer and an output layer; calculating an output error; carrying out reversed feedback on a difference value of an output result and delta, and sequentially revising a revising amount of a weight according to an error gradient descent method; carrying out model training and finishing the training after a network reaches a convergence target or pre-set iteration times; and applying the active directional diagram method based on the trained neural network correction mode to supply a scattering directional diagram of the large-size planar array. By the aid of the planar array antenna active scattering directional diagram predication method, an optimization algorithm of a neural network is used for optimizing a traditional active scattering directional diagram predication method of an array antenna; the error control can be carried out better, and a predication way is provided for grasping the scattering directional diagram of the large-size planar array.
Owner:CHINA SHIP DEV & DESIGN CENT

Programmable controlled reconfigurable antenna based on cross PIN diode

The invention discloses a programmable controlled reconfigurable antenna based on cross PIN diodes. The programmable controlled reconfigurable antenna comprises a servo circuit, a programmable voltage source and an antenna array, wherein the antenna array consists of M rows and N lines of cross PIN diodes; the servo circuit is used for controlling the programmable voltage source through programs and used for enabling the programmable voltage source to output multiple paths of voltage which meets the programming requirements; the multiple paths of the voltage output from the programmable voltage source are connected with corresponding cross PIN diodes in the antenna array, and are used for controlling the PIN diodes on different arms of the cross PIN diodes to be communicated and powered off, and used for achieving a programmable controlled frequency reconfigurable antenna, a programmable controlled directional diagram reconfigurable antenna and a programmable controlled straight line antenna or a planar array antenna. The programmable controlled reconfigurable antenna based on the cross PIN diode can be realized.
Owner:NANKAI UNIV
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