The application discloses an
electronic tuning type multifunctional sensor and a preparation method thereof. The sensor comprises a
quartz crystal, a
composite electrode and an oscillation circuit; the first end of the
composite electrode is connected with the first end of the oscillation circuit, the second end of the oscillation circuit is connected with the first end of the
quartz crystal, the second end of the
quartz crystal is connected with the second end of the
composite electrode, and the second end of the oscillation circuit is an output end. The composite
electrode comprises a substrate, a planar inductive
microelectrode and a planar capacitive
microelectrode which are arranged on two sides and are connected in series through a via hole; a nano-magnetic
iron oxide film is deposited on the inductive side, a hydroxylated ultra-high specific surface area disordered
porous carbon film is deposited on the capacitive side, and a
perfluorosulfonic acid protective layer is coated on the surfaces of the two films. The application forms a
frequency selection network by connecting the double-sided
electrode and the quartz crystal in series, and outputs an anti-interference frequency
signal; the protective layer is insulated and prevents
short circuit on the inductive side, and improves the
humidity response on the capacitive side; manual overturning can switch the detection of
metal damage, non-
metal defects and
environmental humidity, and the sensor has the advantages of high stability and low cost.