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High Voltage MOSFETs are those that can support a higher VDS & ID than regular MOSFETs Because of this versatility they are used – To switch loads ON/OFF – To up- or down-convert between different voltage levels, or more generally, for Power Management – To provide high-power amplification – … And many more.
Ultra-high voltage mosfet termination structure
The utility model provides a kind of ultrahigh pressure MOSFET terminal structure, above-mentioned terminal structure includes: substrate, it is in and set up main knot and VLD knot, the depth of the VLD knot gradually becomes smaller along the direction away from the main knot;Oxide layer is located on the substrate;Polysilicon field plate is located on the oxide layer;Dielectric layer is located on the polysilicon field plate;And metal field plate is located on the dielectric layer.The utility model embodiment is changed by setting VLD knot and its depth, and is matched with polysilicon field plate and metal field plate, while guaranteeing high pressure resistance, so that terminal structure is shorter, cost is less, and reliability is higher.
Owner:HUNAN HONGAN MICROELECTRONICS CO LTD