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142results about How to "Reduce focus" patented technology

Apparatus for inspecting a substrate, a method of inspecting a substrate, a scanning electron microscope, and a method of producing an image using a scanning electron microscope

InactiveUS20090309022A1Excellent substrate inspectionSensitive defect detecting capabilityStability-of-path spectrometersMaterial analysis using wave/particle radiationScanning tunneling microscopeScanning electron microscope
An object of the present invention provides an inspection apparatus and an inspection method which use an electron beam image to accurately detect a defect that is difficult to detect in an optical image, the apparatus and method also enabling prevention of a possible decrease in focus accuracy of an inspection image which affect the defect detection. To accomplish the object, the present invention includes a height measurement section which measures height of the electron beam irradiation position on the substrate after the substrate is loaded onto a movable stage, a height correction processing section which corrects the measured height, and a control section which adjusts a focus of the electron beam according to the height corrected by the height correction processing section, wherein a stage position set when the height measurement section measures the height differs from a stage position set when the substrate is irradiated with the electron beam, and the height correction processing section corrects a possible deviation in height resulting from movement from the stage position for the height measurement to the stage position for the electron beam irradiation.
Owner:HITACHI HIGH-TECH CORP

Lithographic apparatus, substrate holder and method of manufacturing

A lithographic projection apparatus including a radiation system for providing a projection beam of radiation; a support structure for supporting a patterning device, the patterning device serving to pattern the projection beam according to a desired pattern; a substrate holder having a plurality of protrusions, the extremities thereof defining a substantially flat plane of support for supporting a substantially flat substrate, the substrate holder provided with the ability to provide a pressing force for pressing the substrate against the extremities of the protrusions, the protrusions in an edge zone of the substrate holder arranged to provide a substantially flat overhanging of the substrate in relation to the pressing force of the pressing means; and a projection system for projecting the patterned beam onto a target portion of the substrate. The lithographic projection apparatus is characterized in that the protrusions in an off-edge zone of the substrate holder are distributed so as to provide a substantial equal supporting area for each protrusion of the plurality of protrusions, the supporting areas being defined by a Voronoi diagram distribution associated to the protrusions. The lithographic apparatus offers a substrate holder with a reduced overlay and focus error.
Owner:ASML NETHERLANDS BV

Batch production method of fuel cell membrane electrode

The invention relates to a batch production method of a fuel cell membrane electrode. The batch production method comprises the following steps of (1) preparing a positive electrode catalyst layer membrane electrode in a membrane electrode positive electrode preparation region; (2) transferring the prepared membrane electrode into a CCD detection region, putting on a transparent glass plate tidily, and performing membrane electrode catalyst layer surface appearance detection; (3) transferring the prepared qualified membrane electrode into a drying region, and performing dust-free drying on thecatalyst layer by a tunnel heating furnace; and (4) transferring the membrane electrode into a negative electrode preparation region, and repeatedly executing the steps of (1)-(3) to prepare the fuelcell membrane electrode CCM with relatively high consistency. Compared with the prior art, the batch production method is simple in process and efficient and reliable; screening is performed in the initial stage of membrane electrode assembly (MEA) manufacturing, so that the manufacturing process of the CCM is optimized, the percent of pass of the CCM product is improved, and batch production canbe performed favorably; and in addition, the produced products are higher in consistency, the production cost of the fuel cell is lowered effectively, and the batch production method is suitable fora high-current-discharge fuel cell vehicle-mounted electric pile.
Owner:河南豫氢动力有限公司
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