The invention relates to a device and a method for actively inhibiting the
rollback movement of a parasitic motion principle piezoelectric
actuator, and belongs to the field of precision machinery. The device comprises a foundation
bed, a movable sub unit, a driving unit and a pre-pressure regulation unit, wherein the movable sub unit is installed on the boss of the foundation
bed; the pre-pressure regulation unit is fixed on the foundation
bed through bolts; and the driving unit is installed on the pre-pressure regulation unit. By use of the method, through a synergistic effect of a driving piezoelectric stack and an improving piezoelectric stack in the driving unit, the pressure of the parasitic principle piezoelectric
actuator is constant in a driving process so as to realize the activeinhibition of the
rollback movement. The device and the method have the advantages that the
rollback movement can be obviously inhibited, ideal stepping movement is realized, and an influence generated by
system nonlinearity can be eliminated to a certain degree so as to be convenient for subsequent precise control. The device and the method have a wide application prospect in the fields including precise and ultraprecise positioning, precise measurement, precise
machining and assembling, biological inheritance
engineering, material surface performance detection and the like.