The application provides a kind of
capacitance measuring device, method and
chip probe test
system.The
capacitance measuring device includes probe plate and
capacitance measuring circuit, probe plate includes probe, and capacitance measuring circuit includes
LC resonant circuit and current drive unit.
LC resonant circuit is used to be connected in parallel with the two poles of probe and the
chip to be measured,
LC resonant circuit has no-load state and loaded state, when probe and the
chip to be measured do not contact, LC resonant circuit is in no-load state;When probe and the chip to be measured are in contact, LC resonant circuit is in loaded state.Current drive unit is used to provide
driving current for LC resonant circuit, to make LC resonant circuit produce
resonance, and
resonance amplitude is lower than the opening
voltage of the
diode inside the chip to be measured.
Capacitance measuring device is used to obtain the capacitance of the chip to be measured based on the data of the
resonance waveform of LC resonant circuit in loaded state and no-load state, by calculating
processing to obtain the capacitance offset of LC resonant circuit.