The application discloses an optimization method and
system for improving the scanning angle of an electrostatic MEMS (Micro Electro
Mechanical System) mirror, which comprises the following steps: establishing a
dynamic equation of the electrostatic MEMS mirror, obtaining a driving torque, and establishing a driving torque expression; establishing a finite
element model of a driver with different comb-to-shaft distances, simulating the finite
element model, obtaining the relationship between the
capacitance of different drivers and the angle, fitting the obtained relationship between the
capacitance of different drivers and the angle, and obtaining a driver
capacitance expression; obtaining an expression of a
resonance amplitude based on the obtained driver capacitance expression, the driving torque expression and the
dynamic equation of the electrostatic MEMS mirror, and obtaining the
resonance amplitude of the electrostatic MEMS mirror under different comb-to-shaft distances based on the expression of the
resonance amplitude; and selecting the comb-to-shaft distance corresponding to the maximum value in all resonance amplitudes to optimize the driver of the MEMS mirror. The MEMS mirror can reach the maximum scanning angle, thereby meeting the demand of the electrostatic MEMS mirror in a
large field of view application
scenario.