The invention is directed to an arrangement for generating 
extreme ultraviolet (EUV) 
radiation based on a 
plasma that is generated by 
electric discharge. It is the object of the invention to provide a novel possibility for 
radiation sources based on an 
electric discharge by which a long lifetime of the electrodes that are employed and the largest possible 
solid angle for bundling the 
radiation emitted from the 
plasma are achieved. According to the invention, this object is met by providing 
coated electrodes in the form of two endless strip electrodes which circulate over guide rollers and which have at a 
short distance between them an area in which the 
electric discharge takes place. The 
coating is at least partially sacrificed through excitation by an energy beam and generation of 
plasma, and means for driving each strip 
electrode are arranged in such a way that during a revolution the strip electrodes, after immersion in a 
molten metal, are guided through a wiper for generating a defined thickness of 
coating material, are directed in a 
vacuum chamber to a location where the desired generation of plasma takes place, and are guided back into the 
molten metal after the electric 
discharge in order to regenerate the 
coating and to make 
electric contact between the electrodes and a pulsed high-
voltage source.