A gluing device for an MESA
wafer is provided with a rack, a glue spraying groove, a vacuum suction cup, a
nozzle and a
nozzle position adjusting mechanism. A glue spraying groove is embedded in a
workbench of the rack; the vacuum chuck is fixed in the glue spraying groove; the
nozzle is provided with a liquid collecting cavity and glue spraying holes, the liquid collecting cavity is an inverted
frustum-shaped cavity, the glue spraying holes are formed in the circular bottom face of the liquid collecting cavity and distributed in a multi-layer annular mode, and the axial section of each glue spraying hole located in the center of the circular bottom face of the liquid collecting cavity is of an
isosceles trapezoid structure. The axial sections of the other glue spraying holes surrounding the center position are all of
right trapezoid structures, the right-angle sides of the
right trapezoid structures are located on the sides close to the glue spraying holes in the center position, and the bevel edges are located on the sides away from the glue spraying holes in the center position; and the nozzle position adjusting mechanism is assembled with the nozzle and is arranged above the working table of the rack. According to the utility model, the
photoresist is uniformly coated on the MESA
wafer, and the purposes of ensuring the
wafer gluing quality and reducing the wafer
breakage rate are achieved.