The present application relates to a kind of deep
ultraviolet grating polarizers and preparation method thereof, belong to
polarizer technical field, including from bottom to top sequentially connected substrate, first
dielectric layer, second
dielectric layer and interval setting line grid on the upper surface of second
dielectric layer, the upper surface of second
dielectric layer between adjacent line grid is provided with
metal layer, line grid includes from bottom to top sequentially connected first
dielectric layer, second
dielectric layer and
metal layer;The present application is by adding high low
refractive index alternately between substrate and
metal line grid first, second dielectric layer, and metal layer is set on the upper surface of second dielectric layer in line grid gap, constructs the medium-metal
composite structure with
resonance coupling effect.The design effectively controls the equivalent optical
admittance of deep
ultraviolet band, significantly enhances the
transmittance of TE polarized light, while maintaining the efficient inhibition to TM polarization, so as to improve the polarization efficiency while reducing
metal absorption loss.As a whole, the
polarizer has the advantages of
high transmittance, high
extinction ratio and the like.