A plane single
silicon bimetal layer power parts and the manufacture method, the power parts includes: the
silicon underlay; the two oxidation
layers that forms at the trap area in the
silicon underlay and the front surface of the silicon
underlay; the leaking pole
metal, the source pole
metal and the grid
metal that are located at the front surface of the two oxidation
layers; the trap touching area, the
source area, the leaking area and the channel area that is established in the silicon underlay; forms a grid oxidation layer at the front surface of the silicon underlay; the multi-
crystal grid located on the oxidation layer; the two oxidation
layers with several holes respectively; the filling holes of the leaking pole metal, the source pole metal and the grid metal on the front surface of the two oxidation layers connect with the leaking area, the trap touching area, the
source area and the multi-
crystal silicon grid. The manufacture method includes the grid oxidation layer, the trap area, the channel area, the multi-
crystal silicon grid, the trap touching area, the
source area, the leaking area, the oxidation layer and the metal layer. The invention is low cost, small engrossing area, small grid
capacitance, and easy integration.