Patents
Literature
Patsnap Copilot is an intelligent assistant for R&D personnel, combined with Patent DNA, to facilitate innovative research.
Patsnap Copilot

37results about How to "Reduce gate size" patented technology

Forming method of CMOS (complementary metal-oxide-semiconductor) transistor

The invention provides a forming method of a CMOS (complementary metal-oxide-semiconductor) transistor. The forming method comprises the following steps that a semiconductor substrate is provided, and the semiconductor substrate comprises an NMOS (N-channel metal oxide semiconductor) region, a PMOS (P-channel metal oxide semiconductor) region, a first groove positioned in the surface of the NMOS region and a second groove positioned in the surface of the PMOS region; a grid dielectric material layer, a first metal layer, a second metal layer and a third metal layer are sequentially formed on the surfaces of the inner walls of the first groove and the second groove and the surface of a dielectric layer; covering material layers filling into the first groove and the second groove are formed, the materials of the covering material layers are insulation dielectric materials; the covering material layer on the NMOS region is removed; the covering material layer at partial thickness in the second groove is removed for forming a covering layer; a third metal layer and a second metal layer in the first groove, above the dielectric layer as well as above the covering layer and in the second groove are removed; the covering layer is removed; a first grid electrode and a second grid electrode are formed in the first groove and the second groove. The forming method of the CMOS transistor has the advantage that the performance of the CMOS transistor can be improved.
Owner:SEMICON MFG INT (SHANGHAI) CORP

A method for preparing 10nm T-grid by electron beam exposure

The present invention belongs to the technical field of micro-electronic components, and especially provides a method for manufacturing a 10-nanometer T-shaped gate through electron beam lithography. The method adopts the technology combining electron beam overlap lithography with reactive ion etching, and comprises the steps of applying electron beam photoresist to the surface of an epitaxial layer of a device substrate in a spin coating way, designing a layout through electron beam lithography, performing metal evaporation, stripping the evaporated metal, then performing reactive ion etching to form a table top, applying the electron beam photoresist to a sample with the etched table top in a spin coating way, utilizing the precise electron beam overlap lithography to form a T-shaped morphology, performing metal evaporation again, and stripping the evaporated metal to form a T-shaped metal electrode, thereby manufacturing a 10-nanometer T-shaped gate between a source electrode and a drain electrode of the device through the electron beam lithography. The method of the present invention not only can greatly reduce the foot size of the T-shaped gate, but also can manufacture the T-shaped gate having a very wide head, thereby reducing gate resistance of the device and raising cut-off frequency of the device, therefore, the method has important significance in a process for manufacturing GaN-based and InP-based high-electron-mobility transistors.
Owner:FUDAN UNIV

Step-type gan gate device and preparation method thereof

The invention provides a stepped GaN gate device and its preparation method. The preparation method comprises the following steps: providing a substrate, growing a GaN channel layer and a barrier layer, defining gate, source, and drain regions; removing the source-drain region barrier layer, and grow a doped GaN layer in the source and drain regions, and the upper surface of the doped GaN layer is higher than the barrier layer; deposit an isolation layer, and define the isolation layer in the vertical direction as a side wall layer; except the side wall layer in the gate area The area is divided into a zero etching area and a zero step area, and the zero etching area, the step area and the gate area have the same extension direction; the isolation layer of the zero etching area is removed; and a gate metal layer is deposited in the gate area. The present invention forms the step-type field plate of the grid through the isolation sidewall process, and at the same time reduces the size of the grid, and also improves the withstand voltage performance of the device by using the step-type field plate. The size of the grid in the invention is controllable, and the precision of the photolithography equipment is not high; the stepped field plate structure and the grid structure are formed together, and the process conditions are simple and feasible, and the repeatability is high.
Owner:浙江集迈科微电子有限公司
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products