The present invention belongs to the technical field of micro-electronic components, and especially provides a method for manufacturing a 10-nanometer T-shaped gate through 
electron beam 
lithography. The method adopts the technology combining 
electron beam overlap 
lithography with 
reactive ion etching, and comprises the steps of applying 
electron beam 
photoresist to the surface of an epitaxial layer of a device substrate in a 
spin coating way, designing a 
layout through 
electron beam lithography, performing 
metal evaporation, stripping the evaporated 
metal, then performing 
reactive ion etching to form a table top, applying the electron beam 
photoresist to a sample with the etched table top in a 
spin coating way, utilizing the precise electron beam overlap 
lithography to form a T-shaped morphology, performing 
metal evaporation again, and stripping the evaporated metal to form a T-shaped metal 
electrode, thereby manufacturing a 10-nanometer T-shaped gate between a source 
electrode and a drain 
electrode of the device through the 
electron beam lithography. The method of the present invention not only can greatly reduce the foot size of the T-shaped gate, but also can manufacture the T-shaped gate having a very wide head, thereby reducing 
gate resistance of the device and raising 
cut-off frequency of the device, therefore, the method has important significance in a process for manufacturing GaN-based and InP-based high-electron-mobility transistors.