The present invention belongs to the technical field of micro-electronic components, and especially provides a method for manufacturing a 10-nanometer T-shaped gate through
electron beam
lithography. The method adopts the technology combining
electron beam overlap
lithography with
reactive ion etching, and comprises the steps of applying
electron beam
photoresist to the surface of an epitaxial layer of a device substrate in a
spin coating way, designing a
layout through
electron beam lithography, performing
metal evaporation, stripping the evaporated
metal, then performing
reactive ion etching to form a table top, applying the electron beam
photoresist to a sample with the etched table top in a
spin coating way, utilizing the precise electron beam overlap
lithography to form a T-shaped morphology, performing
metal evaporation again, and stripping the evaporated metal to form a T-shaped metal
electrode, thereby manufacturing a 10-nanometer T-shaped gate between a source
electrode and a drain
electrode of the device through the
electron beam lithography. The method of the present invention not only can greatly reduce the foot size of the T-shaped gate, but also can manufacture the T-shaped gate having a very wide head, thereby reducing
gate resistance of the device and raising
cut-off frequency of the device, therefore, the method has important significance in a process for manufacturing GaN-based and InP-based high-electron-mobility transistors.