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43results about How to "Improve contrast" patented technology

Diffraction order controlled overlay metrology

In one embodiment, a system for imaging an acquisition target or an overlay or alignment semiconductor target is disclosed. The system includes a beam generator for directing at least one incident beam having a wavelength λ towards a periodic target having structures with a specific pitch p. A plurality of output beams are scattered from the periodic target in response to the at least one incident beam. The system further includes an imaging lens system for passing only a first and a second output beam from the target. The imaging system is adapted such that the angular separation between the captured beams, λ, and the pitch are selected to cause the first and second output beams to form a sinusoidal image. The system also includes a sensor for imaging the sinusoidal image or images, and a controller for causing the beam generator to direct the at least one incident beam towards the periodic target or targets, and for analyzing the sinusoidal image or images. In one application the detector detects a sinusoidal image of an acquisition target with the same pitch as the designed target and the controller analyzes the pitch of the sinusoidal image compared to design data to determine whether the target has been successfully acquired. In a second application a first and second periodic target that each have a specific pitch p are imaged so that the detector detects a first sinusoidal image of the first target and a second sinusoidal image of the second target and the controller analyzes the first and second sinusoidal image to determine whether the first and second targets have an overlay or alignment error.
Owner:KLA TENCOR CORP

Fourier-wavelet regularization-based coaxial phase contrast image restoration method

The invention belongs to the field of biomedical engineering and medical imaging, and relates to a fourier-wavelet regularization-based coaxial phase contrast image restoration method. The method comprises the steps: collecting a plurality of images of a tool edge instrument, and acquiring tool edge section curves of each image at different positions to obtain an integrated line spread function h(x) of a coaxial phase contrast imaging system; placing an imaging object, and collecting images to obtain an imaging result y(x); calculating fourier transformation of the y(x) and the h(x) to obtain Y(omega) and H(omega); obtaining fourier regularization evaluation of an ideal phase contrast imaging result through fourier inverse transformation, and effectively evaluating the wavelet coefficient signal wj(x) of the ideal phase contrast f(x); and conducting Db6 orthogonal wavelet transform on the fourier regularization evaluation, and carrying out regularization to obtain wavelet inverse transformation and obtain an evaluation result. According to the fourier-wavelet regularization-based coaxial phase contrast image restoration method, the contrast of the phase contrast image under deterioration effect can be effectively improved, the fidelity of the restoration image can be ensured, and the image restoration constrast and signal to to noise ratio can be improved.
Owner:TIANJIN UNIV

Image enhancement method in low-illumination environment

InactiveCN106780375AImprove contrastLarge difference in gray levelImage enhancementImage analysisHistogramImage enhancement
The invention discloses an image enhancement method in a low-illumination environment. The grayscale values of pixel points in an original low-illumination image concentrated in a relatively narrow low-brightness range are adjusted to be balanced according to a histogram balance principle of the grayscale values of the pixel points in the low-illumination image by adopting an improved image enhancement algorithm based on grayscale-level movement and pixel point grayscale value correction, and the low-illumination image is moved to a relatively high-brightness range. According to a Retinex theory, an irradiation light component of the image subjected to the grayscale value adjustment is filtered out, and a reflected light component is reserved; a real light and shade relationship between the pixel points in the image is found according to a relative light and shade relationship of the grayscale values in the reflected light component; and linear stretching is performed to obtain final adjusted grayscale values of the pixel points of the image. According to the method, the brightness and contrast of the low-illumination image are improved to a certain extent, color enhancement can be realized to a certain extent, local details in the low-illumination image are highlighted, and the intuitive visual quality of the low-illumination image is remarkably improved.
Owner:NANJING UNIV OF POSTS & TELECOMM

Visual sensor system used for dry cell slurry layer paper winding defect detection and method thereof

The invention discloses a visual sensor system used for dry cell slurry layer paper winding defect detection and a method thereof. The system comprises a visual sensor, a ring light source, a support,a rotating disk, and three synchronous triggering sensors, a to-be-detected dry cell is placed at center of a rotating disk, the rotating disk keeps rotation at a uniform speed by winding central axis, three synchronous triggering sensors are uniformly distributed at a side surface of the rotating disk at intervals according to 120 DEG, the ring light source is placed at a front end of the visualsensor, the visual sensor is arranged at the support, axis at end of the support and a vertical direction form a fixed included angle, and its extending line and the axis of the dry cell are intersected at the top of the dry cell, and the visual sensor is connected with the synchronous triggering sensors and the ring light source, so that high speed synchronization problem of dry cell positioning, light source control and image acquisition can be solved. The visual sensor system solves the problem that whether visual inspection of the dry cell by eyes has slurry layer paper winding defect ornot, and has the advantages of full automation, fast detection speed, and high system reliability.
Owner:SOUTH CHINA UNIV OF TECH
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