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90results about How to "Low layer" patented technology

Techniques promoting adhesion of porous low K film to underlying barrier layer

Adhesion of a porous low K film to an underlying barrier layer is improved by forming an intermediate layer lower in carbon content, and richer in silicon oxide, than the overlying porous low K film. This adhesion layer can be formed utilizing one of a number of techniques, alone or in combination. In one approach, the adhesion layer can be formed by introduction of a rich oxidizing gas such as O2/CO2/etc. to oxidize Si precursors immediately prior to deposition of the low K material. In another approach, thermally labile chemicals such as alpha-terpinene, cymene, and any other non-oxygen containing organics are removed prior to low K film deposition. In yet another approach, the hardware or processing parameters, such as the manner of introduction of the non-silicon containing component, may be modified to enable formation of an oxide interface prior to low K film deposition. In still another approach, parameters of ebeam treatment such as dosage, energy, or the use of thermal annealing, may be controlled to remove carbon species at the interface between the barrier and the low K film. In a further approach, a pre-treatment plasma may be introduced prior to low k deposition to enhance heating of the barrier interface, such that a thin oxide interface is formed when low K deposition gases are introduced and the low K film is deposited.
Owner:APPLIED MATERIALS INC

Tall V/STOL aircraft

A vertical or short takeoff and landing (V/STOL) airplane is described having a vertical form factor. Making the airplane tall has many advantages when operating in hover mode close to the ground. Several variations of the design are described. The preferred embodiment consists of two tall fuselage2 structures having an airfoil shape in plan view. As high above the ground as practical a “lift wing” spans the space between these fuselages. This wing may be equipped with lift augmentation systems to facilitate V/STOL flight. In the center of the span on the leading edge of the lift wing is placed a turboprop engine. Alternatively, the wing and attached engine can be made to tilt about a horizontal axis. For takeoff the wing will be tilted skyward. A second wing slightly below and behind the lift wing has a pusher engine located on the trailing edge. This lower wing and engine is also able to tilt about a horizontal axis parallel to the lift wing. During takeoff this lower engine is pointed downward toward the ground. This lower wing contains aerodynamic control surfaces to provide attitude and position control. Subsequent to liftoff the wings and engines tilt into a horizontal position to provide cruise lift and thrust. At the end of the flight the wings and attached engines are tilted back to provide vertical lift for hover, maneuvering, and soft landing.
2 “Fuselage” is used here even though it substantially differs from the conventional fuselage (and its French origins meaning, “spindle shaped”) since in plan view it is an airfoil shape of large thickness. It will be used here for lack of a better word. Think of fuselage as meaning “where the pilot, passengers and cargo are located”.
Owner:ALLEN NORMAN CARTER
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