A lead-free packaged all-
quartz resonant
pressure sensor comprises a 3J21
alloy shell cover, the 3J21
alloy shell cover is connected with a 3J21
alloy shell in a sealed mode, and a
quartz island
film pressure conversion unit, a
quartz resonant layer element and a quartz base component which are connected through a vacuum glass
frit sealing technology are arranged in an inner cavity formed by the 3J21 alloy shell cover and the 3J21 alloy shell. Glass
frit dielectric layers are arranged between the quartz island
film pressure conversion unit and the quartz
resonance layer element as well as between the quartz
resonance layer element and the quartz base part; three quartz
layers and two glass
frit dielectric layers are connected to form an all-quartz pressure
chip; the all-quartz pressure
chip, the 3J21 alloy shell and the gold-plated lead column are connected through
sintering of glass
silver paste, and a
chip electrode signal is led out through the gold-plated lead column; according to the invention, the long-term stability of the sensor is significantly improved, the
mechanical strength and reliability of
electrical connection are enhanced, real-time and homologous sensing of temperature signals is realized, and the compensation precision of the sensor in a full temperature range is effectively improved.