The invention provides a method for improving electric leakage of a
semiconductor device with a
dislocation structure, and the method comprises the steps: providing a substrate, and forming a gate structure on the substrate; after a first side wall is formed on the side face of the gate structure, LDD regions are formed in the substrate on the two sides of the first side wall; forming a
germanium-
silicon layer in the PMOS region of the substrate; forming a non-
crystallization region in the NMOS region of the substrate; after a sacrificial layer is deposited in the NMOS region, an annealing process is implemented, so that the non-
crystallization region is recrystallized and a
dislocation structure is formed; after the sacrificial layer is removed,
etching the NMOS region so as to remove part of the
dislocation structure; epitaxially growing a
silicon layer in the groove formed in the
etching region, and re-forming a complete dislocation structure; after a second side wall is formed on the side surface of the first side wall, forming a source / drain region in the substrate on two sides of the second side wall; and after a stress
memory process is implemented, forming a
contact hole. The twin
crystal defect generated by initially forming the dislocation structure can be eliminated, so that the formation of an electric leakage channel is inhibited, and the device performance is improved.