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136 results about "Photoconductive switch" patented technology

Photoconductive switch manufacturing method based on SiC substrate

The invention provides a photoconductive switch manufacturing method based on a SiC substrate, and relates to the technical field of wide bandgap semiconductor material photoelectronic devices. SiC with the thickness of 400 micrometers after polishing serves as a substrate in the photoconductive switch manufacturing method based on the SiC substrate. The photoconductive switch manufacturing method based on the SiC substrate comprises the steps that the SiC substrate is prepared; a SiO2 insulation protective layer is generated through thermal oxidation, and a window is formed through photoetching; in high vacuum low temperature Ar atmosphere, a Ti electrode is deposited on the carbon surface, and a Ni electrode is deposited on the silicon surface; after high temperature rapid thermal processing in the Ar atmosphere, a Au protective film is deposited through a small-size ion sputtering instrument, and a photoconductive switch of a Au/Ti/SiC/Ni/Au different-surface opposite-electrode structure is formed by being encapsulated through transparent Si3N4 after a copper electrode is bonded. According to the photoconductive switch manufacturing method based on the SiC substrate, due to the fact that epitaxy of an n-type or p-type SiC epitaxial layer with high doping concentration is not carried out through devices such as CVDs, the technological process of semiconductors is reduced, the rate of finished products is improved, and production cost is lowered. Technical assurance is provided for the production of devices having hash requirements for large power, high frequency and high temperature resistance in future.
Owner:SHANGHAI NORMAL UNIVERSITY

Opposite front light-in high-power photoconductive switch device and making method thereof

The invention provides an opposite front light-in high-power photoconductive switch device and a making method thereof. The opposite front light-in high-power photoconductive switch device includes a hollow metal electrode, a metal ring, an antireflection passivation layer, a transparent conductive layer, a high-resistance semiconductor, a high-reflectivity electrode, and a solid metal electrode. The transparent conductive layer and the antireflection passivation layer are arranged in sequence on the high-resistance semiconductor used as a substrate, and the metal ring surrounding and connected around the transparent conductive layer and the antireflection passivation layer is also arranged on the high-resistance semiconductor. The side of the metal ring opposite to the substrate is connected with the hollow metal electrode. The high-reflectivity electrode is arranged on the back of the high-resistance semiconductor. The side of the high-reflectivity electrode opposite to the substrate is connected with the solid metal electrode. The device is packaged with a dielectric material with high breakdown field strength. Edge breakdown caused by uneven carriers can be avoided, and the withstand voltage and light efficiency of the switch can be greatly improved.
Owner:SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI

Photoconductive switch high in withstand voltage and low in on resistance and method for manufacturing same

The invention provides a method for manufacturing a photoconductive switch high in withstand voltage and low in on resistance, comprising the steps of: providing a semi-insulating substrate, and forming a transparent electrode layer on the semi-insulating substrate; applying a photoresist layer on the transparent electrode layer through spin coating, patterning the transparent electrode layer and forming transparent electrodes at the left and right two ends of the semi-insulating substrate, respectively; applying second photoresist layers on the semi-insulating substrate and the transparent electrode through spin coating, patterning the second photoresist layer and exposing the region for forming a metal electrode; forming the metal electrode which is in contact with the transparent electrodes, respectively, and isolated from the semi-insulating substrate; and removing the second photoresist layers. Accordingly, the invention also provides a photoconductive switch high in withstand voltage and low in on resistance. The method provided by the invention is capable of improving the current density capacity of the switch and reducing the field intensity concentration while guaranteeing a certain electrode spacing, so that the photoconductive switch has low on resistance and high withstand voltage property at the same time.
Owner:SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI

High-power photoconductivity switch test device and application thereof

The invention relates to a high-power photoconductivity switch test device and application thereof. The test device comprises a pulse laser, a light source leading-in part, a light hole, a high-voltage measurement main circuit, a high-voltage power supply, an oscilloscope and a phototube, wherein the laser pulse generated by the pulse laser is received by the light source leading-in part to form light spots, and the light source leading-in part adjusts the light path and controls the light intensity of the light spots at unit area; the light spots are divided into measurement light spots and reference light spots by a spectroscope arranged in the light source leading-in part; the light hole receives the measurement light spots and adjusts the light intensity of the measurement light spots; the phototube receives and converts the reference light spots into electrical signals and transmits the electrical signals to the oscilloscope; the high-voltage measurement main circuit outputs electrical signals generated by the irradiation of the measurement light spots of a photoconductivity switch to be tested; the high-voltage power supply applies voltage to the high-voltage measurement main circuit; and the oscilloscope analyzes and displays the electrical signals from the high-voltage measurement main circuit.
Owner:江苏先进无机材料研究院

Film thickness measuring device and film thickness measuring method

Provided is a technique for performing a film thickness inspection on a film including an active material formed on a current collector in a non-contact manner during a process of manufacturing a lithium-ion battery. This film thickness measuring device 1 is provided with: a terahertz wave emission unit 10 that emits a terahertz wave LT1 to a sample 9; and a reflected wave detection unit 30A provided with a photoconductive switch 34A that detects reflected waves LT3 of the terahertz wave LT1 reflected at the sample 9. The film thickness measuring device 1 is provided with: a time difference acquisition module 509 that acquires a time difference [delta]t required to reach the photoconductive switch 34A between of the reflected waves LT3 detected by the reflected wave detection unit 30A a surface reflected wave LT31 reflected at the surface of an active material film 91 in the sample 9 and an interface reflected wave LT32 reflected at the interface between the active material film 91 andthe current collector 93 in the sample 9; and a film thickness calculation unit 511 that calculates the film thickness d of the active material film 91 on the basis of the time difference [delta]t and the refractive index nS of the active material film 91.
Owner:DAINIPPON SCREEN MTG CO LTD +1

Optical structure for improving photoelectric conversion efficiency of silicon carbide photoconductive switch

PendingCN111739953AIncrease the optical pathGuaranteed Photoelectric ResponseSemiconductor devicesCarbide siliconOptical cavity
The invention discloses an optical structure for improving photoelectric conversion efficiency of a silicon carbide photoconductive switch. The optical structure comprises the silicon carbide photoconductive switch and a reflection structure. The silicon carbide photoconductive switch comprises a transparent electrode, a SiC material substrate and a back counter electrode, wherein the transparentelectrode, the SiC material substrate and the back counter electrode are sequentially arranged from top to bottom; the reflection structure is located above the transparent electrode; and the distanceL between the reflection structure and the transparent electrode satisfies L<ctau/4, wherein c represents the light speed in vacuum, and tau represents the full width at half maximum of the Gaussianlight pulse. According to the invention, an external optical structure is adopted to form an optical cavity structure, so that fed laser pulses are difficult to escape from the device; and laser pulseenergy which is not fully absorbed by the silicon carbide photoconductive switch and escapes is reflected into the device again, so that the absorption optical path of laser in the device is increased, and photoelectric response of the device can be ensured while high photoelectric conversion efficiency is realized.
Owner:NAT UNIV OF DEFENSE TECH
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