The invention relates to an off-axis digital holographic
measurement device capable of flexible zooming, and the device is technically characterized in that a
laser beam generated by a horizontal
laser 1 is reflected by a first reflector 2, and an
optical path is changed into a
vertical path; the
laser beam enters a beam-expanding collimation unit 3, and is reflected by a second reflector 4, and the
optical path is changed into a horizontal
optical path; and then the laser beam passes through an
electric control zoom lens 5 and a microscopic objective lens 6 to enter a spectroscope, thereby generating two light
waves, wherein one
light wave is reflected by a
plane mirror 8, and then serve as reference light to enter
imaging equipment 10, and the other
light wave is reflected by the surface of a measured object 9 and serves as objective light to enter the
imaging equipment 10; the
plane mirror 8 is adjusted so as to control the inclined angle between the reference light and the objective light, thereby enabling the objective light and the reference light to interfere with each other to generate an off-axis digital holographic image which is recorded by the
imaging equipment 10; finally a numerical value
reconfiguration algorithm is calculated and the information of the measured object. The device employs the
electric control zoom lens 5, has a function of flexible zooming, avoids mechanical movement, greatly improves the adjustment speed and accuracy in an adjustment process of an
amplification factor of a
system, is compact and stable in structure, and can be used for the three-dimensional shape and appearance measurement of a micro-optic element, a microelectronic
mechanical system and a micro-optical electro-
mechanical system.