31results about How to "Suppressed reflectivity" patented technology

In a halftone-type phase-shift mask blank having a phase shifter film 5, the phase shifter film 5 has a phase adjustment layer 4 for primarily controlling the phase of exposure light, and a transmissivity adjustment layer 3 which is formed between a transparent substrate 2 and the phase adjustment layer 4 and primarily controls the transmissivity of exposure light. The transmissivity adjustment layer 3 has a thickness of 90 angstroms or less.

An imaging optical system is provided with an optical plane, which at least includes one lens element and transmits an incoming light; and a reflection preventing structure, which is arranged at least at a section in a peripheral area around a center area which includes a center of the optical plane, on one or more optical planes. In the reflection preventing structure, structural units having a prescribed shape are periodically arranged in array at a pitch smaller than the shortest wavelength of light to be prevented from being reflected among the incoming light. The imaging optical system has a sufficiently suppressed reflectance on the optical plane, is easily handled and is excellent in mass productivity.

A thin film for a reflection film or for a semi-transparent reflection film, having a compound phase formed of at least one chemical compound selected from the group consisting of a nitride, an oxide, a composite oxide, a nitroxide, a carbide, a sulfide, a chloride, a silicide (excluding silicon), a fluoride, a boride, a hydride, a phosphide, a selenide and a telluride of aluminum, magnesium, tin, zinc, indium, titanium, zirconium, manganese and silicon, dispersed in a matrix formed of silver or a silver alloy. The thin film may disperse at least one compound selected from the group consisting of a nitride, an oxide, a composite oxide, a nitroxide, a carbide, a sulfide, a chloride, a silicide, a fluoride, a boride, a hydride, a phosphide, a selenide and a telluride of silver, gallium, palladium or copper, in addition to aluminum or the like, therein. The thin film of the present invention keeps its reflectance without significant loss even after a long period of use, and can prolong the life of various devices which comprise the thin film as a reflection film, such as an optical recording medium and a display. The thin film can be also applied to semi-reflective / semi-transparent film used in the optical recording medium.

An insulating film is formed on a main surface of a substrate. A conductive film is formed on the insulating film. A lower layer resist film, an intermediate layer, an anti-reflection film and an upper layer resist film are formed on the conductive film. A focal point at a time of exposure is detected by detecting a height of the upper layer resist film. In detecting the focal point at the time of exposure, a focal point detection light is radiated on the upper layer resist film. After detecting the focal point, the upper layer resist film is exposed and developed thereby to form a resist pattern. With the resist pattern as a mask, the intermediate layer and the anti-reflection film are patterned, and the lower layer resist film is developed. With these patterns as a mask, the conductive film is etched thereby to form a gate electrode.

The present invention relates to an antireflection article of which the first surface has sufficient abrasion resistance and can suppress reflectance to a low level throughout the visible light region, and a display device. The present invention relates to an antireflection article that has light transmittance, in which a plurality of convex portions are disposed on a first surface positioned at a visible side and a second surface opposite to the first surface, the average gap of the convex portions is 400 nm or less, the ratio (H1 / W1) of the height H1 of the convex portions and the width W1 of the bottoms of the convex portions is 1.3 or more, in the first surface, and the ratio (H2 / W2) of the height H2 of the convex portions and the width W2 of the bottoms of the convex portions is larger than the ratio (H1 / W1), in the second surface.

The beam distributor includes a housing, at least one beam entrance, two or more beam exits, a motor, and a beam turning part fixed to a rotary axis member of the motor and changing a direction of a beam input to the inside of the housing through the beam entrance so as to guide the input beam to the beam exit. A rotary axis of the motor is arranged parallel to an optical axis of the beam so as to input the beam to the beam turning part at a constant angle independently of a rotational angle about the rotary axis of the motor. The beam exit is arranged in a direction to which the direction of the beam is changed by the beam turning part in response to rotation of the rotary axis member. A storage stores an angular information recorded in advance about the rotary axis.

An insulating film is formed on a main surface of a substrate. A conductive film is formed on the insulating film. A lower layer resist film, an intermediate layer, an anti-reflection film and an upper layer resist film are formed on the conductive film. A focal point at a time of exposure is detected by detecting a height of the upper layer resist film. In detecting the focal point at the time of exposure, a focal point detection light is radiated on the upper layer resist film. After detecting the focal point, the upper layer resist film is exposed and developed thereby to form a resist pattern. With the resist pattern as a mask, the intermediate layer and the anti-reflection film are patterned, and the lower layer resist film is developed. With these patterns as a mask, the conductive film is etched thereby to form a gate electrode.

A thin film for a reflection film or a semi-transparent reflection film, which has a compound phase comprising at least one selected from the group consisting of a nitride, an oxide, a complex oxide, a nitroxide, a carbide, a sulfide, a chloride, a silicide, a fluoride, a boride, a hydride, a phosphide, a selenide and a telluride of gallium, palladium or copper, dispersed in a matrix formed of silver or a silver alloy. The compound phase in the thin film may include at least one compound selected from the group consisting of nitride, oxide, complex oxide, nitroxide, carbide, sulfide, chloride, silicide, fluoride, boride, hydride, phosphide, selenide and telluride of silver. The thin film of the present invention minimizes the deterioration of the reflectance even after a long period of use, and can prolong the life of various devices which use the thin film as a reflection film, such as an optical recording medium and a display. The thin film can be also applied to a semi-reflective / semi-transparent film used in the optical recording medium.

The sheet (1) related to the present invention has: a resin layer (4), which includes a binder (2) and catalyst particles (3); an electroless plating film (7), which is provided on the resin layer (4) One main surface (4a) side and has the 1st electroless plating film (5) and the 2nd electroless plating film (6); And base material (8), it is arranged on the other main surface (4b) of resin layer (4) )side. At least a part of the catalyst particle (3) has an exposed surface (3a) exposed from one main surface (4a) of the resin layer (4), and the exposed surface (3a) is dispersed on the one main surface (4a) of the resin layer (4) . The first electroless plating film (5) is provided on one main surface (4a) of the resin layer (4) so ​​as to surround the respective exposed surfaces (3a) of the catalyst particles (3). The 2nd electroless plating film (6) is provided with the mode of covering the 1st electroless plating film (5), and one main surface (6a) of the 2nd electroless plating film (6) has the corresponding to the 1st electroless plating film (5) Recess (6r).

The invention discloses a non-contact dynamic measurement system for torque of a rotating shaft based on a high-precision key phase, which includes: spraying or pasting a group of first coding stripes at a fixed distance on the rotating shaft to be measured, which are black and white coding stripes at equal intervals; And spray or paste the second code stripe near any one of the first code stripes, which has only one white stripe, and the second code stripe is used as a key phase signal; facing each code stripe, install a fiber-optic timing sensor respectively , the probe of each sensor is equipped with a focusing lens to collimate the outgoing light, and the beam diameter is small; the fiber-optic timing sensor corresponding to the second code stripe is used as a synchronous key phase; the fiber-optic timing sensor receives the reflected light signal of the white stripe , the reflected light signal is converted into a timing pulse through a signal processing circuit, and then processed through a high-speed and high-precision timing acquisition card input controller. The invention solves the problem that the existing dynamic torque measurement of the rotating shaft is not applicable in the actual field.