The invention discloses a preparation method of a polycrystalline-to-
single crystal copper foil through efficient
hydrogen enhanced
etching. The preparation method comprises the following steps: 1, sequentially soaking a rolled
polycrystalline copper foil in an acid solution of
acetone and an acid solution of absolute ethyl
alcohol; 2, ultrasonically cleaning the
copper foil in deionized water, and blow-
drying the surface by adopting
inert gas; 3,
cutting the rolled
polycrystalline copper foil into a regular shape, flatly laying the rolled
polycrystalline copper foil on the
quartz plate, repeating the step, putting the
quartz plate into the tubular furnace, and ensuring that
oxygen in a pipeline is completely removed; 4, under the normal pressure,
inert gas output is kept in the tubular furnace, a temperature rising program is set,
hydrogen is introduced when the temperature reaches the
copper foil annealing temperature, and finally high-quality
single crystal Cu (111) is stably obtained; the method has the advantages that a traditional electrolytic
copper foil preparation link is completely omitted, the
hydrogen etching time is prolonged in a CVD tubular furnace under normal pressure, the
hydrogen flow is increased, selective
etching of hydrogen to
grain boundary high-energy defects is enhanced, abnormal growth of grains and thorough
swallowing of the
grain boundary are promoted, and the large-area
single crystal Cu (111) with the single
crystal rate larger than 99% is obtained.