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59results about How to "Improve interconnect reliability" patented technology

Pressure sensor encapsulation structure containing silicon through holes

The invention provides a pressure sensor encapsulation structure containing silicon through holes, which uses a silicon base to substitute a traditional boron-phosphorosilicate glass base, and adopts a flip chip bonding technology and a bonding technology (such as CuSn bonding, AuSn eutectic bonding, Cu-Cu bonding and Au-Au bonding) to realize the airtight vacuum encapsulation of pressure sensors; a monocycle or bi-cycle bonding metal ring is adopted for encapsulation, and plays the role of reducing the bonding stress on the encapsulation of the pressure sensors with different piezoresistance strip distribution under the condition of ensuring the measurement sensitivity; and conductive columns are adopted for replacing metal wires to be used as signal lead wires, so the mutual connection reliability is increased. Compared with encapsulation structures of the silicon glass electrostatic bonding technology, the metal wire bonding technology, the metal isolating membrane technology and the airtight cavity silicone oil filling technology which are adopted traditionally, the pressure sensor encapsulation structure cancelled silicone oil filling and the metal isolating membrane, contributes to the improvement in the pressure sensor sensitivity, can also be used for dynamic pressure detection, and has the advantages of small size and high integration level.
Owner:PEKING UNIV

Directional interconnection method for Cu6Sn5-base single-crystal lead-free solder joints for high-temperature packaging

The invention belongs to the technical field of materials, and provides a directional interconnection method for Cu6Sn5-base single-crystal lead-free solder joints for high-temperature packaging. The method comprises the steps of firstly, preparation of a Cu6Sn5-base single-crystal block body, secondly, cutting of the Cu6Sn5-base single-crystal block body, thirdly, surface pretreatment of a Cu-base welding disc, and fourthly, interconnection of Cu6Sn5-base single-crystal welding blocks. The elasticity modulus of the Cu6Sn5-base single-crystal lead-free interconnected solder joints prepared with the method is 235% of that of common Sn-base brazing filler metal, the conductivity of the Cu6Sn5-base single-crystal lead-free interconnected solder joints is 52.4% that of the Sn-base brazing filler metal, and the heat conductivity of the Cu6Sn5-base single-crystal lead-free interconnected solder joints is 57.8% that of the Sn-base brazing filler metal. The method has the beneficial effects of being low in cost, resistant to high temperature, high in reliability of interconnection of the solder joints and a Cu-base welding disc, high in creep-resistance, and capable of being used for a long time under the severe condition. The method has the beneficial effects of being simple in working principle, low in cost, rapid in single-crystal preparation and high in quality.
Owner:HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL

Millimeter-wave air slot differential integrated antenna

The invention discloses a millimeter-wave air slot differential integrated antenna. The millimeter-wave air slot differential integrated antenna comprises five parts, namely, a differential feeding network, a radiation module, a directed radiation module, a bond wire compensation network and a back cavity air slot; each of the radiation module and the directed radiation module is composed of an even number of radiating patch units which are in bilateral symmetry; signals are divided and transmitted to each radiating patch unit through a differential line and a one-to-many T-shaped structure; the back surface ground part of the antenna is partially etched; an air cavity is formed in a base, so that the bandwidth of the antenna can be extended; the antenna is connected with a chip through bond wires; in order to compensate the inductive effect of the bond wires, a capacitive patch is arranged between the bond wires, so that an L(inductor)-C(capacitor)-L(inductor) network can be formed, and therefore, interconnection loss of the antenna and the chip can be reduced; and in order to extend the bandwidth of the antenna, parasitic patches are arranged beside the radiating patch units. According to the millimeter-wave air slot differential integrated antenna of the invention, a dielectric material of which the height is consistent with the height of the chip is adopted to design the antenna, and therefore, the sticking, bonding and packaging of the antenna and the chip can be benefitted.
Owner:SOUTHEAST UNIV

Interconnection manufacturing method for film through holes in substrate

The invention provides an interconnection manufacturing method for film through holes in a substrate. A composite adhesive layer is sputtered on the upper surface of the clean substrate; photoetching is carried out on the composite adhesive layer to form a film conduction band photoetching graph; a composite metal layer is electroplated, and a Cu layer is electroplated on the surface; removing of photoresist is carried out; photoetching is carried out at a corresponding through hole column above the Cu layer, and a film through hole photoetching graph is formed; wet etching is carried out, and the Cu layer exposed on the surface and the composite adhesive layer are removed; removing of photoresist is carried out; spin coating of benzocyclobutene (BCB) is carried out, development processing is carried out, and a dielectric film through hole graph is formed through photoetching; an ultrasonic development method is used, and development residues are removed; wet etching is carried out, the exposed Cu layer at the corresponding film through hole is removed, and the substrate is monitored online until the composite metal layer is exposed in all film through holes; the BCB dielectric layer is cured, and interconnection of film through holes in the substrate is completed. Problems that the process in the prior art is complicated, the contact resistance is large, reliability is low, through hole connection and disconnection detection can not be realized online, and the like are overcome, and interconnection of high-density through holes of multi-layer wiring of the film can be realized.
Owner:SHANGHAI SPACEFLIGHT ELECTRONICS & COMM EQUIP RES INST

Printed circuit board and fully-additive manufacturing method therefor

The invention discloses a printed circuit board. The printed circuit board mainly comprises multiple first structures and second structures which are overlapped in a lamination manner, wherein the first structures and the second structures are arranged at intervals; the first structures and the second structures are formed in a hot-pressing manner; the first structures mainly consist of circuit carriers; conductive convex blocks and circuit layers are embedded in the circuit carriers; the conductive convex blocks are electroplated on the circuit layers; the second structures mainly consist of insulating dielectric plates; conductive blocks are embedded in the insulating dielectric plates; and the circuit layers on the adjacent two first structures are connected through the conductive blocks. Compared with the prior art, the printed circuit board provide by the invention enables fine circuits to satisfy special impendence characteristic requirement; meanwhile, the prepared circuit is high in conductivity and low in cost; the first structures and the second structures are overlapped in a crossed manner in sequence, so that the printed circuit at any layer can be formed by one-time lamination; and therefore, the printed circuit board is high in production efficiency and capable of reducing the production time and the production cost.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA +1
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