The invention relates to a multi-band
laser confocal silicon carbide crystal ingot processing device and method, the multi-band
laser confocal silicon carbide crystal ingot processing device comprises an objective table and a
laser assembly, the laser
assembly comprises a first laser, a second laser, a first reflecting mirror, a second reflecting mirror and a laser focusing mirror, the second
wavelength laser and the second
wavelength laser reflected by the second reflector and emitted by the second laser device are output in a common light path mode, and a to-be-machined
crystal ingot on the objective table is machined through the laser focus lens; the objective table comprises an X-axis moving module, a Y-axis moving module, a C-axis module and a B-axis module, the C-axis module is used for driving the to-be-machined crystal ingot to rotate around the vertical center axis of the to-be-machined crystal ingot, and the B-axis module is used for driving the to-be-machined crystal ingot to swing in the
vertical plane. The device can improve the
laser processing efficiency, can
cut the cylindrical crystal ingot, is simple in structure, easy to operate and control, low in cost and particularly suitable for
cutting the
silicon carbide crystal ingot with large thickness, high
hardness and high precision.