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Quartz jig for silicon ring processing and application thereof

PendingCN122500576Ano risk of injuryreduce distortion
A quartz jig for machining silicon rings and its application, comprising: a disc-shaped body; the material of the disc-shaped body includes fused silica with a SiO2 mass content ≥99.9%; a central through hole is provided at the axis of the disc-shaped body; the radially inner region of the disc-shaped body includes an inner annular support surface; the radially outer region of the disc-shaped body includes an outer mounting flange surface; the outer mounting flange surface and the inner annular support surface are coaxially arranged, and the upper and lower openings of the mounting holes on the outer mounting flange surface are countersunk structures, and the edges of the mounting holes are provided with arc transition structures; the central through hole, the stepped edges of the inner annular support surface, and the chamfer positions of the outer mounting flange surface are all provided with arc chamfers. By using fused silica material and combining it with the low-stress structure of the disc-shaped body, the two work together to enable the quartz jig to achieve high-precision machining, low workpiece deformation, no surface scratches, and no stress accumulation during the machining of silicon rings in an integrated manner.
Owner:CHANGSHA HUASHI SEMICON CO LTD