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84results about How to "Suppresses dimensional changes" patented technology

Top ARC polymers, method of preparation thereof and top ARC compositions comprising the same

Disclosed herein are a top anti-reflective coating polymer used in a photolithography process, a method for preparing the anti-reflective coating polymer, and an anti-reflective coating composition comprising the anti-reflective coating polymer. The disclosed top anti-reflective coating polymer is used in immersion lithography for the fabrication of a sub-50 nm semiconductor device. The top anti-reflective coating polymer is represented by Formula 1 below: wherein R1, R2 and R3 are independently hydrogen or a methyl group; and a, b and c represent the mole fraction of each monomer, and are in the range between 0.05 and 0.9. The top anti-reflective coating formed using the anti-reflective coating polymer is not soluble in water and can be applied to immersion lithography using water as a medium for a light source. Since the disclosed top anti-reflective coating can reduce the reflectance from an underlayer, the uniformity of CD is improved, thus enabling the formation of an ultrafine pattern.
Owner:SK HYNIX INC

Top anti-reflective coating polymer, its preparation method and top anti-reflective coating composition comprising the same

Disclosed herein is a top anti-reflective coating polymer and its composition comprising the same represented by Formula 1 below: wherein R1 and R2 are independently, hydrogen, methyl or fluoromethyl; R3 and R4 are independently, a C1-10hydrocarbon or a C1-10 hydrocarbon in which the hydrogen atoms are wholly or partly replaced by fluorine atoms; and a, b, c, d and e represent the mole fraction of each monomer and are in the range between about 0.05 and about 0.9, such that the sum of a, b, c, d, and e equals one.
Owner:SK HYNIX INC

Length measurement system

Disclosed herewith is a length measurement system, which obtains a value closer to its true one when figuring out the size and edge roughness of a pattern from a noise-included pattern image. Among plural band-like regions representing a portion around an edge in an image respectively, the system calculates the dependency of the edge point position on the image processing parameter at each of a narrow width band-like portion and a wide width band-like portion to calculate an image processing condition that calculates each measured value closer to its true value or estimates the true value itself.

Fine pattern forming method

There is provided a method of forming a fine resist pattern in which a highly practicable photo-sensitive composition obtained from a material having a high transparency against an exposure light having a short wavelength such as F2 excimer laser beam is used as a resist, and the method of forming a fine resist pattern comprises a step for forming a photo-sensitive layer on a substrate or on a given layer on a substrate using a photo-sensitive composition comprising at least a compound generating an acid by irradiation of light and a compound having fluorine atom in its molecular structure, a step for exposing by selectively irradiating a given area of said photo-sensitive layer with energy ray, a step for heat-treating the exposed photo-sensitive layer, and a step for forming a fine pattern by developing the heat-treated photo-sensitive layer to selectively remove the exposed portion or un-exposed portion of the photo-sensitive layer.
Owner:SEMICON LEADING EDGE TECH +1

Foamed tile and its manufacturing method

To manufacture in thin structure, easily and at low cost. By forming a foaming glaze layer on the surface of a base material made of ceramics, the product strength is assured in a base material formed densely, and the heat insulation in the foaming glaze layer is assured, and after applying a foaming glaze on a base material or a formed body adjusted to be formed as base material, and by baking the glazed material at temperature higher than the melting and foaming point of the foaming glaze and at temperature lower than the softening temperature of the base material, dimensional changes of base layer (base material) at the time of baking are suppressed, and strict management during manufacture is not needed.
Owner:FUJIMI CERAMIC

Decorative sheet and decorative molded article

The present invention provides a decorative sheet which enables to produce a decorative molded article with excellent design property, even if the sheet is employed to a decorative molded article requiring deep drawing, and the decorative molded article using the decorative sheet. There is provided a decorative sheet used by forming a curved portion by injection-molding a base material resin to be integrated with the base material resin. The decorative sheet is formed by integrally laminating a base material-side adhesion layer, a porous decor sheet, a protective layer-side adhesive layer, and a transparent surface protective layer from the rear surface side in this order. The protective layer-side adhesive layer is formed by curing a moisture curing type of transparent polyurethane adhesive and the surface protective layer contains polymethylmethacrylate, a composite resin of polycarbonate and polybutylene terephthalate or a composite resin of polycarbonate and polyethylene terephthalate as a main component, and has a glass transition point of 90 to 130[deg.] C. There is provided a decorative molded article obtained by forming a curved portion on a decorative sheet by injection-molding a base material resin to a rear surface side of the decorative sheet in the mold.
Owner:TOYODA GOSEI CO LTD

Top anti-reflective coating polymer, its preparation method and top anti-reflective coating composition comprising the same

Disclosed herein are a top anti-reflective coating polymer used in a photolithography process, which is one of the fabrication processes for a semiconductor device, a method for preparing the anti-reflective coating polymer, and an anti-reflective coating composition comprising the anti-reflective coating polymer. Specifically, the top anti-reflective coating polymer is used in immersion lithography for the fabrication of a sub-50 nm semiconductor device. The top anti-reflective coating polymer is represented by Formula 1 below: wherein R1, R2 and R3 are independently hydrogen or a methyl group; and a, b and c represent the mole fraction of each monomer, and are in the range between about 0.05 and about 0.9. Since a top anti-reflective coating formed using the above anti-reflective coating polymer is not soluble in water, it can be applied to immersion lithography using water as the medium for a light source. In addition, since the top anti-reflective coating can reduce the reflectance from an underlayer, the uniformity of CD is improved, thus enabling the formation of an ultrafine pattern.
Owner:SK HYNIX INC

Multilevel interconnection board and method of fabricating the same

A stack of 50 layers of a first pitch-base carbon fiber sheet is formed, two sets of stack each having two second pitch-base carbon fiber sheets stacked therein are fabricated. At this time, the second carbon fiber sheets have a thermal expansion coefficient larger than that of the first carbon fiber sheet. Next, the stack of the first carbon fiber sheet is then held between two sets of stack of the second carbon fiber sheets. The stack of the first and second carbon fiber sheets are then impregnated with an epoxy-base resin composition and the resin is solidified. As a result a prepreg composed of the first and second carbon fiber sheets and the resin component composed of the epoxy-base resin composition is obtained. Thereafter, interconnections and the like are then formed on the prepreg, to thereby complete a multilevel interconnection board.
Owner:FUJITSU LTD

Fuel cell electrolyte, membrane electrode assembly, and method of manufacturing fuel cell electrolyte

Dimensional change occurring in a fuel cell electrolyte including a basic polymer after the electrolyte is doped with acid is regulated and the occurrence of wrinkles and the like is reduced. A fuel cell electrolyte comprises a basic polymer and an organic phosphonic acid expressed by the following general formula (1): where R represents an alkyl, aryl, acyl, amino, phosphonic group or a derivative of the functional group, and n is 1 or 2
Owner:SANYO ELECTRIC CO LTD +2

Magnetic tape medium

A magnetic recording medium is provided that can ensure stable recording and reproducing characteristics with little off-track even when a track density in the direction of width of the tape is very high and 50 lines / mm or more, an off-track margin is 5 μm or smaller, and a variation that is permitted at maximum as a dimensional variation in the direction of width of the tape itself due to environmental factors such as the change of temperature and humidity, the change of tension, a creep, etc. is small as low as 0.10% or less. Assuming that Young's modulus in the direction of width of a non-magnetic substrate is λ and Young's modulus in the direction of width of the back layer is Y, X is 850 kg / mm2 or more, or when X is less than 850 kg / mm2, X×Y is 6×105 or more, and assuming that Young's modulus in the direction of width of a layer including a magnetic layer is Z, Y / Z is not larger than 6.0.
Owner:SONY CORP

Thin polarizer and image display apparatus using the same

A polarizing plate provided with a pressure-sensitive adhesive layer on at least one side of the polarizer imparts good durability even in a high-temperature environment, and can laminate a polymer film thereon without troublesome workability. The polarizing plate with pressure-sensitive adhesive is laminated with a polymer film such as a phase difference plate to obtain a thinner composite polarizing plate, which is applied to an image display device. A polarizing plate (10) in which a pressure-sensitive adhesive layer (2) is provided on at least one side of a polarizer (1), wherein the pressure-sensitive adhesive layer (2) exhibits a storage capacity of 0.15-1 MPa at a temperature range of 23-80°C Elastic modulus of the pressure-sensitive adhesive layer. The pressure-sensitive adhesive layer (2) exhibiting a high storage elastic modulus suppresses dimensional changes caused by expansion and contraction of the polarizer (1) in a high-temperature environment. A polymer film (6) such as a phase difference plate is arranged on the outside of the pressure-sensitive adhesive layer (2) to make a composite polarizer (15, 16), and it is combined with an image display element such as a liquid crystal cell (20) to obtain an image display device.
Owner:SUMITOMO CHEM CO LTD

Alkaline storage battery

An alkaline storage battery includes: [a] a shallow case having an opening and a bottom; [b] a sealing plate covering the opening of the case; [c] a first electrode adjacent to an inner face of the bottom of the case; [d] a second electrode adjacent to an inner face of the sealing plate; [e] a separator interposed between the first electrode and the second electrode; [f] an alkaline electrolyte; and [g] at least one current collector plate selected from the group consisting of (g1) a conductive current collector plate joined to the inner face of the bottom of the case and forming a gas transfer path distributed two-dimensionally between the inner face of the bottom of the case and the first electrode and (g2) a conductive current collector plate joined to the inner face of the sealing plate and forming a gas transfer path distributed two-dimensionally between the inner face of the sealing plate and the second electrode.
Owner:PANASONIC CORP

Cold finished seamless steel tubes

Cold finished seamless steel tubes are made such that the residual stress F to be generated at the stage of the correction process after cold working is controlled to be 30 MPa or more and the scattering thereof is 30 MPa or less, when measured by Crampton method. Further, by adjusting the average grain size of spheroidized carbides, the dimensional change which emerges in lathe turning of the outside and inside diameter of relevant steel tubes due to the residual strain can be suppressed, and the strict roundness as well as the excellent machinability can be secured at the final processing stage of the work pieces for bearing parts. Consequently, steel tubes with high dimensional accuracy and less dimensional change at the final steps such as lathe turning, heat treatment and the like, can be made for use as bearing parts.
Owner:NIPPON STEEL CORP

Negative resist composition and pattern forming process

A negative resist composition is provided comprising (A) a polymer comprising recurring units having an acid-eliminatable group and recurring units capable of generating acid upon exposure and (B) a carboxylic acid onium salt. When the negative resist composition is processed by the microprocessing technology, especially EB lithography, it forms a pattern having a very high resolution and minimal LER.
Owner:SHIN ETSU CHEM IND CO LTD

Top anti-reflective coating polymer, its preparation method and top anti-reflective coating composition comprising the same

Disclosed herein are top anti-reflective coating polymers used in a photolithography process, methods for preparing the anti-reflective coating polymer, and anti-reflective coating compositions comprising the disclosed anti-reflective coating polymers. The top anti-reflective coating polymers are used in immersion lithography for the fabrication of a sub-50 nm semiconductor device. The top anti-reflective coating polymer is represented by Formula 1 below: wherein R1, R2 and R3 are independently hydrogen or a methyl group; and a, b and c represent the mole fraction of each monomer, and are independently in the range between about 0.05 and about 0.9. Because the disclosed top anti-reflective coatings are not soluble in water, they can be used in immersion lithography using water as a medium for the light source. In addition, since the top anti-reflective coatings can reduce the reflectance from an underlayer, the uniformity of CD is improved, thus enabling the formation of ultrafine patterns.
Owner:SK HYNIX INC

Adhesive Film, Flexible Metal-Clad Laminate, and Processes for Producing These

The present invention relates to an adhesive film with which a flexible metal-clad laminate is obtained with suppressed dimensional changes occurred when produced by a laminating method; and a flexible metal-clad laminate comprising the adhesive film and a metal foil bonded thereto. The adhesive film comprises a polyimide film and, formed on at least one side thereof, an adhesive layer comprising a thermoplastic polyimide and has coefficients of linear expansion satisfying the relationship 1.0>(coefficient of linear expansion in the MD direction) / (coefficient of linear expansion in the TD direction)>0.1. This adhesive film may be one produced continuously and further satisfying the relationship 1.70>(elastic modulus in the MD direction) / (elastic modulus in the TD direction)>1.05 when the adhesive film has an MD modulus of 5 GPa or higher throughout the whole width thereof. That adhesive film may be one produced continuously and further satisfying the relationship 2.00>(elastic modulus in the MD direction) / (elastic modulus in the TD direction)>1.10 when the adhesive film has an MD modulus less than 5 GPa throughout the whole thereof.
Owner:KANEKA CORP

Novel Polyimide Film and Use Thereof

The present invention provides a polyimide film and its usage. The polyimide film according to the present invention does not cause dimensional change due to thermal stress. The present invention particularly relates to a polyimide film and its usage, which polyimide film has a characteristic of suppressing thermal deformation of the material in lamination of a polyimide film and a metal layer by a laminate method. The polyimide film according to the present invention has the following characteristics:(1) an inflexion point of storage modulus ranges from 270° C. to 340° C.;(2) tan δ, which is a value obtained by dividing a loss elastic modulus by a storage modulus, has a peak-top in a range of 320° C. to 410° C.;(3) a storage modulus at 380° C. ranges from 0.4 GPa to 2.0 GPa; and(4) a storage modulus α1 at the inflexion point (GPa) and a storage modulus α2 at 380° C. (GPa) satisfy: 85≧{(α1−α2) / α1}×100≧65. With these characteristics, the polyimide film gives an effect of suppressing thermal deformation of the material in lamination of a polyimide film and a metal layer by a laminate method.
Owner:KANEKA CORP

Direct-current motor and hub unit

In a motor, a motor case includes a first case and a second case separable from each other in a direction of an axis of a rotation shaft of a rotor. The first case and the second case each have cut-away portions extending parallel to the axis from a separation edge (open side edge) thereof. The separation edges of the first and second cases each have abutment portions not formed with the cut-away portions, and the abutment portions of the first case respectively abut against the abutment portions of the second case. The cut-away portions cooperatively define a plurality of windows disposed in a periphery of the motor case. The stator has a plurality of bulges projecting radially outward from a peripheral surface thereof in association with the windows.
Owner:SANYO ELECTRIC CO LTD +1

Fuel battery pile

The invention provides a fuel battery pile capable of preventing a flow path from being blocked due to destruction of a connection bridge part as much as possible in an economic and simple structure. In the fuel battery (12) for forming the fuel battery pile (10), an electrolyte film-electrode structure (14) is clamped by a first metal separator (16) and a second metal separator (18). The connection bridge part (28a) for communicating an oxidant gas flow path (26) with an oxidant gas inlet communication hole (20a) is arranged on the first metal separator (16) and comprises a plurality of resin passage parts (32a) which are mutually separated and alternatively arranged and a passage (33a) is formed between the resin passage parts (32a).
Owner:HONDA MOTOR CO LTD

Thermosetting resin composition and metal-resin composite body

A thermosetting resin composition (P) of the present invention is used for forming a resin member (101) in a metal-resin composite body (100) including the resin member (101) and an aluminum-based metal member (102) bonded to the resin member (101) and contains a thermosetting resin (A) and a filler (B), in which a rate of change of warpage is equal to or greater than −35% and equal to or less than 35%.
Owner:SUMITOMO BAKELITE CO LTD

Novel polyimide film and use thereof

The present invention provides a polyimide film capable of suppressing dimensional changes caused by thermal stress, particularly a polyimide film having a function of suppressing thermal deformation of the material when a metal layer and a polyimide film are laminated by a lamination method. Imide film and its utilization. The polyimide film of the present invention (1) has an inflection point of the storage modulus in the range of 270° C. to 340° C., and (2) the peak of the value tanδ obtained by dividing the loss modulus by the storage modulus is at 320° C. In the range of ℃~410℃, (3) the storage modulus at 380℃ is 0.4GPa~2.0GPa, (4) the storage modulus α1(GPa) at the inflection point and the storage modulus α2 at 380℃ (GPa) is in the range of 85≥{(α1-α2) / α1}×100≥65. Thermal deformation occurring on the material when the metal layer and the polyimide film are laminated by a lamination method is thereby suppressed.
Owner:KANEKA CORP
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