80results about How to "Suppresses dimensional changes" patented technology

Disclosed herein are a top anti-reflective coating polymer used in a photolithography process, a method for preparing the anti-reflective coating polymer, and an anti-reflective coating composition comprising the anti-reflective coating polymer. The disclosed top anti-reflective coating polymer is used in immersion lithography for the fabrication of a sub-50 nm semiconductor device. The top anti-reflective coating polymer is represented by Formula 1 below:

wherein R1, R2 and R3 are independently hydrogen or a methyl group; and a, b and c represent the mole fraction of each monomer, and are in the range between 0.05 and 0.9. The top anti-reflective coating formed using the anti-reflective coating polymer is not soluble in water and can be applied to immersion lithography using water as a medium for a light source. Since the disclosed top anti-reflective coating can reduce the reflectance from an underlayer, the uniformity of CD is improved, thus enabling the formation of an ultrafine pattern.

Disclosed herewith is a length measurement system, which obtains a value closer to its true one when figuring out the size and edge roughness of a pattern from a noise-included pattern image. Among plural band-like regions representing a portion around an edge in an image respectively, the system calculates the dependency of the edge point position on the image processing parameter at each of a narrow width band-like portion and a wide width band-like portion to calculate an image processing condition that calculates each measured value closer to its true value or estimates the true value itself.

To manufacture in thin structure, easily and at low cost. By forming a foaming glaze layer on the surface of a base material made of ceramics, the product strength is assured in a base material formed densely, and the heat insulation in the foaming glaze layer is assured, and after applying a foaming glaze on a base material or a formed body adjusted to be formed as base material, and by baking the glazed material at temperature higher than the melting and foaming point of the foaming glaze and at temperature lower than the softening temperature of the base material, dimensional changes of base layer (base material) at the time of baking are suppressed, and strict management during manufacture is not needed.

A stack of 50 layers of a first pitch-base carbon fiber sheet is formed, two sets of stack each having two second pitch-base carbon fiber sheets stacked therein are fabricated. At this time, the second carbon fiber sheets have a thermal expansion coefficient larger than that of the first carbon fiber sheet. Next, the stack of the first carbon fiber sheet is then held between two sets of stack of the second carbon fiber sheets. The stack of the first and second carbon fiber sheets are then impregnated with an epoxy-base resin composition and the resin is solidified. As a result a prepreg composed of the first and second carbon fiber sheets and the resin component composed of the epoxy-base resin composition is obtained. Thereafter, interconnections and the like are then formed on the prepreg, to thereby complete a multilevel interconnection board.

A magnetic recording medium is provided that can ensure stable recording and reproducing characteristics with little off-track even when a track density in the direction of width of the tape is very high and 50 lines/mm or more, an off-track margin is 5 μm or smaller, and a variation that is permitted at maximum as a dimensional variation in the direction of width of the tape itself due to environmental factors such as the change of temperature and humidity, the change of tension, a creep, etc. is small as low as 0.10% or less. Assuming that Young's modulus in the direction of width of a non-magnetic substrate is λ and Young's modulus in the direction of width of the back layer is Y, X is 850 kg/mm² or more, or when X is less than 850 kg/mm², X×Y is 6×10⁵ or more, and assuming that Young's modulus in the direction of width of a layer including a magnetic layer is Z, Y/Z is not larger than 6.0.

A polarizing plate provided with a pressure-sensitive adhesive layer on at least one side of the polarizer imparts good durability even in a high-temperature environment, and can laminate a polymer film thereon without troublesome workability. The polarizing plate with pressure-sensitive adhesive is laminated with a polymer film such as a phase difference plate to obtain a thinner composite polarizing plate, which is applied to an image display device. A polarizing plate (10) in which a pressure-sensitive adhesive layer (2) is provided on at least one side of a polarizer (1), wherein the pressure-sensitive adhesive layer (2) exhibits a storage capacity of 0.15-1 MPa at a temperature range of 23-80°C Elastic modulus of the pressure-sensitive adhesive layer. The pressure-sensitive adhesive layer (2) exhibiting a high storage elastic modulus suppresses dimensional changes caused by expansion and contraction of the polarizer (1) in a high-temperature environment. A polymer film (6) such as a phase difference plate is arranged on the outside of the pressure-sensitive adhesive layer (2) to make a composite polarizer (15, 16), and it is combined with an image display element such as a liquid crystal cell (20) to obtain an image display device.

An alkaline storage battery includes: [a] a shallow case having an opening and a bottom; [b] a sealing plate covering the opening of the case; [c] a first electrode adjacent to an inner face of the bottom of the case; [d] a second electrode adjacent to an inner face of the sealing plate; [e] a separator interposed between the first electrode and the second electrode; [f] an alkaline electrolyte; and [g] at least one current collector plate selected from the group consisting of (g1) a conductive current collector plate joined to the inner face of the bottom of the case and forming a gas transfer path distributed two-dimensionally between the inner face of the bottom of the case and the first electrode and (g2) a conductive current collector plate joined to the inner face of the sealing plate and forming a gas transfer path distributed two-dimensionally between the inner face of the sealing plate and the second electrode.

Cold finished seamless steel tubes are made such that the residual stress F to be generated at the stage of the correction process after cold working is controlled to be 30 MPa or more and the scattering thereof is 30 MPa or less, when measured by Crampton method. Further, by adjusting the average grain size of spheroidized carbides, the dimensional change which emerges in lathe turning of the outside and inside diameter of relevant steel tubes due to the residual strain can be suppressed, and the strict roundness as well as the excellent machinability can be secured at the final processing stage of the work pieces for bearing parts. Consequently, steel tubes with high dimensional accuracy and less dimensional change at the final steps such as lathe turning, heat treatment and the like, can be made for use as bearing parts.

A negative resist composition is provided comprising (A) a polymer comprising recurring units having an acid-eliminatable group and recurring units capable of generating acid upon exposure and (B) a carboxylic acid onium salt. When the negative resist composition is processed by the microprocessing technology, especially EB lithography, it forms a pattern having a very high resolution and minimal LER.

Disclosed herein are top anti-reflective coating polymers used in a photolithography process, methods for preparing the anti-reflective coating polymer, and anti-reflective coating compositions comprising the disclosed anti-reflective coating polymers. The top anti-reflective coating polymers are used in immersion lithography for the fabrication of a sub-50 nm semiconductor device. The top anti-reflective coating polymer is represented by Formula 1 below:

wherein R1, R2 and R3 are independently hydrogen or a methyl group; and a, b and c represent the mole fraction of each monomer, and are independently in the range between about 0.05 and about 0.9. Because the disclosed top anti-reflective coatings are not soluble in water, they can be used in immersion lithography using water as a medium for the light source. In addition, since the top anti-reflective coatings can reduce the reflectance from an underlayer, the uniformity of CD is improved, thus enabling the formation of ultrafine patterns.

The invention provides a fuel battery pile capable of preventing a flow path from being blocked due to destruction of a connection bridge part as much as possible in an economic and simple structure. In the fuel battery (12) for forming the fuel battery pile (10), an electrolyte film-electrode structure (14) is clamped by a first metal separator (16) and a second metal separator (18). The connection bridge part (28a) for communicating an oxidant gas flow path (26) with an oxidant gas inlet communication hole (20a) is arranged on the first metal separator (16) and comprises a plurality of resin passage parts (32a) which are mutually separated and alternatively arranged and a passage (33a) is formed between the resin passage parts (32a).