The present invention provides an apparatus and method for measuring the
angular rotation of a
moving body. The apparatus comprises an upper sensor layer, a lower
handle layer substantially parallel to the sensor layer, at least one
dither frame formed of the upper sensor layer, the frame having a
dither axis disposed substantially parallel to the upper sensor layer and the lower
handle layer. The apparatus further comprises a first
accelerometer formed of the upper sensor layer and having a first force sensing axis perpendicular to the
dither axis for producing a first output
signal indicative of the acceleration of the
moving body along the first force sensing axis, the first
accelerometer having a
proof mass and at least one flexure connecting the
proof mass to the dither frame such that the
proof mass can be electrically rotated perpendicular to the dither axis. The apparatus also comprises a second
accelerometer formed of the upper sensor layer and having a second force sensing axis perpendicular to the dither axis for producing a second output
signal indicative of the acceleration of the
moving body along the second force sensing axis, the second accelerometer having a proof
mass and at least one flexure connecting the proof
mass to the dither frame such that the proof
mass can be electrically rotated perpendicular to the dither axis. The dither frame and proof masses have electrodes on an insulating layer for operating the first and second accelerometers and the upper sensor layer has a rate axis perpendicular to each of the first and second force sensing axes and the dither axis, whereby the first and second output signals have a Coriolis component indicative of the
angular rotation of the moving body about the rate axis.