The present invention relates to resistive memory devices incorporating therein vertical selection transistors and methods for making the same. A resistive memory device comprises a
semiconductor substrate having a first type
conductivity; a plurality of vertical selection transistors formed on the
semiconductor substrate in an array, each of the plurality of vertical selection transistors including a
semiconductor pillar protruded from the semiconductor substrate, top region of the semiconductor pillar having a second type
conductivity opposite to the first type
conductivity provided in the semiconductor substrate; and a gate
electrode surrounding the semiconductor pillar with a
gate dielectric layer interposed therebetween, the gate
electrode being lower in height than the semiconductor pillar; a plurality of contact studs disposed on top of the vertical selection transistors; a plurality of resistive memory elements disposed on top of the contact studs; a plurality of parallel word lines connecting the vertical selection transistors by way of respective gate electrodes, the parallel word lines extending along a first direction; a plurality of parallel bit lines connecting the resistive memory elements, the parallel bit lines extending along a second direction different from the first direction provided in the parallel word lines; and a plurality of parallel
source lines with the second type conductivity formed in top regions of the semiconductor substrate in between rows of the semiconductor pillars, wherein the
source lines and the top regions of the semiconductor pillars function as source and drain, respectively.