The present invention discloses an interference
diffraction measuring device for microstructures and a method for restoring the structure thereof, comprising a coherent
light source, wherein the light emitted by the coherent
light source passes through a polarizing plate and a beam expansion and collimation
system and is then divided into two paths of light by a first
beam splitter prism, one path of light passing through an attenuation plate and then being reflected by a first reflector to form a reference light, and the other path of light reaching a
microstructure generating device to form a diffracted light, the diffracted light passing through a second biconvex lens and then interfering with the reference light after beam combination by the second
beam splitter prism, the image-side focal plane of the second biconvex lens being translated after passing through the second
beam splitter prism, and the CCD photosensitive surface being placed on the translated
image plane. The present invention uses an amplitude or phase modulator as a
microstructure generating device and an interferometer as a
microstructure interference
diffraction measuring device, and can simply realize the controllable acquisition of complex microstructures and the recording and observation of interference
diffraction phenomena, and only needs to perform an inverse
Fourier transform on the ratio of the diffraction
complex amplitude to the phase
propagation factor to realize the rapid restoration of the microstructure to be measured.