The invention belongs to the technical field of
quantum-effect devices, in particular relates to a
quantum-effect device based on an MIS (
Metal-Insulator-
Semiconductor) structure. The
quantum-effect device comprises a
semiconductor substrate, a source
electrode, a drain
electrode, a tunneling insulator layer and a
metal layer, wherein the source
electrode, the drain electrode, the tunneling insulator layer and the
metal layer are arranged on the
semiconductor substrate; and the
metal layer, the tunneling insulator layer and the
semiconductor layer form an MIS structure. The quantum-effect device further comprises a grid electrode and a
grating type insulator layer, wherein the grid electrode is arranged at one side of the MIS structure, and the
grating type insulator layer is arranged between the MIS structure and the grid electrode. According to the quantum-effect device based on the MIS structure, a quantum tunneling effect and a
gated diode are integrated together, and a gated
metal insulator semiconductor
diode based on the quantum tunneling effect is manufactured by using a platform process. A suitable bias
voltage is applied to the quantum-effect device so that the tunnelingefficiency of the quantum-effect device can be controlled, a
drain current can be reduced to be much smaller than the
drain current of a normal
diode, and the power dissipation of a
chip is reduced.