A functional device free from
cracking and having excellent functional characteristics, and a method of manufacturing the same are disclosed. A low-temperature
softening layer (12) and a heat-resistant layer (13) are formed in this order on a substrate (11) made of an organic material such as
polyethylene terephthalate, and a functional layer (14) made of polysilicon is formed thereon. The functional layer (14) is formed by crystallizing an
amorphous silicon layer, which is a precursor layer, with
laser beam
irradiation. When a
laser beam is applied, heat is transmitted to the substrate (11) and the substrate (11) tends to expand. However, a stress caused by a difference in a
thermal expansion coefficient between the substrate (11) and the functional layer (14) is absorbed by the low-temperature
softening layer (12), so that no cracks and peeling occurs in the functional layer (14). The low-temperature
softening layer (12) is preferably made of a polymeric material containing an
acrylic resin. By properly interposing a
metal layer and a heat-resistant layer between the substrate (11) and the functional layer (14), a
laser beam of higher intensity can be irradiated.