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40results about How to "Addressing the Impact of Detection" patented technology

Computer vision-based real-time detecting and tracking method for electric power transmission circuit of aircraft

The invention discloses a computer vision-based real-time detecting and tracking method for an electric power transmission circuit of an aircraft in a complicated natural environment background. The method comprises the steps of: firstly extracting a pixel point cloud of the electric power transmission circuit by using an anti-noise gradient image and a maximum between-cluster variance algorithm; then screening detected straight segments in a Hough space by utilizing a K-means algorithm; and tracking and detecting according to the straight segment information detected by previous frame of video image by using a Lalman filter. The method has the advantages that: the influence of illumination on the detection of the electric power transmission circuit is eliminated, the detection accuracy of the electric power transmission circuit is improved, the detection time is shortened, the workload of inspecting workers is relieved, the inspecting efficiency is improved, and the phenomenon of the missed detection of the electric power transmission circuit in the inspection process is avoided.
Owner:STATE GRID INTELLIGENCE TECH CO LTD

Chemical vapor deposition device comprising Raman spectroscopy in-situ measurement cavity

The present invention relates to a chemical vapor deposition device comprising a Raman spectroscopy in-situ measurement cavity. The device comprises a transmission device, a reaction cavity for performing chemical vapor deposition reaction on a thin film material and a monitoring cavity for performing Raman spectroscopy in-situ monitoring on the thin film material; the reaction cavity communicateswith the monitoring cavity, a reaction base is arranged in the reaction cavity, and a Raman spectroscopy monitoring module is arranged in the monitoring cavity; the reaction base is used as a substrate for film material growth; the transmission device is used for controlling the reaction base to move between the reaction chamber and the monitoring chamber; and the Raman spectroscopy monitoring module is used for performing Raman spectroscopy in-situ monitoring on the thin film material moved into the monitoring cavity. The present invention provides the chemical vapor deposition device comprising the Raman spectroscopy in-situ measurement cavity, which solves the problem of in-situ Raman detection of the thin film under the condition that the growth of the thin film is not affected, and further can adjust the process in real time to reduce defects.
Owner:WUHAN UNIV

Bullet hole recognition method based on deep learning

The invention discloses a bullet hole recognition method based on deep learning. The method comprises the following steps of 1, building a model; 2, collecting data; 3, processing and labeling the data; 4, training the model; and 5, recognizing bullet holes. A recognition system used in the method has low requirements on a target surface; the probabilities of false detection, missing detection andduplicate detection are below 1%, the recognition accuracy of the bullet holes is high, and the use requirements are met; the detection delay of the recognition system used in the method is less than40ms, and a detection result is synchronously displayed on a real-time video stream; under the condition of dense bullet holes, the overlapping rate of the bullet holes is smaller than 50%, namely, the bullet holes and the overlapping bullet holes can be distinguished; when target paper shakes relative to a camera, a center point alignment algorithm is used, so that the relative positions of thebullet holes and the center are unchanged, and the influence of the shaking of the target paper on the detection is eliminated; and a fuzzy detection algorithm is used for filtering out fuzzy pictureframes during hit by bullets, thereby effectively solving the problem of false recognition caused by picture fuzziness.
Owner:深圳深知未来智能有限公司

Integral multi-components fermented tail gas on-line detection device

The invention discloses an integrated multi-component fermentation tail gas on-line detection device. It has simple structure, strong practicability, long-term online operation, completely solves the influence of exhaust humidity on detection and the problem of gas Louis blockage, and can complete the online detection of multiple components of exhaust gas at the same time. Its structure is as follows: it includes a chassis, and the chassis is divided into at least two relatively independent spaces, at least one of which is a sampling chamber and a detection chamber; a heating device is installed in the sampling chamber, and a gas detection device is installed in the detection chamber; the sampling chamber There is at least one air hole communicating with the detection chamber.
Owner:BIOLOGY INST OF SHANDONG ACAD OF SCI

Method for detecting salmonellas in dehydrated garlic products

The invention discloses a method for detecting salmonellas in dehydrated garlic products by adopting the immunomagnetic separation technology. The method comprises the following steps: (1) adding garlic powder into sterilization diluent, obtaining filter residues through filtering by a film filter bag after homogenization; (2) oscillating and washing the residues by the sterilization diluent for three times, mixing washing liquid of the three times; (3) oscillating salmonella immunomagnetic bead buffer solution and the mixed washing liquid; (4) performing centrifugal separation to obtain centrifugation sediment; (5) adding buffer peptone water enrichment broth into the centrifugation sediment and culturing for 24 hours; and (6) taking the culture solution, adding selenite cystine enrichment broth for enrichment culture, and using the VIDAS system to detect the salmonellas in the dehydrated garlic products. According to the invention, the immunomagnetic separation technology is utilized to realize fast detection of the salmonellas in the dehydrated garlic products, and the technology has the advantages of high specificity and high sensitivity.
Owner:安徽出入境检验检疫局检验检疫技术中心

Tank cover visual detection and positioning method, system and device, and medium

The invention provides a tank cover visual detection and positioning method which comprises the following steps: a target identification step: carrying out template matching on a tank cover image to obtain a region of interest; a preliminary positioning step: carrying out contour matching on the obtained region of interest to obtain a regular hexagonal template, and reducing a detection region; an accurate positioning step: performing threshold segmentation according to gray characteristics of the center of the tank cover, and extracting a central hole as the center of the tank cover; and a pose resolving step: resolving a two-dimensional coordinate of the center of the tank cover under a world coordinate system according to the calibrated pose relationship, and fusing the two-dimensional coordinate with data obtained by the height sensor to obtain a three-dimensional coordinate of the center of the tank cover under the world coordinate system. According to the method, system and device, the templates under different illuminance are stored in advance, so that a complex algorithm is avoided, the detection requirements under different environments can be met, the influence of illumination conditions on detection is solved, the detection range is reduced twice through two different methods of template matching and contour matching, and the center of the tank cover can be detected more accurately.
Owner:SHANGHAI JIAO TONG UNIV

Dehumidifier and chassis component thereof

The invention discloses a chassis component which comprises a chassis and a temperature and humidity sensor. The chassis component is characterized in that the temperature and humidity sensor is mounted on the chassis instead of an evaporator in the prior art; an air vent ventilating with the outside is formed in the chassis; and the temperature and humidity sensor obtains temperature and humidity parameters of air through acquiring temperature and humidity at the air vent. A mounting position of the temperature and humidity sensor is changed, that is the temperature and humidity sensor is mounted on the chassis far from the evaporator, so that the problem that water evaporation and condensation of the evaporator affects detection is solved, and the detection accuracy is improved. The invention also discloses a dehumidifier provided with the chassis component.
Owner:GREE ELECTRIC APPLIANCES INC

Fatigue driving early warning intervention system

InactiveCN112785814AAddressing the Impact of DetectionIntervention effect is obviousAlarmsSteering angleAutomatic braking
The invention discloses a fatigue driving early warning intervention system which comprises a self-adaptive data acquisition module, an ECU data processing module, an ECU control module, a power module, a fault self-diagnosis module, an automatic early warning device, a vibration intervention motor and an automatic braking system. According to the system, the influence of individual difference of drivers on fatigue driving detection and recognition can be well eliminated, the precision is high, and the accuracy is good. Besides, according to different fatigue driving degrees, the automatic early warning device and the vibration intervention motor can conduct voice reminding and vibration intervention of different levels respectively, and reminding and intervention are stopped after the fatigue driving state is relieved; when the fatigue driver stays at the same steering angle for a long time, the automatic braking system can be directly started, and therefore potential safety hazards caused by fatigue driving are reduced.
Owner:YULIN UNIV

Engineering vehicle fatigue driving intervention system

The invention discloses an engineering vehicle fatigue driving intervention system. The system comprises a data acquisition module, an ECU data processing module, an ECU control module, a power supplymodule, an alarm module, an automatic early warning device, a vibration intervention motor and an automatic brake module. According to the method, the influence of individual differences of drivers on fatigue driving detection and recognition can be well eliminated, the precision is high, and the accuracy is good. Besides, according to different fatigue driving degrees, the automatic early warning device and the vibration intervention motor can perform different levels of voice reminding and vibration intervention respectively, and reminding and intervention are stopped after the fatigue driving state is relieved; when a fatigue driver stays for a long time at the same steering angle, the automatic brake module can be directly started, and therefore potential safety hazards caused by fatigue driving are reduced.
Owner:STATE GRID CORP OF CHINA +2

Control system applied to advanced auxiliary driving

The invention provides a control system applied to advanced auxiliary driving, which comprises a control module and a camera module, the camera module is used for collecting image data, and the control module is used for carrying out parallel processing on the image data, obtaining a mark point coordinate set of a lane line based on a deep learning algorithm, detects the lane line through three-item type straight line fitting, and sends out corresponding control commands according to the detected lane line and a plurality of types of ADAS application functions integrated in the control module. Different types of ADAS application functions are integrated in one control system, so that the cost of the control system can be reduced, and the control performance is enhanced. A lane line detection method is adopted, the influence of illumination is reduced, and meanwhile arrows in the middle of a lane and filtering operation of a sidewalk can be processed.
Owner:西安电子科技大学芜湖研究院

Ultrasonic phased array inspection method for hot melt welding joint of gas polyethylene pipeline

The invention discloses an ultrasonic phased array inspection method for a hot melt welding joint of a gas polyethylene pipeline. The method includes the following steps: according to the thickness ofa gas polyethylene pipeline to be inspected, selecting a phased array probe to connect a phased array ultrasonic flaw detector, and connecting the phased array probe to a water wedge block; placing the water wedge block on a reference test piece made of a polyethylene material for ultrasonic phased array calibration; smoothly placing the water wedge block on a hot melt welding joint on the polyethylene pipeline, and compressing high rebound sponge by applying pressure to ensure that the high rebound sponge matches the hot melt welding joint and the polyethylene pipeline; setting a focusing rule of an ultrasonic phased array, and slowly injecting water into the water wedge block to fill the entire water wedge block; and moving the water wedge block to obtain an inspection image and performanalysis. According to the scheme of the invention, a coupling agent between the wedge block and a workpiece is the water, high economic benefits can be realized, and moreover, the method is applicable to polyethylene pipes with a certain curvature, and can be applied in the on-site inspection of the polyethylene pipes.
Owner:CHINA JILIANG UNIV

Detecting sulfur stable isotope in atmosphere by using sulfur monoxide ion method

The invention discloses a method for detecting sulfur stable isotope in an atmospheric sample by SO+, which comprises the following steps: filtering and collecting the atmospheric sample, carrying out ultrasonic extraction, precipitating, firing, filling in a tin cup, wrapping, and detecting the sample to be detected by using an element analyzer-stable isotope mass spectrometer. The ion source parameters are optimized, the secondary ionization effect of high-energy electron flow on SO2+ is achieved by tuning the filament and the ion source lens voltage, sulfur isotope detection is conducted in the form of SO+ ions, and therefore accurate detection of the sulfur isotope ratio of an atmospheric sample is achieved, and the method is high in result accuracy, good in repeatability, easy and convenient to operate and high in efficiency.
Owner:TIANJIN NORMAL UNIVERSITY

Surface water sulfur stable isotope analysis technology and application

The invention discloses a method for detecting sulfur stable isotopes in a surface water sample in an SO+ mode, which comprises the following specific steps: filtering, acidifying, precipitating and evaporating the surface water sample to dryness, filling in a tin cup, wrapping, and detecting a sample to be detected by using an element analyzer-stable isotope mass spectrometer. According to the method, SO+ is generated by utilizing the secondary ionization effect of the ion source high-energy electron flow on SO2+, and the SO+ ion beam is separated and tuned by optimizing the voltage of the quadrupole, so that the sulfur isotope ratio of the surface water sample is efficiently and accurately analyzed, the result precision is high, the repeatability is good, and the operation is easy.
Owner:TIANJIN NORMAL UNIVERSITY

A homogeneous immunoassay kit for detecting target igm antibody in a sample and its use method and application

The invention relates to a homogeneous immunoassay kit for detecting a target IgM antibody in a sample, its use method and application. The kit includes reagent a, which includes a known antigen, which can specifically bind to the target IgM antibody in the sample to be tested to form a first complex; reagent b, which includes complement C1q, and the complement C1q can specifically binding to the first complex to form a second complex, and the complement C1q cannot bind to free IgM antibodies; wherein, any one of the known antigen and complement C1q is connected to a receptor; The acceptor can react with the received singlet oxygen to generate a detectable chemiluminescent signal; the reagent c includes a donor, and the donor can generate singlet oxygen in an excited state. The method for detecting the target IgM antibody in the sample by using the above-mentioned kit solves the impact of the non-specific IgM antibody on the detection.
Owner:CHEMCLIN DIAGNOSTICS CO LTD

Active photovoltaic string arc fault detection method and system

The present invention provides an active photovoltaic string arc fault detection method and system, including: active signal injection step: actively generate high-frequency signal, and actively output high-frequency signal on the photovoltaic string side; current signal collection step: in the photovoltaic string Measure and record the current signal on the DC bus on the string side to obtain the current signal information on the DC bus on the PV string side; arc fault judgment steps: perform wavelet transform processing and analyze the wavelet transform processing according to the current signal information on the DC bus on the PV string side After the signal characteristics, the wavelet transform processed signal characteristics are compared with the input high-frequency signal to determine whether an arc fault has occurred in the photovoltaic string, and obtain the active photovoltaic string arc fault detection result information. The invention performs detection on the side of the photovoltaic group string, and fundamentally solves the influence of inverter noise and different operating conditions on the detection.
Owner:SHANGHAI JIAOTONG UNIV +1

Multi-strategy media data stream filtering method and device for event detection

The invention relates to an event detection oriented multi-strategy media data stream filtering method and a device thereof. The method comprises the following steps: in an offline stage, according tothe collected media user data, a garbage user database and an application source blacklist list are constructed; in the online identification stage, media data are filtered through the trash user database and the application source blacklist list, and non-event media data are filtered through the media content and context characteristics, and the media data are online clustered to identify the event clusters, and the media data in the event clusters are purified. The invention effectively solves the influence of noise data and other non-event data in the micro-blog data stream on the micro-blog event detection. The method can clean up most non-event micro-blogs in micro-blog data stream, effectively improve the performance of micro-blog event detection, real-time, practical, is convenientfor extraction of hot topics and emergencies in time, and has an important guiding significance for new media data stream processing technology.
Owner:PLA STRATEGIC SUPPORT FORCE INFORMATION ENG UNIV PLA SSF IEU

State detection method and device for battery and battery pack

Disclosed are a method and a device for detecting the state of a battery and a battery pack. The present invention uses a simple battery model to calculate the current battery state according to historical battery parameters, and at the same time, continuously updates the battery internal resistance and battery capacitance in the battery model based on the change of the charge state, thereby solving the problem on the basis of the simple model The influence of parameters over time and battery power changes on battery power detection improves the accuracy of battery and battery pack state detection.
Owner:NANJING SILERGY SEMICON TECH CO LTD

Event detection oriented multi-strategy media data stream filtering method and device thereof

The invention relates to an event detection oriented multi-strategy media data stream filtering method and a device thereof. The method comprises the following steps: in an offline stage, according tothe collected media user data, a garbage user database and an application source blacklist list are constructed; in the online identification stage, media data are filtered through the trash user database and the application source blacklist list, and non-event media data are filtered through the media content and context characteristics, and the media data are online clustered to identify the event clusters, and the media data in the event clusters are purified. The invention effectively solves the influence of noise data and other non-event data in the micro-blog data stream on the micro-blog event detection. The method can clean up most non-event micro-blogs in micro-blog data stream, effectively improve the performance of micro-blog event detection, real-time, practical, is convenientfor extraction of hot topics and emergencies in time, and has an important guiding significance for new media data stream processing technology.
Owner:PLA STRATEGIC SUPPORT FORCE INFORMATION ENG UNIV PLA SSF IEU

Active photovoltaic string arc fault detection method and system

The invention provides an active photovoltaic string arc fault detection method and system. The method comprises steps of an active signal injection step, actively generating a high-frequency signal,and actively outputting the high-frequency signal at a photovoltaic string side; a current signal acquisition step, measuring and recording a current signal on a direct current bus on the photovoltaicstring side, and acquiring the current signal information on the direct current bus on the photovoltaic string side; and an arc fault judgment step, carrying out wavelet transformation machining according to the current signal information on the direct current bus on the side of the photovoltaic string side, analyzing signal characteristics after wavelet transformation machining, comparing the signal characteristics after wavelet transformation machining with input high-frequency signals, determining whether the photovoltaic string has an arc fault or not, and obtaining the arc fault detection result information of the active photovoltaic string. The method is advantaged in that detection is carried out on the photovoltaic string side, and influence of inverter noise and different operation conditions on detection is fundamentally eliminated.
Owner:SHANGHAI JIAO TONG UNIV +1

Method for detecting sulfur isotopes in sulfate for experiment teaching management

The invention relates to a method for detecting sulfur isotopes in sulfate for experimental teaching management, and discloses a method for detecting sulfur stable isotopes in a water sample for experimental teaching in an SO+ mode, which comprises the following specific steps: filtering, acidifying, precipitating and evaporating the water sample for experimental teaching to dryness, filling a tin cup with the water sample, and wrapping; and detecting the sample to be detected by adopting an element analyzer stable isotope mass spectrometer. According to the invention, the secondary ionization effect of the ion source high-energy electron flow on SO2+ is utilized to generate SO+ to carry out sulfur isotope detection, so that accurate, efficient and comprehensive management of the water sample for experiment teaching is realized.
Owner:TIANJIN NORMAL UNIVERSITY

Technology for detecting sulfur stable isotope of root tip meristem culture garlic

The invention discloses a technology for detecting sulfur stable isotope of root tip meristem culture garlic in an SO+ mode, which comprises the following specific steps: drying, grinding and filtering a root tip meristem culture garlic bulb sample by using a screen, filling into a tin cup, wrapping, and detecting a sample to be detected by using an element analyzer-stable isotope mass spectrometer. According to the method, secondary ionization and efficient separation of high-energy electron flow to SO2+ are realized by utilizing parameters of the tuning ion source ion lens and the quadrupole mass analyzer, so that the requirement of rapid and accurate detection of the sulfur isotope ratio of the root apex meristem culture garlic is perfected, and the detection result is high in accuracy, good in reproducibility and easy to operate and maintain.
Owner:TIANJIN NORMAL UNIVERSITY

Sludge sulfur element tracing method in riverway engineering and application

The invention discloses a sludge sulfur element tracing method in riverway engineering and application, and the method comprises the following specific steps: drying, grinding and filtering a sludge sample through a screen, loading the sludge sample into a tin cup and wrapping the tin cup, and detecting a to-be-detected sample by adopting an element analyzer-stable isotope mass spectrometer. According to the invention, the high-energy electron flow generates a secondary ionization effect by optimizing the ion source H plate and the cathode voltage, and sulfur isotope detection is carried out in a sulfur monoxide mode, so that efficient and accurate detection of the sulfur isotope ratio of the river engineering sludge sample is realized, the result precision is high, the reproducibility is good, and the maintenance is simple and convenient.
Owner:TIANJIN NORMAL UNIVERSITY

BJ-1 wheat sulfur stable isotope detection method based on sulfur monoxide mode

The invention discloses a BJ-1 wheat sulfur stable isotope detection method based on a sulfur monoxide mode, which comprises the following specific steps: drying, grinding and filtering a BJ-1 wheat grain sample by a screen, filling into a tin cup, wrapping, and detecting a to-be-detected sample by adopting an element analyzer-stable isotope mass spectrometer. By tuning the voltage of the ion source ion repulsion plate of the isotope mass spectrometer, the high-energy electron flow generates a secondary ionization effect on SO2+ to generate SO+, and the SO+ is effectively analyzed by tuning the voltage of the quadrupole mass analyzer, so that the efficient and accurate detection capability of the BJ-1 wheat delta S34 isotope is remarkably improved, and the result precision, stability and efficiency are high.
Owner:TIANJIN NORMAL UNIVERSITY

Cultivation landscape plant sulfur isotope determination method and application

The invention discloses a method for generating SO+ by utilizing secondary ionization of an isotope mass spectrum ion source so as to accurately and efficiently detect sulfur stable isotopes in a cultivated landscape plant sample, which comprises the following specific steps: drying, grinding and filtering the cultivated landscape plant sample by a screen, filling a tin cup with the dried and ground cultivated landscape plant sample, and wrapping; and detecting the sample to be detected by adopting an element analyzer stable isotope mass spectrometer. High voltage of the tuning ion source and filament voltage are utilized to generate high-energy electron flow to perform secondary ionization on SO2+, SO+ is generated to perform sulfur isotope detection, and the result shows that the precision is high, the repeatability is good, and the analysis and test efficiency is high.
Owner:TIANJIN NORMAL UNIVERSITY

A bullet hole recognition method based on deep learning

The invention discloses a bullet hole identification method based on deep learning. The method comprises the following steps: Step 1, model building; Step 2, data collection; Step 3, data processing and labeling; Step 4, model training; Step 5, Bullet hole identification. The identification system used in this method has very low requirements on the target surface; the probability of false detection, missed detection, and re-inspection is below 1%, and the accuracy of bullet hole identification is high, meeting the requirements for use; the identification system is used in this method to detect The delay is less than 40ms, and the detection results are displayed synchronously on the real-time video stream; in the case of dense bullet holes, the overlap of bullet holes is less than 50%, that is, bullet holes and overlapping bullet holes can be distinguished; when the target paper shakes relative to the camera, the center point alignment algorithm is used , so that the relative position of the bullet hole and the center remains unchanged, which solves the influence of the target paper shaking on the detection; uses the fuzzy detection algorithm to filter out the blurred picture frames when the bullet hits, thus effectively solving the misidentification caused by the blurred picture.
Owner:深圳深知未来智能有限公司

Method for analyzing sulfur stable isotopes in seawater by using sulfur monoxide ion technology

The invention discloses a method for detecting sulfur stable isotopes in a seawater sample in an SO+ mode, which comprises the following specific steps: filtering, acidifying, precipitating and evaporating the seawater sample to dryness, filling a tin cup with the seawater sample, wrapping, and detecting the sample to be detected by using an element analyzer-stable isotope mass spectrometer. By tuning the voltage of the electron bombardment source and the focusing electrode, the high-energy electron flow is utilized to perform secondary ionization on SO2+ so as to generate SO+ for sulfur isotope detection, thereby enhancing the efficiency and accuracy of the sulfur isotope ratio of the seawater sample.
Owner:TIANJIN NORMAL UNIVERSITY

A tubular NOx sensor

ActiveCN110632136BAddressing the Impact of DetectionSolve the problem of leakage affecting measurement sensitivityMaterial electrochemical variablesNitrogen oxidesHoneycomb
The invention provides a tubular NOx sensor, which includes a heating shell, a base, a diffusion barrier and a sleeve, the base includes a bottom plate and an intake pipe, the heating shell is fixed on the bottom plate and the intake pipe is inserted into the heating shell, and the diffusion barrier is fixed on the upper end of the intake pipe , the sleeve is set on the diffusion barrier, the diffusion barrier is a honeycomb coal cylinder, the base and the sleeve are made of zirconia, the outer wall of the intake pipe is provided with the lower section of the positive electrode of the main pump electrode, the lower section of the negative electrode of the main pump electrode, the lower section of the auxiliary pump electrode and Reference electrode, the sleeve is provided with the upper section of the positive electrode of the main pump electrode, the upper section of the negative electrode of the main pump electrode and the upper section of the auxiliary pump electrode, the upper section and the lower section of the positive electrode of the main pump electrode are connected, the upper section and the lower section of the negative electrode of the main pump electrode are connected, the upper section and the lower section of the auxiliary pump electrode are connected, The inner wall of the heating shell is not in contact with the intake pipe and the sleeve, and the inner wall of the intake pipe is provided with a reference electrode. The beneficial effect of the present invention is to solve the problem that the heater and the sensitive element are integrated in the existing nitrogen oxide sensor, and the leakage of the heater affects the measurement sensitivity.
Owner:武汉中能天华节能环保科技有限公司

Method for detecting sulfur stable isotope of six-petal red garlic in sulfur monoxide mode

The invention discloses a method for detecting sulfur stable isotope of six-petal red garlic in an SO+ mode, which comprises the following specific steps: drying, grinding and filtering a six-petal red garlic bulb sample by a screen, filling the six-petal red garlic bulb sample into a tin cup, wrapping, and detecting a sample to be detected by adopting an element analyzer-stable isotope mass spectrometer. According to the method, the tuning ion source electron bombardment source generates the high-energy electron flow to perform secondary ionization on SO2+ to generate SO+, and the signal stability of the SO+ is improved by controlling the pressure intensity of the carrier gas, so that the accurate and efficient detection of the sulfur isotope ratio of the six-petal red garlic is realized, the result precision is high, the reproducibility is good, and the operation is easy.
Owner:TIANJIN NORMAL UNIVERSITY

A chemical vapor deposition device including a Raman spectroscopy in-situ measurement chamber

The present invention relates to a chemical vapor deposition device comprising a Raman spectroscopy in-situ measurement cavity. The device comprises a transmission device, a reaction cavity for performing chemical vapor deposition reaction on a thin film material and a monitoring cavity for performing Raman spectroscopy in-situ monitoring on the thin film material; the reaction cavity communicateswith the monitoring cavity, a reaction base is arranged in the reaction cavity, and a Raman spectroscopy monitoring module is arranged in the monitoring cavity; the reaction base is used as a substrate for film material growth; the transmission device is used for controlling the reaction base to move between the reaction chamber and the monitoring chamber; and the Raman spectroscopy monitoring module is used for performing Raman spectroscopy in-situ monitoring on the thin film material moved into the monitoring cavity. The present invention provides the chemical vapor deposition device comprising the Raman spectroscopy in-situ measurement cavity, which solves the problem of in-situ Raman detection of the thin film under the condition that the growth of the thin film is not affected, and further can adjust the process in real time to reduce defects.
Owner:WUHAN UNIV
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