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41results about How to "Reduce excitation" patented technology

Bulk acoustic wave resonator and bulk acoustic wave filter

PendingCN113810011ASuppressing lateral pseudo-modesHigh Q valueImpedence networksSound waveStanding wave
The invention provides a bulk acoustic wave resonator and a bulk acoustic wave filter, and relates to the technical field of filters. The bulk acoustic wave resonator comprises a substrate, an acoustic reflection structure, a bottom electrode, a piezoelectric layer and a top electrode, wherein the acoustic reflection structure, the bottom electrode, the piezoelectric layer and the acoustic reflection structure are sequentially stacked on the substrate; orthographic projections of the top electrode, the piezoelectric layer, the bottom electrode and the acoustic reflection structure on the substrate have an overlapping region; the overlapping region is an asymmetric region; the contour of the overlapping region is formed by connecting a first curve and a second curve end to end; and the first curve and the second curve are different in shape. Thus, when transverse sound waves are propagated in the overlapping region, because the contour of the overlapping region is composed of two curves, the transverse sound waves can be reflected at different angles after being reflected by the curve edges, so that the regularity of the propagation path of the transverse sound waves is destroyed, an irregular state is presented, excitation of transverse standing waves can be effectively weakened, the transverse pseudo mode of the bulk acoustic wave resonator is suppressed, and the Q value of the device is improved.
Owner:武汉敏声新技术有限公司
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