The invention discloses a
thermal mass spectrometry-based
metal precursor
pyrolysis characteristic detection method, relates to the technical field of precursor
pyrolysis characteristic detection, and aims to solve the problem that the comprehensive purity and
impurity content of a product cannot be comprehensively evaluated by a current
metal precursor characterization method. A
metal precursor is promoted to volatilize in a constant-temperature or temperature-rising heating mode under the protection of
inert gas, a thermal
weight loss curve is drawn according to the correlation between residual weight and time and temperature, meanwhile, along with
decomposition of substances, the
weight loss curve jumps, different types of molecular
ion fragments can be detected through the combined
mass spectrum, and
qualitative analysis is achieved. The volatilization rate and the
decomposition characteristic of the precursor are represented through a curve and a molecular
ion peak, volatilization and
decomposition products are quantified through the thermal
weight loss proportion and the acquisition proportion of molecular
ion fragments, and finally, non-volatile
evaporation residues remaining are used as the non-volatile matter
impurity content of ultra-pure chemicals. Qualitative and quantitative detection of the purity,
impurity components and decomposition characteristics of the metal precursor is realized.