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33results about How to "Improve the signal-to-background ratio" patented technology

Scanning system for inspecting anamolies on surfaces

An optical scanning system and method for detecting anomalies, including pattern defects and particulate contaminants, on both patterned and unpatterned surfaces, using a light beam, scanning at a grazing angle with respect to the surfaces, a plurality of detectors and an interchannel communication scheme to compare data from each detector, which facilitates characterizing anomalies. The light beam illuminates a spot on the surface which is scanned over a short scan-line. The surface is moved in a manner so that the spot is scanned over its entire area in a serpentine fashion along adjacent striped regions. The plurality of detectors include groups of collector channels disposed circumferentially around the surface, a bright field reflectivity / autoposition channel, an alignment / registration channel and an imaging channel. The collector channels in each group are symmetrically disposed, in the azimuth, on opposite sides of the center of the scan line. The position of the collector channels, as well as the polarization of the beam, facilitates distinguishing pattern defects from particulate contaminants. The bright field reflectivity / autoposition channel is positioned to receive specularly reflected light that carries information concerning local variation in reflectivity, which is used to classify detected anomalies, as well as determine variations in the height of the surface. The alignment / registration channel is positioned to detect a maximum of the light scattered from the pattern on the surface to ensure that the streets of die present on the surface are oriented so as not to be oblique with respect to the scan line. The imaging channel combines the advantages of a scanning system and an imaging system while improving signal / background ratio of the present system.
Owner:NIKOONAHAD MEHRDAD +3

Device and method for eliminating back light signal by utilizing dual-optical switch

InactiveCN101969177AAchieve recoverySuppression of background optical noiseLaser detailsInformation processingLight signal
The invention relates to an optical signal detection technology, in particular to a device and a method for eliminating a back light signal by utilizing a dual-optical switch. The invention solves the problem that the existing back light restraining technology can not eliminate the back light signal which is synchronous with a pulse laser signal and has the same frequency with the pulse laser signal. The device for eliminating the back light signal by utilizing the dual-optical switch comprises a pulse laser, a practice target, the dual-optical switch, a single photon detector and a computer, wherein the dual-optical switch comprises a first acoustic optical modulator and a second acoustic optical modulator; the external trigger input end of the pulse laser is connected with a pulse signal generator; and the external trigger input end of the pulse signal generator is connected with a function signal generator, and the output end of the pulse signal generator is connected with a time-to-amplitude converter. The invention solves the problem that the existing back light restraining technology can not eliminate the back light which is synchronous with the pulse laser signal and has the same frequency with the pulse laser signal, and is suitable for weak pulse laser signal detection in the fields of precision measurement, communication, information processing, military and the like.
Owner:SHANXI UNIV

Total internal reflection illumination and semi-total internal reflection illumination dual optical path fluorescence microscope system

The invention discloses a total internal reflection illumination and semi-total internal reflection illumination dual optical path fluorescence microscope system. A beam-splitter plate I is arranged on the light path of exciting light and the angle between the beam-splitter plate I and the light path is 135 degrees so that the exciting light is divided into a vertical transmission light and a vertical reflected light; the transmission light is reflected through a reflector so as to be parallel to the reflected light; the light paths of the reflected light and the transmission light are respectively and sequentially provided with a graded-density neutral filter, a convex lens I, a convex lens II and a light spot aperture regulator; the reflected light and the transmission light then form two vertical light paths by adjusting transmission directions through the reflector; convex lens III are respectively arranged on the mutually vertical light paths of the reflected light and the transmission light; the reflected light and the transmission light pass through the convex lens III so as to be incident to a beam-splitter plate II having an angle of 135 degrees with a light path of the reflected light; and two parallel lights divided through the beam-splitter plate II are incident to an exciting light inlet of a microscope. The total internal reflection illumination and semi-total internal reflection illumination dual optical path fluorescence microscope system can be used for bleaching fluorescence molecule of a cell membrane area, background fluorescence interference caused when the fluorescence molecule of the cell membrane area images a focal plane in a cell is avoided, and a signal background ratio of semi-total internal reflection fluorescence imaging in the cell is further improved.
Owner:INST OF CHEM CHINESE ACAD OF SCI

Total internal reflection illumination and semi-total internal reflection illumination dual optical path fluorescence microscope system

The invention discloses a total internal reflection illumination and semi-total internal reflection illumination dual optical path fluorescence microscope system. A beam-splitter plate I is arranged on the light path of exciting light and the angle between the beam-splitter plate I and the light path is 135 degrees so that the exciting light is divided into a vertical transmission light and a vertical reflected light; the transmission light is reflected through a reflector so as to be parallel to the reflected light; the light paths of the reflected light and the transmission light are respectively and sequentially provided with a graded-density neutral filter, a convex lens I, a convex lens II and a light spot aperture regulator; the reflected light and the transmission light then form two vertical light paths by adjusting transmission directions through the reflector; convex lens III are respectively arranged on the mutually vertical light paths of the reflected light and the transmission light; the reflected light and the transmission light pass through the convex lens III so as to be incident to a beam-splitter plate II having an angle of 135 degrees with a light path of the reflected light; and two parallel lights divided through the beam-splitter plate II are incident to an exciting light inlet of a microscope. The total internal reflection illumination and semi-total internal reflection illumination dual optical path fluorescence microscope system can be used for bleaching fluorescence molecule of a cell membrane area, background fluorescence interference caused when the fluorescence molecule of the cell membrane area images a focal plane in a cell is avoided, and a signal background ratio of semi-total internal reflection fluorescence imaging in the cell is further improved.
Owner:INST OF CHEM CHINESE ACAD OF SCI
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