The invention discloses a stripping device for an
integrated circuit (IC)
chip. The device comprises a mounting plate, a position regulation mechanism, a sliding table mechanism, an ejector pin mechanism and a vacuum generator. The ejector pin mechanism comprises a sleeve, a
linear motor, a linear transmission mechanism, a
force sensor, an ejector pin seat, an ejector pin clamping piece and an ejector pin, wherein the sleeve is arranged on a sliding table; the
linear motor is arranged in the sleeve, and the control end of the
linear motor is connected with the output end of an external control center; the linear transmission mechanism is arranged in the sleeve, and the lower end of the linear transmission mechanism is connected with an output shaft of the linear motor; the
force sensor is arranged between the output shaft of the linear motor and the linear transmission mechanism, and the
signal output end of the
force sensor is connected with the input end of the external control center; the ejector pin seat is arranged at the top of the sleeve; an air hole is formed in the surface of the ejector pin seat; the ejector pin seat is connected with an air tube of the vacuum generator through the air hole; the ejector pin clamping piece is arranged in the ejector pin seat, and is connected with the upper end of the linear transmission mechanism; and the ejector pin is clamped through the ejector pin clamping piece. A
closed loop force control scheme is adopted, and the
chip is stripped on the premise of no damage to the
chip, so that the device has the characteristics of safety, high efficiency and high stripping reliability.