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129results about How to "Reduced package area" patented technology

MEMS (Micro-Electromechanical System) sensor encapsulation structure and encapsulation method thereof

The invention relates to an MEMS sensor encapsulation structure and an encapsulation method thereof, which are used for encapsulating an MEMS sensor. The MEMS sensor encapsulation structure is characterized by comprising a ceramic base, a side wall and a top cap, wherein a plurality of metal bonding pads are respectively arranged on a top layer and a bottom layer of the ceramic base; the metal bonding pads on the top layer of the ceramic base are connected with leads of the MEMS sensor; the MEMS sensor is arranged on the ceramic base; the metal bonding pads on the bottom layer of the ceramic base are connected with an external circuit; the ceramic base adopts one-layer or multi-layer perpendicularly interconnected structure; the side wall and the top cap are both made of kovar alloy. According to the invention, the ceramic base of which coefficient of thermal expansion is approximate to that of the MEMS sensor material is selected as the encapsulation material, in order to reduce influence of the base expansion stress to the MEMS sensor; meanwhile, the ceramic base can be utilized to realize one-layer perpendicular interconnection or multi-layer perpendicular interconnection; the system-level integration between the MEMS sensor and the peripheral circuit can be realized within a small area; high-density system-level encapsulation can be realized; the encapsulation flexibility and the expansibility of the MEMS sensor can be realized.
Owner:INST OF GEOLOGY & GEOPHYSICS CHINESE ACAD OF SCI

Three-dimensional multi-chip encapsulation module based on buried substrate and method

The invention provides a buried substrate based multi-chip module structure for realizing three-dimensional high-density encapsulation (3D-MCM). The upper surface and the lower surface of the substrate have concave cavity structures; different chips having larger size difference are placed and wires are arranged in the cavity structures having different sizes so as to form a buried three-dimensional encapsulation structure; a plurality of chips are interconnected by using a conventional wire bonding method; a chip protection mode adopts two packing processes, namely sealing glue dropping and surrounding dam packing; a pin output form adopts a peripheral ball grid array mode; and by the concave cavity structures, the encapsulation area is reduced, the encapsulation density is enhanced, the bonded wire is shortened effectively, and the signal delay is decreased. The whole process and the surface assembling process are compatible with each other and have characteristics of simpleness and low cost. By the concave cavity structures on the upper surface and the lower surface of the substrate, the warping of the substrate is decreased and the reliability of the three-dimensional encapsulation structure is improved.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI

Low temperature co-fired ceramic-based micro-electromechanical system (MEMS) packaging method

The invention discloses a low temperature co-fired ceramic-based micro-electromechanical system (MEMS) packaging method. The method comprises the following steps of: preparing an upper low temperature co-fired ceramic substrate and a lower low temperature co-fired ceramic substrate respectively and forming a three-dimensional electrically-interconnected network, an embedded micro-channel and an open cavity in the upper substrate and/or the lower substrate; aligning the upper substrate with the lower substrate for packaging, packaging components and parts in the cavity and communicating the micro-channel with the cavity and the outside of a packaged body; and connecting an external micro-tube to the outlet of the micro-channel, which leads to the outside of the package body, and realizing gas or liquid flow between the cavity and the outside through the external micro-tube. The method has the advantages of improving the integration level, the stability and the flexibility of MEMS packaging, realizing vacuum packaging and heat dissipation of the components and parts in the cavity by conveying a circulating radiating medium through the micro-channel and conveying detection samples and the like to medical, biological or chemical MEMS components and parts in the packaging cavity through the micro-channel.
Owner:PEKING UNIV

Method of threshold segmentation detection for circular holes in flexible circuit board

The invention discloses a method of threshold segmentation detection for circular holes in a flexible circuit board. The method comprises the steps of obtaining a gray scale image of a flexible circuit board according to an original image of the flexible circuit board; segmenting the gray scale image of the flexible circuit board by using an adaptive threshold segmentation method based on a gray scale histogram and obtaining a segmentation result image of the flexible circuit board; obtaining a connected domain contour image of the segmentation result image of the flexible circuit board, performing initial screening based on geometric properties of the connected domain contour, and establishing a candidate set of circles; judging the validity of candidate circles in the candidate set in sequence, determining the valid candidate circles and the invalid candidate circles in the candidate set, and removing the invalid candidate circles in the candidate set; and calculating the circle center, radius and roundness parameters of the valid circles by using a fitting method. The method of the invention can detect the circular holes in the flexible circuit board more quickly and accurately,and realizes the real-time detection of the circular holes; and for flexible substrates, the method of the invention has higher detection precision of the circular holes therein.
Owner:SOUTH CHINA UNIV OF TECH

Gold-wire-free encapsulation method of large power white light LED part and white light LED part

The invention relates to a gold-wire-free encapsulation method of a large power white light LED part and a white light LED part, which belong to the field of the semiconductor luminous part, and comprise a chip is electrically connected with an outer lead bracket electrode, a fluorescent material layer is arranged at one side of the chip, a mono-crystal fluorescent material layer is adopted to form the fluorescent material layer, a transparent conductive film is prepared on the surface of the mono-crystal fluorescent material layer, a conductive metal electrode is arranged on the transparent conductive film, a mono-crystal fluorescent material wafer which carries the transparent conductive film and the conductive metal electrode forms a mono-crystal fluorescent material composite-functionunit, the mono-crystal fluorescent material composite-function unit is encapsulated with the chip through an eutectic welding way, and an electric connection channel is established between a pn electrode of the chip and the outer lead bracket electrode. By adopting the surface contact-type electric connection, the encapsulation reliability of the white light LED part is improved, the service lifeof the LED is remarkably prolonged, and the light-emitting efficiency is improved. The method is particularly applicable to the mass integration encapsulation production process and can effectively reduce the manufacturing cost of the LED luminous part.
Owner:KUSN KAIWEI ELECTRONICS

Three-dimensional fan-out type integrated packaging structure and packaging process thereof

The invention relates to a three-dimensional fan-out type integrated packaging structure. The integrated packaging structure comprises at least two re-wiring layers which are dielectric layers; metalconnecting structures for connecting the two sides for mutual matching to form an interconnection structure are arranged on the two side layer surfaces of the dielectric layers; the metal connecting structures expose the dielectric layers to be used as metal contacts; plastic packaging layers are arranged on one sides of the re-wiring layers; chips or passive elements are plastically packaged in the plastic packaging layers; and the adjacent re-wiring layers are connected through metal conductive columns. The invention also discloses a packaging process of the three-dimensional fan-out type integrated packaging structure. By adoption of the design scheme of the invention, passive devices and bare wafers of different dimensions can be integrated and packaged synchronously, so that the degree of integration is greatly improved, and the integrated packaging structure is particularly suitable for applications adopting a large number of passive devices, such as wifi, PA, PMU and the like; and meanwhile, by virtue of the three-dimensional stacking mode, the packaging area is greatly reduced.
Owner:王新
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