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125results about How to "Small angle" patented technology
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Resonator system
ActiveUS7193418B2Improve efficiencySmall angleMagnetic measurementsElectric/magnetic detectionElectricityResonance
Owner:BRUKER SWITZERLAND AG
High efficiency permanent air filter and method of manufacture
InactiveUS6322615B1Reduce initial resistanceIncreasing and decreasing widthCombination devicesDispersed particle filtrationPorous layerAir filter
A novel air filter design for use in residential and commercial heating and air conditioning systems comprising a laminated unit having a filter media where the upstream side of the filter media having a porous layer of passive electrostatic netting. The air filter design has a corrugation configuration to increase the available surface area when compared to conventional flat filters.
Owner:CHAPMAN RICK L
Multifunctional paper shredder
InactiveUS7213780B2Improve the problemLarge widthGrinding machine componentsCocoaInterior spaceImpeller
Disclosed is a sliding panel structure of a multifunctional paper shredder, the paper shredder includes a housing having an interior space, an installing section at the top, an accommodating space at the bottom, and a feeding slot under the installing section. A pair of rolling blade wheels are disposed under the feeding slot which has a pressing wall surface extended vertically downward and aligned with the middle of the rolling blade wheels. An accommodating section is defined at the top of the housing, and a positioning section having at least one sliding groove is disposed at an inner side of the accommodating section. A sliding panel, having a plurality of slots is slidably installed in the accommodating section, having a positioning pin disposed in the positioning section correspondingly, and at least one slide pin embedded into the sliding groove for guiding the movement of the sliding panel.
Owner:AURORA GLOBAL INVESTMENT
Vibrating robotic crawler
ActiveUS20100145143A1Varied flexibilityOptimal and constant friction forceMicromanipulatorHollow article cleaningFlexible fiberStator
An autonomous vibration-driven device, for motion through a lumen or along a surface, utilizing an array of flexible fibers attached to the body of the device. The outer surface of the fibers have an anisotropic coefficient of friction with the surface along which the device is to move, and the fibers extend from the device body such that at least some of the fibers are in contact with the walls along a part of their length. A transducer is used to vibrate the device, such that it moves down the lumen. The transducer can be either device borne or external. A rotary device is also described, utilizing an array of fibers disposed on the rotor's body, the fibers having an anisotropic coefficient of friction with a central stator or with an outer circular wall. A planar motion device is also described for crawling over a planar surface.
Owner:TECHNION RES & DEV FOUND LTD
Method and apparatus for a projection system
InactiveUS7237929B2High light outputSmall angleNon-electric lightingPoint-like light sourcePhysicsSystem usage
Methods and apparatus for providing a projection system. In one embodiment, the system provides plurality of light sources collimating light using a parabolic concentrator. The system may direct light from a plurality of light sources towards a light collector which directs light towards a fresnel lens which directs light to a polarizing recombiner. The system may also usiethe recombiner to allow light having a first polarization to pass. The recombiner to convert light of a second polarization to light having the first polarization and letting converted light pass to an LCD image panel. In another embodiment, a projection system having a light source capable of achieving a bright, homogenized output is disclosed. The present invention provides such a projection system through at least two embodiments. The first projection system may use a cubic projection system. The second may use a conical projection system.
Owner:STAHL ALEXANDER W
Liquid crystal display device and manufacturing method for same
ActiveUS20100321283A1Small aperture ratioStep of become largeLiquid crystal compositionsStatic indicating devicesLiquid-crystal displayColor filter array
A liquid crystal display device with a higher aperture ratio is provided. According to one embodiment of the present invention, second color filters are formed so as to overlap with first color filters when adjacent color filters having different colors are formed on the TFT substrate side, so that the angle of the first tapers where said first color filters overlap and the angle of the second tapers where said second color filters overlap are set to 45° or more and 90° or less.
Owner:PANASONIC LIQUID CRYSTAL DISPLAY CO LTD
Patient alignment device
ActiveUS20090139030A1Facilitate procedureEliminate needOperating tablesNon-surgical orthopedic devicesEngineeringMedical procedure
A patient alignment device includes a table and a rotatable member positioned to rotate relative to the table. The rotatable member may be a head-support plate or a board which supports substantially all of a patient's body. A motor moves the board or plate so as to align the patient's body, or a part of the body, in a desired direction. The board may be formed in two segments, the segments being selectively connectable to each other, the segments also being selectively connectable to the table by pins, at various possible pivot points. Positioning of the pins determines the mode of rotation of the board. The invention allows an operator to align the patient's body with precision, by remote control, and without interrupting the medical procedure.
Owner:YANG JUN
High-spatial resolution remote-sensing image bag-of-word classification method based on linear words
InactiveCN102496034ASimple calculationFeature stabilizationCharacter and pattern recognitionFeature vectorWord list
The invention discloses a high-spatial resolution remote-sensing image bag-of-word classification method based on linear words, which includes first dividing images to be classified into a practice sample and a classification sample. Steps for the practice sample include collecting linear characteristics of the practice image and calculating linear characteristic vector; utilizing K-Means++ arithmetic to generate linear vision word list in cluster mode; segmenting practice images and obtaining linear vision word list column diagram of each segmentation spot block on the base; and conducting class label on the spot block and putting the classification and linear vision word column diagram in storage. After sample practice, steps for the classification sample include collecting linear characteristics of the images to be classified, segmenting the images to be classified, calculating linear characteristics vector on the base, obtaining linear vision word list column diagram of each segmentation spot block and selecting an SVM classifier to classify the images to be classified to obtain classification results. The high-spatial resolution remote-sensing image bag-of-word classificationmethod utilizes linear characteristics to establish bag-of-word models and is capable of obtaining better high spatial resolution remote sensing image classification effect.
Owner:NANJING NORMAL UNIVERSITY
Vehicle seat having container holder
InactiveUS6485097B1Not cause disfigurement of the vehicle seatDamage suppressionVehicle seatsPassenger spaceAbutmentFront edge
A vehicle seat which has a container holder that is not disfigured when subjected to load is provided. The vehicle seat comprises a seat body and a cup holder attached to a side of the seat body. The cup holder comprises a base member, a saucer member of which a base edge portion is turnably supported to a lower portion of the base member, engaging claws formed on the saucer member, and engaging tips which hold the saucer member in an approximately horizontal position by engaging with the engaging claws. When the engagement between the engaging claws and engaging tips is released by an accidental load, the saucer member turns downward. The abutment of the front edge portion of the saucer member with the floor of the interior stops the turn. A lower edge portion of the side of the seat body is provided with a projection.
Owner:TS TECH CO LTD
Crusher
InactiveUS20070029423A1Weakening force appliedReduce distortionCocoaGrain treatmentsWaste rubberRoom temperature
The present invention provides a crusher that is capable of crushing material such as waste rubber material under the conditions of room temperature without causing heating due to excessive friction, etc. The crusher of the invention comprises a pair of crushing panels, each crushing panel having crushing blades on the face opposing the other crushing panel; a charging port for charging material to be crushed into a space where the crushing panels oppose each other, the charging port being formed near the center of one of the crushing panels; and a driving part for rotating at least one of the crushing panels; wherein the angle formed by the pair of the crushing panels is smaller on the circumference side of the opposing faces of the crushing panels than on the central side of the opposing faces of the crushing panels.
Owner:SIGMA SEIKI
Sliding panel structure of a multifunctional paper shredder
InactiveUS20060175444A1Improve the problemLarge widthGrinding machine componentsCocoaInterior spaceImpeller
Disclosed is a sliding panel structure of a multifunctional paper shredder, the paper shredder includes a housing having an interior space, an installing section at the top, an accommodating space at the bottom, and a feeding slot under the installing section. A pair of rolling blade wheels are disposed under the feeding slot which has a pressing wall surface extended vertically downward and aligned with the middle of the rolling blade wheels. An accommodating section is defined at the top of the housing, and a positioning section having at least one sliding groove is disposed at an inner side of the accommodating section. A sliding panel, having a plurality of slots is slidably installed in the accommodating section, having a positioning pin disposed in the positioning section correspondingly, and at least one slide pin embedded into the sliding groove for guiding the movement of the sliding panel.
Owner:AURORA GLOBAL INVESTMENT
Focus tracking method under digestive endoscope based on sequential feature learning
PendingCN111915573AImprove inspection qualityAuxiliary detectionImage enhancementImage analysisTracking modelNetwork model
The invention relates to the technical field of medical image processing, in particular to a focus tracking method under a digestive endoscope based on sequential feature learning, which comprises thefollowing steps: collecting lesion video clips as training samples, and constructing and training a tracking model based on a convolutional neural network, a long short-term memory network and an optical flow vector diagram; acquiring network model parameters, acquiring a digestive endoscopy real-time examination video, deframing the digestive endoscopy real-time examination video into pictures,calculating optical flow vector diagrams of two adjacent frames of images, loading a network structure and model parameters based on a convolutional neural network, a long short-term memory network and the optical flow vector diagrams, and calculating the area and position of a focus in real time. By means of the method, the area and the position of the focus can be tracked in real time in the digestive endoscopy process for endoscopy doctors to refer to, and the situation that the focus area is lost due to illumination, angles, shielding and other reasons in the examination process can be effectively prevented. The detection and tracking capacity of the focus under the digestive endoscopy can be improved, and the examination quality of the digestive endoscopy is effectively improved.
Owner:WUHAN ENDOANGEL MEDICAL TECH CO LTD
Forming methods, forming devices for articles having a micro-sized shape and optical elements
ActiveUS20050013004A1High aspect ratioEasy to produceOptical articlesRecord information storageVitrificationRoom temperature
A article having a micro-sized shape being formed on the surface of the article by pressing a die onto the surface, wherein the elastic modulus of the article at room temperature is in the range of 1-4 GPa, the thickness of the article after forming is equal to 0.1 mm or more and 20 mm or less and the aspect ratio of the micro-sized shape is equal to 1 or more. A forming method to produce an article comprising the steps of setting the temperature of a die having a micro sized shape to be equal or higher than the glass transitional temperature of material having an elastic modulus of 1 to 4 (GPa) pressing the die to the material to transfer the micro sized shape to the material, and cooling the die having the micro sized shape.
Owner:KONICA MINOLTA INC
Optical system for diffusing light
InactiveUS6583932B1Improve efficiencyEasy to replaceDiffusing elementsDiffraction gratingsDiffraction orderFull width at half maximum
An improved optical system is provided for diffusing light uniformly over a wide angle, including, a diffractive element for diffracting light received by the system in multiple diffraction orders, and a diffusing element which diffuses the diffracted light. The diffractive element provides diffracted light having an angular distribution of intensities over the diffraction orders which is correlated to the power spectrum of the diffusing element such that the system produces a predetermined intensity distribution of diffused light. The diffraction period of the diffractive element is selected such that the angular separation between the zeroeth and first diffraction orders is approximately one-half the angular extent of the full-width-at-half-maximum of the power spectrum of the diffusing element. The strengths of the diffraction orders are selected such that the combination of diffused light from each diffractive order provides uniformity in the intensity of the diffused light from the system.
Owner:UNIVERSITY OF ROCHESTER
Hinge module for portable radio terminal
InactiveUS6963766B2Conveniently openConveniently openedHingesPivotal connectionsSteep slopeHinge angle
There is provided a hinge module for mechanically connecting a main body to a folder in a portable radio terminal. In the hinge module, a hinge shaft has an angled portion on one end and a shaft on the other end thereof, for rotating with the folder. A hinge cam is disposed to face the hinge shaft and has a pair of angled portions on the surface facing the hinge shaft, a valley portion between the angled portions, a fixing post along a rotating axis, and a guide protrusion for facilitating sliding of the hinge cam with respect to the hinge shaft while restricting rotational movement of the hinge cam. Each angled portion has a gentle slope and a steep slope that are asymmetrical sidewise. A hinge spring is disposed along the rotating axis and has one end connected to the fixing protrusion of the hinge cam, for providing restoring force to the hinge cam.
Owner:SAMSUNG ELECTRONICS CO LTD
Multi-Speed Sprocket Assembly
ActiveUS20090082147A1Easy transferReduce distanceChain/belt transmissionPortable liftingSprocketEngineering
A multi-speed sprocket assembly is provided for engaging a bicycle chain displaceable by a derailleur. The multi-speed sprocket assembly generally includes at least one smaller sprocket and at least one larger sprocket. The larger sprocket includes first and second transitional segments for alternatively receiving a shifting chain segment of the bicycle chain shifting from the smaller sprocket to the larger sprocket. The first transitional segment includes a first run-on ramp configured to receive an outer link plate of the shifting chain segment. The first run-on ramp has a first support point configured to bend the transferring bicycle chain at a first angle to position a first chain roller against a no-load tooth flank of the larger sprocket while a second chain roller rests against a load tooth flank of the smaller sprocket. The second transitional segment includes a second run-on ramp configured to receive the outer link plate of the shifting chain segment. The second run-on ramp has a second support point configured to bend the shifting chain segment at a second angle to position the first chain roller against the no-load tooth flank of the larger sprocket while the second chain roller rests against the load tooth flank of the smaller sprocket.
Owner:SRAM
Ratchet adjustment system
InactiveUS8683665B2Prevent slippingEasy to adjustSlide fastenersFasteningsLocking mechanismEngineering
An adjustment system for adjusting the width of a cuff has an elongated adjustment strip having a set of longitudinally extending teeth. Each tooth has a forward side and a rearward side. A length of each forward side is greater than a length of each of the rearward sides so that an angle between a longitudinal axis of the strip and the forward side is less than an angle between the longitudinal axis and the rearward side of each tooth. There is a locking mechanism formed by a base plate having a locking device on an underside and a guide for slidably connecting the locking mechanism to the strip. The tooth and the locking device are configured so that the locking device can be moved forward along the strip using only a small amount of force, and can then be moved rearward using a larger amount of force.
Owner:DURAFLEX HONG KONG
Suturing Needle
ActiveUS20100023054A1Increase resistanceReduce distortionSurgical needlesMetal-working apparatusSuturing needleWave shape
Provided is a suturing needle, which can be reliably held by a needle holder, which can transmit a high thrust, and which can reduce the fear of damaging a patient and the deformation when a strong force acts. The suturing needle has a representative constitution including a needle tip portion (1) having a needle tip (1a) for piercing the tissues, a tapered portion (2) continuing to the needle tip portion (1), a trunk portion (3) continuing to the tapered portion (2), and a thread attaching portion (4) continuing to the trunk portion (3) for connecting the suturing thread. The suturing needle is characterized in that the needle tip portion (1) is formed to have a circular section continuing to the sharp needle tip (1a), an angular section continuing to the sharp needle tip (1a), a circular section continuing to the blunt needle tip (1a) or an angular section continuing to the blunt needle tip (1a), in that the tapered portion (2) is formed to become gradually thicker from the needle tip portion (1) to the trunk portion (3), in that the trunk portion (3) is formed to have a substantially triangular section, the upper face of which is formed of a wave shape having at least two ridges and the slopes of which are formed of two flat faces, in that the trunk portion (3) is also formed to have relations of R1≧R2≧R3, when a peak (5) or the joint portion between the two flat faces has a diameter of R1, when the crest of the ridges has a roundness of R2, and when a valley (7) has a roundness of R3, in that the valley (7) is formed to correspond partially to the peak (5), and in that the thickness becomes continuously larger from the tapered portion (2) to the trunk portion (3).
Owner:MATSUTANI SEISAKUSHO CO LTD
Buoy for measuring air-sea interface flux
InactiveCN103625609AImprove data accuracySmall angleWaterborne vesselsBuoysHollow cylinderSingle point
The invention discloses a buoy for measuring air-sea interface flux. The buoy comprises a buoy body, a mooring system and a hydro meteorology sensor, wherein the hydro meteorology sensor is fixed on the buoy body, the mooring system is used for mooring the buoy body and adopts a single-point tightening mooring manner, a buoy body main frame of the buoy body consists of six closed hollow cylinders and is respectively connected with an upper support component and a lower support component through flanges, the six hollow cylinders are vertical, the upper end points of the six hollow cylinders are in the same horizontal surface, the lower end points of the six hollow cylinders are in the same horizontal surface, the lower support component connected at the lower end of the buoy body main frame is a three-dimensional structure connected by the closed hollow cylinders and takes on a pyramid shape, an instrument cabin and a float bowl are configured on the lower support component, a storage battery and a data acquisition unit are arranged in the instrument cabin, and the data acquisition unit is connected with the hydro meteorology sensor. The buoy for measuring air-sea interface flux has good stability, and the sinking and swing angles of the buoy body are small, so that the accuracy of the measured data of the air-sea interface flux is greatly improved.
Owner:STATE OCEAN TECH CENT
Outside handle for door, having easily bendable portion
An outside handle of a door for vehicles, having a base member; and a handle body coupled with an end portion of the base member in a freely rotatable form. An easily bendable portion is formed in the other end portion of the base member, wherein the easily bendable portion is bendable relatively easily in comparison with the other portions of the base member. Preferably, the easily bendable portion is a thin portion and a transmitting member working with operation of the handle body may be According to the thin portion, the weight of a vehicle or the like can be reduced and the space can be effectively used for arranging functional parts of the outside handle, thereby improving flexibility of design. The easily bendable portion may be a joint portion of two members, a bending portion having a hinge form, or a flexible portion made of a flexible material.
Owner:HONDA MOTOR CO LTD
Tool changer for machine tools
ActiveUS20100173762A1Reduce inertiaSmall driving forceMechanical apparatusTool changing apparatusRotational axisDrive motor
A tool changer for machine tools, the tool changer having at least one rotatable tool gripper, a supporting column for the tool gripper which can be lifted and lowered and rotated about a rotational axis, a mechanical cam gear for generating the lifting and rotating movements of the tool gripper, all driven by a drive motor connected to a cam barrel and intermediate gearing. The cam barrel has a tappet for the rotational drive of the tool gripper on its upper front and a cam curve or groove on its peripheral surface for the lifting movement of the tool gripper. The tappet drives a Maltese wheel supported on a shaft parallel to the rotational axis of the tool gripper. The Maltese wheel, the cam barrel, and the supporting column of the tool gripper are successively supported in a manner parallel to the axis.
Owner:DECKEL MAHO SEEBACH GMBH
Device assembly for tensioning fork ear type stay rope or steel pull rod and tensioning construction method of device assembly
ActiveCN104847122ASimple designCompact structureBuilding material handlingClassical mechanicsStructural engineering
The invention provides a device assembly for tensioning a fork ear type stay rope or a steel pull rod. The device assembly comprises a counter-force rack, a tensioning rod, a carrying pole beam and a jack; the counter-force rack is of a similar U-shaped structure and divided into two pieces; the opening of the U-shaped structure is designed into a step shape, and a bolt holes and a tensioning rod semicircular groove I to allow the tensioning rod to pass through are formed in the step; the carrying pole beam is of a split two-half structure, and the stay rope or the steel pull rod is capable of passing through the middle of the split two-half structure, and tensioning rod semicircular grooves II for mounting the tensioning rod are formed on the two sides of the split two-half structure; when the device assembly is applied to tensioning construction, the two pieces of the counter-force rack are mounted on the two sides of the fork ear of the fork ear type stay rope or the steel pull rod and are integrated by use of a bolt and a connecting plate; the two-half carrying pole beam is mounted on the extension cylinder end of the fork ear type stay rope or the steel pull rod and fixed by use of a bolt; the tensioning rod is put through the carrying pole beam and the counter-force rack, and anchored by use of a fixing nut at one end of the counter-force rack; the jack and a base plate are mounted on the other end of the tensioning rod and the other end of the tensioning rod is anchored by use of a tensioning nut; the device assembly is good in safety and high in universality in tensioning construction.
Owner:LIUZHOU OVM ENG
Method of manufacturing coil assembly unit for rotary electric machine
ActiveUS20090260222A1Less deformationNarrow widthMagnetic circuitFilament handlingElectric machineEngineering
A method of manufacturing a coil assembly unit comprises steps of coil forming, weaving, compressing steps. In the forming step, each coil wire is formed which provides linear portions and turn potions each connecting linear portions, during which bent portions are formed at both ends of each linear portion, the bent portions being bent so that mutually adjacent linear portions are deviated from each other. In the weaving step, the coil wires are mutually woven in turn, in which the turn portions intersect in turn. All the coil wires are subjected to the weaving step in turn to produce a woven coil assembly. In the compressing step, the woven coil assembly is compressed by compressing the woven coil so that each bent portion is deformed to be linear to allow the mutually adjacent linear portions to come closer to each other, thus producing the coil assembly unit.
Owner:DENSO CORP
Method of manufacturing coil assembly unit for rotary electric machine
ActiveUS7891082B2Less deformationIncrease speedMagnetic circuitFilament handlingElectric machineEngineering
Owner:DENSO CORP
Medical knife
InactiveUS20130172917A1Not easy to bendReduce usageIncision instrumentsEye surgeryCompound (substance)Engineering
[Problem] Because the knife edge of medical knives such as straight knives manufactured with austenite stainless steel is thin and sharp, there is the problem that the knife edge bends too easily when making incisions in the cornea, sclera, etc. during ophthalmologic surgery. The invention provides a medical knife capable of increasing the strength of the thin, sharp knife edge and preventing the reduction of sharpness. [Solution] This medical knife has a flat cutting part and an inclined surface formed along the border of said cutting part. By electrolytic polishing or chemical polishing of the inclined surface, a convexly curved cutting edge is formed on at least the edge of the inclined surface of the knife. The knife edge has a rounded configuration. The knife edge being rounded increases the thickness of the knife edge, increases the strength thereof and hinders bending.
Owner:MATSUTANI SEISAKUSHO CO LTD
Automatic lock
The invention discloses an automatic lock, which comprises a lock case, a spring bolt component, a swing piece and a trigger component, wherein a locking part, which is arranged in a part in the lock case, is arranged on the spring bolt component; a swing shaft is arranged on a position, which is more biased to a lock-out direction than the locking part on a lock-in terminal position, and the swing piece is provided with a butting part; the spring bolt component is provided with a space, which is capable of further moving to the lock-in direction under the thrust of the trigger component, in the lock-in state; rotating partial pressure, which tends to rotate to the lock-out direction, is applied to the swing piece, and lock-out partial pressure, which is capable of pushing the spring bolt component out along the lock-out direction, is applied to the spring bolt component; self-locking pressure is formed between the locking part and the butting part on the lock-in position by the rotating partial pressure and the lock-out partial pressure. The automatic lock solves the technical problem of complicated structure of the automatic lock in the prior art, so that the automatic lock with the simple structure is further provided.
Owner:WONLY SECURITY & PROTECTION TECH CO LTD
Burner for a Gas Turbine
InactiveUS20070207431A1Reduce turbulenceSmall angleContinuous combustion chamberGaseous fuel burnerCombustorSpray cone
A premix burner, for example for a gas turbine, having a conical swirl generator (1) and a cylindrical mixing section (2) which follows it in the direction of flow, includes a high-pressure atomizer nozzle (10) with one or more fuel feed passages. The high-pressure atomizer nozzle (10) includes at least two outlet passages, through which liquid fuel enters the swirl generator (1), these passages being arranged off-center with respect to the longitudinal axis of the nozzle and being configured in such a way that the spray cone (11) of the fuel is oriented at an angle (β) with respect to the longitudinal axis of the swirl generator (1) which is smaller than the cone half-angle (α) of the swirl generator (1). The outlet passages in particular have an internal geometry with a conically narrowed section.
Owner:ANSALDO ENERGIA SWITZERLAND AG
Crossbow and bolts
A crossbow and bolts are described herein. The crossbow may include a main frame defining a groove, a top limb, a bottom limb, a string and a trigger assembly. The top limb may extend in front of the main frame and be positioned above the lower limb. The string may be configured to be cocked backwards and engage with the trigger assembly. A bolt may be configured to attach to the string and be ejected from the crossbow when the trigger assembly is fired. The bolt may include a removable tip, a removable coupling, and a snap-on fletching. The crossbow may include a worm gear assembly to cock the string for firing.
Owner:GOEHRING III JACK J +1
Electrophoretic mobility measuring apparatus
ActiveUS7449097B2High sensitivityOptical attenuation reducedSludge treatmentVolume/mass flow measurementUltrasound attenuationOptoelectronics
The present invention provides an electrophoretic mobility measuring apparatus capable of conducting measurement with high sensitivity with optical attenuation reduced by incidence of light through the electrode face. This apparatus comprises a transparent electrode 63 forming a part of a cell wall of a cell 6 capable of confining a sample, and the other electrode 62 opposite to the transparent electrode 63. A voltage is applied across these electrodes 62, 63, and light is incident upon the inside of the cell 6 through the transparent electrode 63. The scattering light which scatters from a sample S at a predetermined angle θ with respect to the incident angle, is received through the transparent electrode 63. The Doppler displacement is then measured based on the difference in frequency between the incident light and the outgoing light. The direction of the scattering vector which is the vector difference between incident and outgoing vectors, is substantially identical with that of the normal line h of the transparent electrode face.
Owner:OTSUKA DENSHI CO LTD +1
Microlithographic projection exposure apparatus with immersion projection lens
InactiveUS20070024837A1Reduce dependenceSmall anglePhotomechanical exposure apparatusMicrolithography exposure apparatusAngle of incidenceOptical axis
A microlithographic projection exposure apparatus includes an illumination system and a projection lens which images a reticle onto a photosensitive layer. The projection exposure apparatus further includes an immersion arrangement for introducing an immersion liquid into an immersion interspace between a last optical element of the projection lens on the image side and the photosensitive layer. A transmission filter is designed and arranged in the projection lens in such a way that rays which enter the immersion interspace from the last optical element at an angle of incidence α are attenuated more strongly the smaller the angle of incidence α is. The transmission filter may be arranged e.g. in a pupil plane of the projection lens and may have a transmittance which increases with increasing distance from an optical axis of the projection lens. In this way compensation is provided for angle-dependent absorption in the immersion liquid.
Owner:CARL ZEISS SMT GMBH
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